• 제목/요약/키워드: electrical resistivity method

검색결과 838건 처리시간 0.033초

RF 마그네트론 스퍼터링법에 의해 증착된 구리막의 특성 (The properties of copper films deposited by RF magnetron sputtering)

  • 송재성;오영우
    • E2M - 전기 전자와 첨단 소재
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    • 제9권7호
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    • pp.727-732
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    • 1996
  • In the present paper, the Cu films 4.mu.m thick were deposited by RF magnetron sputtering method on Si wafer. The Cu films deposited at a condition of 100W, 10mtorr exhibited a low electrical resistivity of 2.3.mu..ohm..cm and densed microstructure, poor adhesion. The Cu films grown by 200W, 20mtorr showed a good adhesion property and higher electrical resistivity of 7.mu..ohm..cm because of porous columnar microstructure. Therefore, The Cu films were deposited by double layer deposition method using RF magnetron sputtering on Si wafer. The dependence of the electrical resistivity, adhesion, and reflectance in the CU films [C $U_{4-d}$(low resistivity) / C $U_{d}$(high adhesion) / Si-wafer] on the thickness of d has been investigated. The films formed with this deposition methods had the low electrical resistivity of about 2.6.mu..ohm..cm and high adhesion of about 700g/cm.m.m.

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흙의 구성광물과 간극수의 성분이 비저항값에 미치는 영향에 관한 연구 (A Study on the Effect of Soil Wineral and Component of the Pore Fluid to the Electrical Resistivity)

  • 윤춘경;유찬;윤길림
    • 한국환경농학회지
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    • 제17권1호
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    • pp.59-64
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    • 1998
  • The environmental problem of the rural area has been accelerated in soil as well as water. Soil contamination is usually caused by improper operation of landfills, abandoned mine fields, accidental spills, and illegal dumpings. Once soil contamination is initiated, pollutants migrate and may cause groundwater contamination which takes much effort for remediation. Early detection, therefore, is important to prevent further contamination. Electrical resistivity method was used to detect soil contamination, but it was not effective to the heterogeneous condition. Static cone penetrometer test (CPT) has been used widely to investigate geotechnical properties of the underground. In this study, electrical resistivity method and CPT are combined to improve the applicability of it. The pilot test was performed to examine the variation of electrical resistivity with different soil minerals and pore fluid characteristics. Soil samples used were poorly graded sand, silty sandy soil, and weathered granite soil. For all the cases, electrical resistivity decreased with increasing of moisture content. Soil mineral also affected the electrical resistivity significantly. Above all, leachate addition in the pore fluid was very sensitive and caused decreasing of electrical resistivity markedly. It implies that electrical resistivity method can be applied to investigate pollutant plume effectively. This is specially sure when the sensors contact the contaminated soils directly. The CPT method involves cone penetration to the ground, therefore, underground contamination around the cone could be investigated effectively even for heterogeneous condition as it penetrates if electrical resistivity sensors are attached on the cone.

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Application of resistivity monitoring to examine the grouting effect

  • Farooq, Muhammad;Park, Sam-Gyu;Kim, Jung-Ho;Song, Young-Soo
    • 한국지구물리탐사학회:학술대회논문집
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    • 한국지구물리탐사학회 2006년도 공동학술대회 논문집
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    • pp.79-82
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    • 2006
  • This paper presents to examine the ability of an electrical resistivity method to monitor the grouting effect at subsidence area. To monitor the changes in ground resistivity before and during the grout, series of electrical resistivity monitoring surveys have been conducted. Data has acquired in the form of grid making nine lines parallel to road and four lines traverse the road. Two kinds of electrode arrays modify pole-pole and dipole-dipole arrays were used during resistivity data acquisition. In this paper, the results show that electrical prospecting is an effective method to detect low resistivity imaging zone by grout during the ground reinforcement.

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다전극 배열을 사용한 DC 저항률 취득 시스템의 최적화 방법 (Optimization method of DC resistivity data acquisition system using multi-electrode arrays)

  • 부창진;김호찬
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2006년도 제37회 하계학술대회 논문집 D
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    • pp.1795-1796
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    • 2006
  • The accurate measurement of soil resistivity and earthing system resistance is fundamental to electrical safety. However, geological and meterological factors can have a considerable effect on the accuracy of conventional measurements and the validity of the measurement methods. This paper presents optimization method of dc resistivity data acquisition system using multi-electrode arrays.

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Effects of Packing Conditions on Apparent Resistivity Measurements of Polymer Powders

  • Park, K.S;S. Kawai;Kim, T.Y.;M. Yamaguma;T. Kodama;J.H Joung;M. Masui;M. Takeuchi
    • KIEE International Transactions on Electrophysics and Applications
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    • 제12C권4호
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    • pp.229-235
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    • 2002
  • The apparent volume resistivity of powders measured by both the tapping and the compressing methods was compared in this study. Factors such as applied voltage, pressure, corona charging, and so on affecting the apparent volume resistivity of polymer powders were also examined experimentally. Powders of polyacrylonitrile and Nylon 11 were mainly used. The values of the apparent resistivity of polymer powders taken by the tapping method turned out to be larger than those taken by the compressing method, which indicates that the apparent volume resistivity of polymer powders depends strongly on the measurement method. The apparent resistivity of polymer powders increased with an increase in applied voltage while it decreased with an increase in pressure, tapping time, and particle size. The influence of the moisture content of powder and corona charging on the resistivity of polymer powders is also discussed.

전기비저항(電氣比抵抗) 탐사(探査)에 의한 포항분지(浦項盆地)와 장기분지의 경계규명(境界糾明) (Investigation of Boundary between Pohang and Janggi Basins by Electrical Resistivity Survey)

  • 민경덕;윤혜수;문희수;이현구;이대하
    • 자원환경지질
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    • 제23권2호
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    • pp.215-219
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    • 1990
  • Geological and electrical resistivity surveys along the survey line of about 3 km between Kyungsangbukdo Youngilgun Hodong and Gwangmyungdong using by dipole-dipole electrode array method were carried out to examine the boundary and structural relationship between Tertiary Pohang and Janggi basins. Electrical resistivity data were interpreted qualitatively and quantitatively by means of pseudosection of apparent electrical resitivity distribution and finite difference method for two dimensional geologic structure model. The nearly vertical fault zone with low electrical resistivity value of 1-5 Ohm-m and widths of about 200m at the surface and 400 m at depth exists around 1.2 km west of national road between Ocheoneup and Yangbukmyun. Mudrocks, sandstones and tuffaceous rocks are widely distributed with electrical resistivity values of 6-77 Ohm-m. Especially, tuffaceous rocks with relatively high electrical resistivity value are predominant at eastern side of fault zone. Consequently, it is known that Pohang and Janggi basins are in fault contact.

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전자빔 증착법으로 제작한 Cu 박막의 부착력과 저항율 특성 (The Resistivity Properties and Adhesive Strength of Cu Thin firms Fabricated by EBE Method)

  • 백상봉;신중홍
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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    • pp.422-426
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    • 2003
  • Cu thin films of $6000{\AA}$ thickness were deposited by Electron Beam Evaporation(EBE) method on the glass. The resistivity properties and adhesion of Cu thin films were investigated by various annealing and substrate temperature. Cu thin films were annealed in the air and vacuum condition for 10 min after the deposition. The resistivity and adhesion(the force required to separate films from substrates) was measured by 4-point probe and scratch testing. The resistivity of non-annealing Cu thin films was distinguished more substrate temperature loot than substrate temperature R.T, $200^{\circ}C$. In the case of air condition annealing, as heating temperature was increased, the resistivity was decreased. In the case of vacuum condition annealing, the resistivity was increased at heating temperature $200^{\circ}C$. The best resistivity($1.72\;{\mu}{\Omega}{\cdot}cm$) of Cu thin films was obtained by the air condition heating temperature $200^{\circ}C$ at the substrate heating temperature $100^{\circ}C$. As a result of scratch testing, adhesion was increased by annealing. And maximum adhesion had 600 gf.

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고온가압소결한 $\alpha-SiC-ZrB_2$ 복합체의 전기전도기구 (Electrical Conductive Mechanism of Hot-pressed $\alpha-SiC-ZrB_2$ Composites)

  • 신용덕;주진영;권주성
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제48권2호
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    • pp.104-108
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    • 1999
  • The electrical conductive mechanism and temperature dependence of electrical resistivity of $\alpha-SiC-ZrB_2$ composites with $ZrB_2$ contents were investigated. The electrical resistivity of hot-pressed composites was measured by the Pauw method form $25^{\circ} to 700^{\circ}C$. The electrical resistivity of the composites follow the electrical conduction model for a homogeneous mixture of two kind of particles with different conductivity. Also, the electrical resistivity versus temperature curves indicate the formation of local chains of $ZrB_2$ particles. In case of $\alpha-SiC-ZrB_2$ composites containing above 39vol.% $ZrB_2$ showed positive temperature coefficient resistance(PTCR), whereas the electrical resistivity of $\alpha-SiC-21vol.% ZrB_2$ showed negative temperature coefficient resistance(NTCR).

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접지 그리드 설계를 위한 전기 저항 단층촬영법에 기반한 지표의 3차원 저항률 분포 추정 (Three-Dimensional Subsurface Resistivity Profile using Electrical Resistance Tomography for Designing Grounding Grid)

  • 캄밤파티 아닐 쿠마;김경연
    • 전자공학회논문지
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    • 제53권4호
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    • pp.117-128
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    • 2016
  • 대지의 접지 시스템 설치는 안전성과 전기 기기의 올바른 작동을 위해 필수적이며, 대지 파라미터, 특히 토양의 저항률은 대지 접지 시스템 설계에서 결정되어야 한다. 토양의 저항률을 측정하기 위한 가장 흔한 방법은 Wenner의 4전극 방법이 있으며, 이 방법은 1차원의 저항률을 얻기 위하여 가변 전극 간격을 갖는 큰 측정 세트가 요구되어 번거롭고, 시간소모가 많으며 비용이 많이 든다. 전기 저항 단층촬영법은 저비용이며 빠른 측정이 가능하다는 장점 때문에 토양의 저항률 분포를 추정하기 위해 적용될 수 있다. 전기 저항 단층은 관심지역에 놓인 전극에서 얻은 측정데이터를 사용하여 토양 저항률 분포를 특성화한다. 이때 전기 단층 촬영법의 역문제는 비선형성이 강하여 저항률 분포를 추정하기 위하여 Tikhonov 조정 방법을 갖는 반복적 Gauss-Newton 방법을 사용한다. 다양한 시뮬레이션을 수행하여 3차원 토양의 저항률 분포를 추정하는데 전기 저항 단층 촬영법은 유용한 성능을 제공하고 있음을 확인하였다.

복소수이미지 방법을 이용한 겉보기 대지저항률 계산 (Apparent Soil Resistivity Calculation Using Complex Image Method)

  • 김호찬;부창진;강민제
    • 전기전자학회논문지
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    • 제23권1호
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    • pp.318-321
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    • 2019
  • 겉보기대지저항률은 층의 깊이와 대지저항률과 같은 다층 대지파라미터들을 추정하는 데 사용된다. 겉보기대지저항률은 측정 될 수 있으며, 또한 겉보기대지저항률은 이들 파라미터들의 함수이기 때문에 주어진 대지 파라미터들로 계산 될 수 있다. 따라서 모든 최적화 알고리즘을 사용하여 계산된 겉보기대지저항률을 측정된 대지저항률에 가깝게 만드는 이들 파라미터들을 찾을 수 있다. 겉보기대지저항률을 계산하기위한 방정식은 0 차 Bessel함수를 포함하는 무한 적분으로 구성되어 있기 때문에 복잡하고 시간 소모적이다. 본 논문에서는 수평 다층 구조의 겉보기대지저항률을 계산하기 위한 빠른 알고리즘이 복소수이미지 방법을 사용하여 제시되었다.