• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1865-1868
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• 2003

This paper provides a new method for hybrid machining, particularly suited to micro fabrication applications such as micro point, micro line, micro structure, micro partition and so on. Developed micro fabrication process by electrical discharge machining (EDM) and electrical discharge deposition (EDD) with metal powder (Ti, Fe) has been studied to build TiC or FeC structure. Titanium powder or iron powder is supplied from working fluid (kerosene or de-ionized water with powder) and adheres on a workpiece by the heat and electric power caused by the electrical discharge. The use of a tool electrode is expected to keep powder concentration high in the gap between a workpiece and a tool electrode and to accrete powder material on the workpiece. The deposition is tried under various electrical conditions (workpiece. tool electrode, working fluid, discharge current, voltage and powder etc.). On the other hand. using electrical discharge machining (EDM) with the same tool electrode, it can be used as a removal process (cutting) by electro erosion at the same time. Therefore. this new method can do a hybrid machining to build up and down a structure with the workpiece.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.166.2-166.2
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• 2014

In this work, we demonstrated a facile and effective method for deposition of metal tetraphenylporphyrin (MTPP) thin film by a combined a thermal evaporation (TE) and atomic layer deposition (ALD). For the deposition of Zn-TPP thin film, Tetraphenylporphyrin (TPP) and diethyl zinc (DEZ) were used as organic and inorganic materials, respectively. Optimum conditions for the deposition of Zn-TPP thin film were established systematically: (1) the exposure time of DEZ as inorganic precursor and (2) the substrate temperature were adjusted, respectively. As a result, we verified that the surface reaction between organic semiconductor (TPP) and metal atom (Zn) was ALD process. In addition, we calculated activation energy by using Arrhenius equation for the substrate temperature versus area change rate of pyrrolic nitrogen. The surface and interface reactions between TPP with Zn were investigated by X-ray photoelectron spectroscopy, Raman spectroscopy, UV-vis spectroscopy, and scanning electron microscopy. These results show a facile and well-controllable fabrication technique for the metal-organic thin film for future electronic applications.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.478.2-478.2
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• 2014

Atomic layer deposition (ALD) provides self-limiting processes based on chemisorption-based reactions. Such unique features allow for superior step coverage, atomic-scale control in thickness, and surface-dependent reaction controls. Furthermore, the surface-limited deposition enables the artificial deposition of oxide and/or metallic materials onto the porous systems as long as the supply is guaranteed in terms of time in providing reactant species and removing the byproducts and redundant reactants. The unique feature of atomic layer deposition is applied to solid oxide fuel cells whose incorporates two porous cathode and anode compartments in addition to the ionic electrolyte. Specific materials are deposited to the surface sites of porous electrodes, with the aim to controlling the triple phase boundaries crucial for the optimized SOFC performances. The effect of ALD on the SOFC performance is characterized using current-voltage characteristics in addition to frequency-dependent impedance spectroscopy. The pros and cons of ALD-controlled SOFCs are discussed toward high-performance SOFC systems.

• Korean Journal of Materials Research
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• v.23 no.12
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• pp.702-707
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• 2013

High-quality ${\beta}$-silicon carbide (SiC) coatings are expected to prevent the oxidation degradation of carbon fibers in carbon fiber/silicon carbide (C/SiC) composites at high temperature. Uniform and dense ${\beta}$-SiC coatings were deposited on carbon fibers by low-pressure chemical vapor deposition (LP-CVD) using silane ($SiH_4$) and acetylene ($C_2H_2$) as source gases which were carried by hydrogen gas. SiC coating layers with nanometer scale microstructures were obtained by optimization of the processing parameters considering deposition mechanisms. The thickness and morphology of ${\beta}$-SiC coatings can be controlled by adjustment of the amount of source gas flow, the mean velocity of the gas flow, and deposition time. XRD and FE-SEM analyses showed that dense and crack-free ${\beta}$-SiC coating layers are crystallized in ${\beta}$-SiC structure with a thickness of around 2 micrometers depending on the processing parameters. The fine and dense microstructures with micrometer level thickness of the SiC coating layers are anticipated to effectively protect carbon fibers against the oxidation at high-temperatures.

• Carbon letters
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• v.10 no.3
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• pp.213-216
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• 2009

The electrochemical deposition of Pt nanoparticles on carbon nanotubes (CNTs) supports and their catalytic activities for methanol electro-oxidation were investigated. Pt catalysts of 4~12 nm average crystalline size were grown on supports by potential cycling methods. Electro-plating of 12 min time by potential cycling method was sufficient to obtain small crystalline size 4.5 nm particles, showing a good electrochemical activity. The catalysts' loading contents were enhanced by increasing the deposition time. The crystalline sizes and morphology of the Pt/support catalysts were evaluated using X-ray Diffraction (XRD) and Transmission Electron Microscopy (TEM). The electrochemical behaviors of the Pt/support catalysts were investigated according to their characteristic current-potential curves in a methanol solution. In the result, the electrochemical activity increased with increased plating time, reaching the maximum at 12 min, and then decreased. The enhanced electroactivity for catalysts was correlated to the crystalline size and dispersion state of the catalysts.

• Journal of the Korean Ceramic Society
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• v.53 no.2
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• pp.167-170
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• 2016

Various piezoelectric nanostructures have been extensively studied for competitive energy harvesting applications. Here, GaN nanowires grown by a nonconventional magnetic field-assisted chemical vapor deposition process were investigated to characterize the piezoelectric energy harvesting characteristics. As a controlling parameter, only the growth time was changed from 15 min to 90 min to obtain different crystallinity and morphology of the nanowires. Energy harvesting characteristics were found to depend largely on the growth time. A longer growth time tended to lead to an increased output current, which is reasonable when considering the enhanced charge potentials and crystallinity. A maximum output current of ~14.1 nA was obtained for the 90 min-processed nanowires.

• Proceedings of the KIEE Conference
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• 2006.04a
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• pp.102-104
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• 2006

Auto-Correlated time series (ATS) model was constructed by using the backpropagation neural network. The performance of ATS model was evaluated with sensor information collected from a large volume, industrial plasma-enhanced chemical vapor deposition system. A total of 18 sensor information were collected. The effect of inclusion of past and future information were examined. For all but three sensor information with a large data variance demonstrated a prediction error less than 4%. By integrating ATS model into equipment software, process quality can be more stringently monitored while improving device throughput.

• Transactions on Electrical and Electronic Materials
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• v.16 no.4
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• pp.198-200
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• 2015

The microwave plasma enhanced chemical vapor deposition (PECVD) system was used to grow a carbon nanowall (CNW) on a silicon (Si) substrate with hydrogen (H₂) and methane (CH₄) gases. To find the growth mechanism of CNW, we increased the growth time of CNW from 5 to 30 min. The vertical and surficial conditions of the grown CNWs according to growth time were characterized by field emission scanning electron microscopy (FE-SEM). Energy dispersive spectroscopy (EDS) measurements showed that the CNWs consisted solely of carbon.

• Journal of the Korean institute of surface engineering
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• v.33 no.4
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• pp.266-272
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• 2000

Sputtered $MoS_2$ thin films provide lubrication and wear improvements for vacuum and space applications. In this study, deposition of $MoS_2$ thin films by R.F. magnetron sputtering was studied with regard to the micro-structural change of $MoS_2$ film and mechanical properties. The coating parameters such as the working pressure, the RF power, the substrate temperature, the etching time were varied to determine how these parameters affected the film morphology and mechanical properties of deposited films. The best wear properties and critical load were observed with the film deposited at $70^{\circ}C$, 1.0$\times$$10^{ -3}$ Torr, 170W and 1 hour deposition time. The critical load increased with the increase of sputter etching time.

• Membrane Journal
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• v.18 no.3
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• pp.198-205
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• 2008

A novel technology for homogeneous deposition of zeolite particles on a porous support was developed so that those particles played a seeding role for the growth of zeolite crystals. After the particles were dispersed in water, the aqueous solution was 134 through the bore of a porous tubular support. By keeping the other side of the support in a vacuum, the aqueous solution passed through the pores of the support, leading the particles to be homogeneously deposited on the support. The amount of the deposited particles was investigated by changing the following operating parameters: a particle concentration in the solution, a time for deposition, and the feeding rate of the solution. The amount of the deposited particles increased from 0.0019 g to 0.0208 g as the concentration of the particles was changed from 0.01 wt% to 0.3 wt%, while the feeding rate and the deposition time were kept to 100 mL/min and 4 min, respectively. As the deposition time was varied from 1 min to 4 min, the deposition amount increased from 0.0004g to 0.0019g at the typical condition of the rest parameters. Also, it was observed that the deposited weight increased from 0.0029 g to 0.01 g as the feeding rate increased from 100 mL/min to 300 mL/min. However, the total permeance of water and ethanol decreased through the zeolite membrane as the deposited weight increased.