• 제목/요약/키워드: direct heating method

검색결과 109건 처리시간 0.049초

직접 가열 방식을 이용한 반도체 제조용 히팅 장치 (A Heating Apparatus for Semiconductor Manufacturing using Direct Heating Method)

  • 정순원;구경완
    • 전기학회논문지P
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    • 제57권4호
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    • pp.408-411
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    • 2008
  • As to this research is new structure of the semiconductor substrate heating apparatus. The fast thermoresponsive according to the direct heating structure of the heating plate layer adhering closely to the floor side of a substrate and the fast heat loss minimization can be accomplished. Moreover, the contact area of the sheath heater, which is the heating plate layer built-in heating apparatus, is increased, so that it has more heating valid area. For this, it adheres closely to the substrate, in which the photosensitive film is coated and the heating plate layer, adhering closely to the floor side of a substrate the mica layer which adheres closely to the floor side of the upper heating plate layer in order to minimize an insulation and heat loss, and the lower part of the mica layer and it is comprised of the floor plate layer. The heating plate layer forms the continued groove portion over the floor side whole. The sheath heater for heating a substrate is inserted with the groove portion and the heating plate layer is comprised. It is confirmed that by using the new substrate heating structure, the temperature change of the heating plate against the time is observed. Then, there is the electric power saving effect of about 40% in comparison with the existing method.

YSZ/Ni-Cr 저항 발열 복합용사피막의 특성 (Characteristics of plasma sprayed composite YSZ/Ni-Cr resistant heating coatings)

  • 김병수;박경채;김태형;양병모
    • 대한용접접합학회:학술대회논문집
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    • 대한용접접합학회 2003년도 춘계학술발표대회 개요집
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    • pp.111-113
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    • 2003
  • The existing heating unit is indirect-heating method that make use or the nichrome wire or halogen lamp. The indirect-heating method has the demerits of long warming time, high power consumption and many organization parts. In this study, the heating unit of direct-heating method manufactured as being the thermal spray coating of conductive heating material on the surface of heating unit in order to improve the demerits of indirect-heating method. And YSZ added Ni-20Cr that had moderate electrical resistivity was chosen of the conductive heating material.

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마이크로 와이어의 직선화 처리에 관한 연구 (Straightening Process of Micro Wires)

  • 김웅겸;홍남표;김병희;김헌영
    • 대한기계학회논문집A
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    • 제30권9호
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    • pp.1148-1153
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    • 2006
  • This paper deals with the effect of the direct heating method(DHM) for straightening the micro wire. Straightened micro wires have been widely used in the fields of the medicine and the semi-conductor. We have developed a micro wire straightening system by using the direct wire heating method. To controling the tension of the micro wire during the heating and straightening process, a precision tension sensor was set up. In order to avoid the surface oxidation during the heating process, the argon inert gas was supplied to the vicinity of the wire. And, this paper shows the correlation between the tension and the current when arson gas supplied to the tungsten wire. Through several experiments, the optimal tension and current were found. Also, higher straightness $({\approx}1{\mu}m/1000{\mu}m)$ and roundness$(<{\Phi}{\pm}2{\mu}m/100{\mu}m)$ founded when $500{\mu}600gf$ tension and 1.5 ampere.

물 직접접촉식 공기조화장치의 성능해석 (Performance Analysis of Water Direct Contact Air Conditioning System)

  • 유성연;권화길;송준;김광영;박준택
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2001년도 춘계학술대회논문집D
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    • pp.158-163
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    • 2001
  • Performance of the water direct contact air conditioning system, in which heat and mass are transferred directly between air and water droplet, is simulated by semi-empirical method. This system improves transport efficiency compared to conventional indirect contact system and cooling, heating, dehumidification and humidification are attained with one unit. In this study, temperature and flowrate for air and water are measured in the various cooling and heating conditions, and correlations for $h_{c}A/c_{pm}$ are derived from these data. Cooling and heating characteristics of the water direct contact air conditioning system are investigated using correlations.

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$TiB_2$ SHS 및 직접 접촉가열에 의한 동시 가압법 : 온도분포 모델링 및 공급에너지와 치밀화 관계 (Simultaneous Consolidation of Titanium Diboride with Self-Propagating High-Temperature Synthesis, Direct Contact-Heating, and Pressure: Modeling of Temperature Distribution and the Relationship between Applied Energy and Densification)

  • 정진근;조건;이형복
    • 한국세라믹학회지
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    • 제32권7호
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    • pp.817-824
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    • 1995
  • TiB2 was simultaneously synthesized and densified with concurrent self-propagating high-temperature synthesis and direct contact-heating by electrcial power input and pressure. Density of TiB2 synthesized by self-propagating high-temperature synthesis and consolidated simultaneously by direct contact-heating and pressure was maximum 80% of the theoretical density (4.52g/㎤). Temperature profile was analyzed by solving heat balance equation with numerical method (FTCS method). The temperature of the sample was sufficiently raised to that temperature sufficient to be densified. It was ascertained that the density of the SHS synthesized TiB2 is exponentially proportinal to the input thermal energy per mass.

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물-공기 직접접촉식 공기조화장치의 성능해석 (Performance Analysis of Water/Air Direct Contact Air Conditioning System)

  • 유성연;권화길;김광영
    • 설비공학논문집
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    • 제16권2호
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    • pp.175-183
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    • 2004
  • Performance of the water/air direct contact air conditioning system, in which heat and mass are directly transferred between air and water droplet, is simulated using semi-empirical method. Direct contact system improves transport efficiency compared to conventional indirect contact system. In this study, correlations for h$_{c}$A / c$_{pm}$ which represent the capacity of direct contact system are derived as a function of air and water flowrate from the experimental data. Cooling and heating performance of the water/air direct contact air conditioning system are evaluated using these correlations.ons.

지하공기-물 직접접촉식 열교환기를 구비한 히트펌프의 성능 (Performance of Underground Air-to-Water Heat Pump with Direct Contact Heat Exchanger)

  • 김영화;강연구;성문석;유영선;김종구;장재경
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2010년도 춘계학술대회 초록집
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    • pp.172.1-172.1
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    • 2010
  • In Jeju, underground air is used for heating greenhouse and fertilizing natural $CO_2$ gas by suppling directly into greenhouse. But greenhouse heating method by direct supply of underground air has several problems as like low temperature below $20^{\circ}C$ or high relative humidity over 90%. The underground air is inadequate in heating of crops such as mangos, oranges with the growing temperature over $20^{\circ}C$. Also if the relative humidity of greenhouse is kept with over 90%, diseases can strike almost of the crops. And also the ventilation loss becomes larger because the air pressure of inside greenhouse by direct supply of underground air is higher. In this study the heat pump system using underground air as heat source was developed and heating performance of the system was analyzed. Heating COP of the system was 2.5~5.0 and rejecting heat into greenhouse and extracting heat from underground air in this heat pump system were 46.5~31.4 kW, 34.9~20.9 kW respectively.

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극세선의 직선화 처리에 관한 연구 (Straightening of the micro wires)

  • 김웅겸;김병희;김헌영;김남수;신흥규;홍남표
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2004년도 추계학술대회논문집
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    • pp.83-88
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    • 2004
  • Micro wires manufactured by the straightening progress are widely used in bio-medical and semi-conductor fields. In this study, we have developed a novel straightener which uses the direct heating method for straightening. In order to avoid the surface oxidization, during the heating process, we supplied the inert gas(Ar) and examined the effect of the gas flow rate. The effect of the tension and the current applied to the tungsten micro wires were thoroughly studied. From various experiments, it was found that when the tension is $500{\sim}600gf$ and the current is about 1.5A, we obtained higher straightness(${\approx}1{\mu}m/1000{\mu}m$) and roundness ($<{\pm}2{\mu}m/100{\mu}m$).

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Equivalent Point Method의 일반적 이용을 위한 연구 (Study on the Generalization of the Equivalent Point Method for Thermal Evaluation)

  • 임종환
    • 한국식품과학회지
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    • 제22권5호
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    • pp.575-581
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    • 1990
  • 일정한 열처리 공정에 대해 Equivalent point가 존재함을 이상적인 두가지의 직접가열곡선 즉, $120^{\circ}C$에서 10분간 $135^{\circ}C$에서 10초간의 등온가열 곡선을 이용하여 예시하였다. 이러한 조건하에서 Arrhe nius model을 적용한 경우 임의의 Ea-값을 사용하여 G-값을 결정하고 Bigelow model을 적용한 경우, 임의의 z-값을 사용하여 F-값을 결정하였다. 이들 값을 사용하여 Equivalent time과 Equivalent Temperature를 두가지 방법 즉, 직교좌표법과 회기분석법에 의해 결정하였다. 이들 두 방법에 의해 결정된 Equivalent Point는 서로 일치하였으며 각각의 값은 초기에 가정했던 직접가열곡선의 가열시간 및 온도와 일치하였다.

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FRACTIONAL ORDER THERMOELASTIC PROBLEM FOR FINITE PIEZOELECTRIC ROD SUBJECTED TO DIFFERENT TYPES OF THERMAL LOADING - DIRECT APPROACH

  • GAIKWAD, KISHOR R.;BHANDWALKAR, VIDHYA G.
    • Journal of the Korean Society for Industrial and Applied Mathematics
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    • 제25권3호
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    • pp.117-131
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    • 2021
  • The problem of generalized thermoelasticity of two-temperature for finite piezoelectric rod will be modified by applying three different types of heating applications namely, thermal shock, ramp-type heating and harmonically vary heating. The solutions will be derived with direct approach by the application of Laplace transform and the Caputo-Fabrizio fractional order derivative. The inverse Laplace transforms are numerically evaluated with the help of a method formulated on Fourier series expansion. The results obtained for the conductive temperature, the dynamical temperature, the displacement, the stress and the strain distributions have represented graphically using MATLAB.