• Title/Summary/Keyword: direct heating

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A heating apparatus for semiconductor manufacturing using direct heating method (직접가열방식을 이용한 반도체 제조용 히팅장치)

  • Jung, Soon-Won;Kwon, Oh-Joen;Koo, Kyung-Wan
    • Proceedings of the KIEE Conference
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    • 2008.07a
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    • pp.2218-2219
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    • 2008
  • 본 연구는 반도체 기판 히팅 장치의 새로운 구조에 관한 것으로 기판의 바닥면에 밀착된 가열 플레이트층의 직접가열 구조에 따른 빠른 열 응답성 및 열손실 최소화를 이룰 수 있다. 또한 가열 플레이트층에 내장된 히팅 수단인 시즈히터의 접촉면적을 늘려 가열 유효면적 증가와 같은 효과를 갖는다. 이를 위해 감광막이 코팅된 기판과, 상기 기판의 바닥면에 밀착되는 가열 플레이트층, 절연 및 열손실을 최소화하기 위해 상기 가열 플레이트층의 바닥면에 밀착되는 운모층, 상기 운모층의 하부에 밀착되어 바닥 플레이트층으로 이루어지되, 상기 가열 플레이트 층은 바닥면 전체에 걸쳐 연속되는 홈부를 형성하고, 상기 홈부로는 기판을 가열하기 위한 시즈히터가 삽입되어 구성된다. 새로운 기판 히팅 구조를 사용하여 시간 경과에 따른 가열 플레이트의 온도 변화를 확인 한 결과, 간접가열방식인 기존 방식에 비해 약 40 %의 전력 절감효과가 있는 것으로 확인 되었다.

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Thermal Nitridation of Si by RF Induction Heating (고주파 유도 가열에 의한 Si의 열적질화)

  • 이용현;왕진석
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.27 no.9
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    • pp.1386-1392
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    • 1990
  • Characteristics of the direct thermal nitrided films by RF induction heating has been studied. The nitrided films on Si were prepared at 1000-1200\ulcorner in ammonia gas ambient. The nitrided films were analyzed by ellipsometry an Auger electron spectroscopy. I-V and C-V characteristics of MIS capacitors fabricated using nitrided film were investicated. The nitrided films were grown up mostly within initial thirty minutes and no significant growth was observed thereafter. Etch rates of films were about 1\ulcornermin in diluted HF (HF:H2O= 1:50). The nitrided films were resistant to dry and wet oxidations at temperatures below 1000\ulcorner and 900\ulcorner, respectively.

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A Study on the Cooling Load Generation for Efficient Energy Management (냉방부하 수요 창출을 통한 효율적 에너지 관리방안 연구)

  • Woo, Nam-Sub;Kim, Yong-Ki;Lee, Tae-Won
    • Proceedings of the SAREK Conference
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    • 2008.06a
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    • pp.1007-1012
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    • 2008
  • Demand for the highly efficient and high performance urban energy supply system having been continuously increased according to the rise of quality of life and continuously increased energy cost all over the world. The district heating and cooling system is very effective way for energy saving, cost reduction, and demand side management of energy. There are several district cooling supply technologies such as chilled water direct transportation, installation of absorption type chiller in the user side, and desiccant cooling. This study investigates the advantage and technical problems of each district cooling technology. Also, it is necessary political and financial support system for the extension of district cooling system.

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A Study on the Thermal Pump of the Hot Water Boiler (온수 보일러용 열구동 펌프에 관한 연구)

  • Yeom, Han-Gil;Kim, Uk-Joong;Kim, Chang-Ju
    • 연구논문집
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    • s.30
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    • pp.15-23
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    • 2000
  • In this study, develop the thermal pump using water evaporation and condensation. Vapor from heating room moves up to pumping room and press the water of pumping room. Consequently water is pumped out to water tank. Then hot vapor direct contact with cold water in condensing room after pumping process. At this time, pressure of condensing room is down to-5kPa and suck in water of tank. This pump executes self ping and good durability because of no mechanical moving parts. Thermal pump is pumped cyclic so that, this pump is not used single. Therefore thermal pump of hot water boiler used to multi-stage for stable pumping rate. As the result of performance test, the developed thermal pump proves pumping action of water evaporation/condensation. And total volume flow rate is 500liter during one hour. If three thermal pump is installed parallel, this pump can use to the hot water boiler in the 300,000kcal/h class.

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A Novel Development of Distributed intelligent Control Module Based on the LonWorks Neuron Chip for Air handling Units in the Heating, Ventilating and Air Conditioning (Neuron Chip을 이용한 공기조화설비 제어모듈 개발)

  • 홍원표;김동화;김중곤
    • Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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    • 2003.11a
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    • pp.251-257
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    • 2003
  • In this paper, a new distributed intelligent control module based on LonWorks fieldbus for air handling unit(AHU) of heating, ventilating and air-conditioning(HVAC) is proposed to replace with a conventional direct digital control(DDC) with 32 bit microprocessor. The proposed control architecture has a excellent features such as highly compact and flexible function design, a low priced smart front-end and reliable performance with various functions. This also addresses issues in control network configuration, logical design of field devices by S/W tool, Internet networking and electronic element installation. Experimental results showing the system performance are also included in this paper.

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Multifunctional Transdermal Diffusion Test System (다기능 경피 확산 테스트 시스템 설계 및 제작)

  • Gao, Mengyan;Jin, Hu;Piao, Xiang Fan
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.19 no.10
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    • pp.8-15
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    • 2020
  • The diffusion cell method is the main technique employed for the in vitro diffusion test of transdermal drug delivery preparations. Most existing transdermal diffusion devices use a water bath heating structure and direct current motor magnetic stirrer. However, these devices are confronted with problems, such as large volume, incompatible vertical and horizontal diffusion cells, few diffusion cell sets, and poor reliability. To overcome these deficiencies, the system adopts a dry heating method and uses a rotating magnetic field generated by the electromagnetic stirrer to drive the magnetic stirrer. Accordingly, the resulting device is characterized by a simple structure and small volume, convenient operation, compatible vertical and horizontal diffusion cells, and numerous diffusion cell sets. The reliability and practicability of the system is verified by the in vitro percutaneous permeability test of the bisoprolol patch.

Design & Performance of the Solar Energy Research & Test Center (태양에너지 연구 시험센타 설계 및 효율에 관한 연구)

  • Auh, Paul Chung-Moo;Lee, Jong-Ho;Choi, Byung-Owan;Cho, Yil-Sik
    • Solar Energy
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    • v.2 no.2
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    • pp.29-36
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    • 1982
  • The Solar Energy R&D Department of KIER under the auspice of the Korean government is pushing hard on the development of the passive solar technology with high priority for the expeditious widespread use of solar energy in Korea, since the past few years of experiences told us that the active solar technology is not yet ready for massive commercialization in Korea. KIER has completed the construction of the Solar Energy Research & Test Center in Seoul, which houses the major facilities for its all solar test programs. The Center was designed as a passive solar building with great emphasis on the energy conserving ideas. The Center is not only the largest passive building in Korea, but also the exhibit center for the effective demonstration of the passive heating and cooling technology to the Korean public. The Center was designed to satisfy the requirements based on the technical and economical criteria set by the KIER. Careful considerations, therefore, were given in depth in the following areas to meet the requirements. 1) Passive Heating Concepts The Center employed the combination of direct and indirect gain system. The shape of the Center is Balcomb House style, and it included a large built-in sunspace in front. A partition, consists of transparent and translucent glazings, separates the sunspace and the living space. Since most activities in the Center occur during the day time, direct utilization of the solar energy by the living spaces was emphasized with the limited energy storage capacity. 2) Passive Cooling Concepts(for Summer) Natural ventilation concept was utilized throughout the building. In the direct gain portion of the system, the front glazing can be openable during the cooling season. Natural convection scheme was also applied to the front sunspace for the Summer cooling. Reflective surfaces and curtains were utilized wherever needed. 3) Auxiliary Heat ing and Cooling System As an auxiliary cooling system, mechanical means(forced convection system) were adopted. Therefore forced air heating system was also used to match the duct work requirements of the auxiliary cool ing system. 4) Effect ive Insulation & Others These included the double glazed windows, the double entry doors, the night glazing insulation, the front glazing-frame insulation as well as the building skin insulation. All locally available construction materials were used, and natural lightings were provided as much as possible. The expected annual energy savings (compared to the non-insulated conventional building)of the Center was estimated to be about 80%, which accounts for both the energy conservation and the solar energy source. The Center is being instumented for the actual performance tests. The experimental results of the simplified tests are discussed in this paper.

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Development of hybrid system with fuel cell and lithium secondary battery (연료전지와 리튬 이차전지의 하이브리드 시스템 개발)

  • Hwang, Sangmoon;Jung, Eunmi;Son, Dongun;Shim, Taehee;Song, Hayoung
    • 한국신재생에너지학회:학술대회논문집
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    • 2010.06a
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    • pp.143.2-143.2
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    • 2010
  • Therefore, with this development assignment we'd like to develop the hybrid system combining 800W DMFC (Direct Methanol Fuel Cell) and 1.6kW of Lithium secondary battery pack which can be applied to the most common small cart. a scooter, to secure the development capability of hundreds of Watts DMFC, the high-capacity Lithium secondary battery pack, the technology of BMS (Battery Management System) and the development technology of hybrid system. DMFC, in fact, has lower energy efficiency than PEMFC (Polymer Electrolyte Membrane Fuel Cell); however, it has several advantages in terms of fuel storage and use. It is pretty easy to be stored and used without any additional colling and heating devices because of its insensitive liquid methanol to temperature. In conclusion, DMFC system is the most suitable device for small mobile vehicles.

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Analysis of the thermal performances of air-earth direct heat exchanger (공기 지중간 직접열교환시스템의 열성능 해석)

  • Kim, W.K.;An, J.S.;Choi, Y.D.
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.9 no.2
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    • pp.112-121
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    • 1997
  • This study is focused on the development and selection of optimal cool tube system to maximize its thermal performance. Cool tube is devised to reduce the heating and cooling load of building by preheating or refreshing of intake air. Finite volume method was adopted to solve the conduction problem between the cool tube and earth. We examine the cool tube system for two operating periods, a short term(12 hours) and a long term(3 months). The results of short term operations reveal that condensation significantly influences and raises the exit air temperature. For long term operations, optimum conditions of cool tube system are obtained with variations of flow-rate, depth, length and diameter of cool tube.

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Oil Adsorption of Exfoliated Graphite Prepared by Direct Reaction between $SO_3$ Gas and Graphite

  • Lee, Beom-Jae;Kwon, Young-Bae
    • Carbon letters
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    • v.2 no.1
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    • pp.55-60
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    • 2001
  • Graphite intercalation compounds (GIC) were prepared by direct reaction of $SO_3$ gas with flake graphite. The intercalated $SO_3$ molecules were ejected by rapid heating to $950^{\circ}C$ under an oxidizing atmosphere for about 1 minute, resulting in surprisingly high expansion in the direction of c-axis. The characteristics of the micro-structure and pore size distribution were examined with a SEM and mercury intrusion porosimetry. The XRD analysis and spectroscopic analysis were used for the identification of the graphite and surface chemistry state. The pore size distribution of the exfoliated graphite (EG) was a range of $1{\sim}170{\mu}m$. The higher expanding temperature the higher expanded volume, so oil sorption capacities were 58.8 g of bunker-C oil and 34.7 g of diesel oil per 1 g of the the EG. The sorption equilibrium was achieved very rapidly within several minutes. As the treatment temperature increases, bulk density decreases.

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