• 한국진공학회지
• /
• 제6권1호
• /
• pp.91-96
• /
• 1997

평면형 유도 결합 플라즈마의 전기적 특성을 측정하였고 Langmuir probe를 이용하 여 전자의 밀도와 온도를 측정하였다. 코일과 플라즈마를 포함한 총 부하의 저항 성분은 1 에서 4$\Omega$까지 변하였고 인덕턱스는 $1.5\mu$H와 2$\mu$H사이의 값을 가졌다. $10^{11}/\textrm{cm}^3$ 이상의 고밀 도 플라즈마를 발생시켰으며 전자의 온도는 공정 조건에 따라 3에서 5eV까지 변하였다. 산 화막 식각시 선택도를 개선하기 위한 방법으로 바이어스 전압을 변조하는 방법을 모색하였 다. C4F8플라즈마에서 바이어스 변조 방법을 사용하였을 때 선택도는 크게 향상 되었으나 산화막 식각율이 400$\AA$/min 이하였다. 선택도 향상을 위해 수소를 첨가한 실험에서 $C_4F_8$ 플 라즈마에 60% $H_2$를 첨가하였을 때 선택도 50이상, 산화막 식각율 2000$\AA$/min 이상의 결과 를 얻을 수 있었다.

• KSII Transactions on Internet and Information Systems (TIIS)
• /
• 제4권4호
• /
• pp.575-594
• /
• 2010

In this study, we propose a space search algorithm (SSA) and then introduce a hybrid optimization of fuzzy inference systems based on SSA and information granulation (IG). In comparison with "conventional" evolutionary algorithms (such as PSO), SSA leads no.t only to better search performance to find global optimization but is also more computationally effective when dealing with the optimization of the fuzzy models. In the hybrid optimization of fuzzy inference system, SSA is exploited to carry out the parametric optimization of the fuzzy model as well as to realize its structural optimization. IG realized with the aid of C-Means clustering helps determine the initial values of the apex parameters of the membership function of fuzzy model. The overall hybrid identification of fuzzy inference systems comes in the form of two optimization mechanisms: structure identification (such as the number of input variables to be used, a specific subset of input variables, the number of membership functions, and polyno.mial type) and parameter identification (viz. the apexes of membership function). The structure identification is developed by SSA and C-Means while the parameter estimation is realized via SSA and a standard least square method. The evaluation of the performance of the proposed model was carried out by using four representative numerical examples such as No.n-linear function, gas furnace, NO.x emission process data, and Mackey-Glass time series. A comparative study of SSA and PSO demonstrates that SSA leads to improved performance both in terms of the quality of the model and the computing time required. The proposed model is also contrasted with the quality of some "conventional" fuzzy models already encountered in the literature.

• 한국산업정보학회논문지
• /
• 제18권6호
• /
• pp.9-16
• /
• 2013

생체임피던스 측정 시스템은 비침습적이고, 환자의 수분함량을 쉽게 측정할 수 있게 한다. 생체임피던스 측정에서 정확하고 재현성 있는 결과를 얻기 위해서는 측정조건과 하드웨어 사양의 선택 및 구성이 매우 중요하다. 본 연구에서는 1kHz에서 100kHz 주파수 범위에서 락인엠프, 랩뷰 제어시스템을 이용하여 사지와 흉부에 대해 생체임피던스 측정을 각각 수행하였으며, 측정 및 모의실험 결과를 통해 제안한 모델의 파라메터와 인가 전원의 주파수에 따른 저항 및 리액턴스 변화가 인체실험 결과와 유사한 결과로 나타남을 확인하였다. 제안한 실시간 생체임피던스 측정 시스템은 높은 신뢰성을 가지며, 인체에 대한 임피던스의 임상적인 특성 연구에도 적용될 수 있을 것이다.

• 소성∙가공
• /
• 제17권8호
• /
• pp.594-599
• /
• 2008

This paper presents a micro air pump based on the synthetic jet to supply reactant at the cathode side for micro fuel cells. The synthetic jet is a zero mass flux device that converts electrical energy into the momentum. The synthetic jet actuation is usually generated by a traditional PZT-driven actuator, which consists of a small cylindrical cavity, orifices and PZT diaphragms. Therefore, it is very important that the design parameters are optimized because of the simple configuration. To design the synthetic jet micro air pump, a numerical analysis has been conducted for flow characteristics with respect to various geometries. From results of numerical analysis, the micro air pump has been fabricated by the PDMS replication process. The most important design factors of the micro air pump in micro fuel cells are the small size and low power consumption. To satisfy the design targets, we used SP4423 micro chip that is high voltage output DC-AC converter to control the PZT. The SP4423 micro chips can operate from $2.2{\sim}6V$ power supply(or battery) and is capable of supplying up to 200V signals. So it is possible to make small size controller and low power consumption under 0.1W. The size of micro air pump was $16{\times}13{\times}3mm^3$ and the performance test was conducted. With a voltage of 3V at 800Hz, the air pump's flow rate was 2.4cc/min and its power consumption was only 0.15W.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2011년도 제40회 동계학술대회 초록집
• /
• pp.491-491
• /
• 2011

Transparent and flexible electronic devices that are light-weight, unbreakable, low power consumption, optically transparent, and mechanical flexible possibly have great potential in new applications of digital gadgets. Potential applications include transparent displays, heads-up display, sensor, and artificial skin. Recent reports on transparent and flexible field-effect transistors (tf-FETs) have focused on improving mechanical properties, optical transmittance, and performances. Most of tf-FET devices were fabricated with transparent oxide semiconductors which mechanical flexibility is limited. And, there have been no reports of transparent and flexible all-organic tf-FETs fabricated with organic semiconductor channel, gate dielectric, gate electrode, source/drain electrode, and encapsulation for sensor applications. We present the first demonstration of transparent, flexible all-organic sensor based on multifunctional organic FETs with organic semiconductor channel, gate dielectric, and electrodes having a capability of sensing infrared (IR) radiation and mechanical strain. The key component of our device design is to integrate the poly(vinylidene fluoride-triflouroethylene) (P(VDF-TrFE) co-polymer directly into transparent and flexible OFETs as a multi-functional dielectric layer, which has both piezoelectric and pyroelectric properties. The P(VDF-TrFE) co-polumer gate dielectric has a high sensitivity to the wavelength regime over 800 nm. In particular, wavelength variations of P(VDF-TrFE) molecules coincide with wavelength range of IR radiation from human body (7000 nm ~14000 nm) so that the devices are highly sensitive with IR radiation of human body. Devices were examined by measuring IR light response at different powers. After that, we continued to measure IR response under various bending radius. AC (alternating current) gate biasing method was used to separate the response of direct pyroelectric gate dielectric and other electrical parameters such as mobility, capacitance, and contact resistance. Experiment results demonstrate that the tf-OTFT with high sensitivity to IR radiation can be applied for IR sensors.

• 한국지하수토양환경학회지:지하수토양환경
• /
• 제15권6호
• /
• pp.29-36
• /
• 2010

Several mines including Namil, Solim and Jungbong which are located in the Gyeonggi and Kangwon province have been abandoned and closed since 1980 due to "The promotion policy of mining industry". An enormous amount of mining wastes was disposed without proper treatment, which caused soil pollution in tailing dam and ore-dressing plant areas. However, any quantitative assessment was not performed about soil and water pollution by transporting mining wastes such as acid mine drainage, mine tailing, and rocky waste. In this research, heavy metals in mining wastes were analyzed according to leaching method which used 0.1 N HCl and total solution method which used Aqua-regia to recognize the ecological effect of distance from hot spot. We sampled tailings, rocky wastes and soils around the abandoned mine. Chemical and physical parameters such as pH, electrical conductivity (EC), total organic carbon (TOC), soil texture and heavy metal concentration were analyzed. The range of soil's pH is between 4.3 and 6.4 in the tailing dam and oredressing plant area due to mining activity. Total concentrations of As, Cu, and Pb in soil near ore dressing plant area are 250.9, 249.3 and 117.2 mg/kg respectively, which are higher than any other ones near tailing dam area. Arsenic concentration in tailing dams is 31.0 mg/kg, which is also considered as heavily polluted condition comparing with the remediation required level(RRL) in "Soil environment conservation Act".

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
• /
• pp.382-382
• /
• 2012

CIGS thin films have received great attention as a promising material for solar cells due to their high absorption coefficient, appropriate bandgap, long-term stability, and low cost production. CIGS thin films are deposited by various methods such as co-evaporation, sputtering, spray pyrolysis and electro-deposition. The deposition technique is one of the most important processes in preparing CIGS thin film solar cells. Among these methods, co-evaporation is one of the best technique for obtaining high quality and stoichiometric CIGS films. However, co-evaporation method is known to be unsuitable for commercialization. The sputtering is known to be very effective and feasible process for mass production. In this study, CIGS thin films have prepared by rf magnetron sputtering using a $Cu(In_{1-x}Ga_x)Se_2$ single quaternary target without post deposition selenization. This process has been examined by the effects of deposition parameters on the structural and compositional properties of the films. In addition, we will explore the influences of substrate temperature and additional annealing treatment after deposition on the characteristics of CIGS thin films. The thickness of CIGS films will be measured by Tencor-P1 profiler. The crystalline properties and surface morphology of the films will be analyzed using X-ray diffraction and scanning electron microscopy, respectively. The optical properties of the films will be determined by UV-Visible spectroscopy. Electrical properties of the films will be measured using van der Pauw geometry and Hall effect measurement at room temperature using indium ohmic contacts.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
• /
• pp.371-372
• /
• 2012

We have studied lead-based gapless semiconductors, $PbPdO_2$, which is very sensitive to external parameters such as temperature, pressure, electric field, etc[1]. We have fabricated pure $PbPdO_2$, Co- and Mn-doped $PbPdO_2$ thin films using the pulsed laser deposition. Because of the volatile element of Pb, it is very difficult to grow the films. Note that in case of $MgB_2$, Mg is also volatile element. So in order to enhance the quality of $MgB_2$, some experiments are carried out in annealing with Mg-rich atmosphere [2]. This annealing process with volatile element plays an important role in making smooth surface. Thus, we applied such process to our studies of $PbPdO_2$ thin films. As a result, we found the optimal condition of ex-situ annealing temperature ${\sim}650^{\circ}C$ and time ~12 hrs. The ex-situ annealing brought the extreme change of surface morphology of thin films. After ex-situ annealing with PbO-rich atmosphere, the grain size of thin film was almost 100 times enlarged for all the thin films and also the PbO impurity phase was smeared out. And from X-ray diffraction measurements, we determined highly crystallized phases after annealing. So, we measured electrical and magnetic properties. Because of reduced grain boundary, the resistivity of ex-situ annealed samples changed smaller than no ex-situ sample. And the carrier densities of thin films were decreased with ex-situ annealing time. In this case, oxygen vacancies were removed by ex-situ annealing. Furthermore, we will discuss the transport and magnetic properties in pure $PbPdO_2$, Co- and Mn-doped $PbPdO_2$ thin films in detail.

• Journal of Animal Science and Technology
• /
• 제48권2호
• /
• pp.315-324
• /
• 2006

This research was conducted to clarify the characteristics of electrochemical decolorization of effluent discharged from a biological animal wastewater treatment process and to finally establish parameters or mode for optimum operation of electrolysis system. Average color unit of wastewater was about 1,200 and DSA(Dimensionally Stable Anode) was used as electrode. Experiments were performed with two different operation conditions or modes, fixed voltage-free current(Run A) and free voltage-fixed current(Run B). Color removal rate was proportional to the electrode area and electrical conductivity, and an equation subject to them at a condition of fixed voltage was derived as follows; Ct=C0ekt, k=[{0.0121×ａ(dm2)× c(mS/cm)}+0.0288], [where, C0: initial color, Ct: color unit after treatment for t, k: reaction coefficient, t: time(min.), ａ: electrode area, c: conductivity]. From the study on the effects of current density on color removal, it was revealed that the removal efficiency of color was function of the current density, showing direct proportion. However, when considered energy consumption rate, maintenance of low current density was an economical way. Based on the obtained results, it was concluded that supplementation of electrolyte is not necessary for the removal of color from the effluent of secondary treatment process and operation with the mode of free voltage-fixed current, rather than operation with fixed voltage-free current mode, would be an efficient way to increase the removal performance and capacity per consumed energy.

• 센서학회지
• /
• 제5권1호
• /
• pp.63-70
• /
• 1996

RTCVD (rapid thermal chemical vapor deposition) 법을 이용하여 급준한 불순물 농도분포를 갖는 서브마이크론 두께의 실리콘 에피막을 성장하였다. 실리콘 에피막 성장은 $SiH_{2}Cl_{2}\;/\;H_{2}$ 혼합가스를 사용하고, $H_{2}$ probating 공정을 포함하는 여러 가지 공정변수들을 변화하면서 성장계면에서의 불순물 농도 분포의 계면특성 및 성장율, 결정성등을 평가하였다. 실리콘 에피막의 결정성은 $900^{\circ}C$ 에서 $H_{2}$ prebaking 공정 후 동일한 온도에서 성장한 경우에 전위등의 결함이 보이지 않았으며, $SiH_{2}Cl_{2}$ 원료가스의 부피비에 따라 실리콘 에피막의 성장율을 선택함으로서 에피막 두께를 서브마이크론 까지 조절할 수 있었다. 실리콘에피막의 불순물 농도분포는 성장 계면에서 약 $200{\AA}/decade$ 로 급격하게 조절될 수 있음을 SIMS 법에 의한 분석으로 확인하였다.