[KSCI] Korea Science Citation Index Service

http://dx.doi.org/10.4313/TEEM.2015.16.4.198

Synthesis of Carbon Nanowalls by Microwave PECVD for Battery Electrode

Kim, Sung Yun (Department of Electrical Engineering, Hanbat National University)
Shin, Seung Kwon (Metropolitan Transportation Research Center Korea, Railroad Research Institute)
Kim, Hyungchul (Metropolitan Transportation Research Center Korea, Railroad Research Institute)
Jung, Yeun-Ho (School of Information and Communication Engineering, Hanbat National University)
Kang, Hyunil (School of Information and Communication Engineering, Hanbat National University)
Choi, Won Seok (School of Information and Communication Engineering, Hanbat National University)
Kweon, Gi Back (Department of Electric Automation, Daeduk University)

Publication Information

Transactions on Electrical and Electronic Materials / v.16, no.4, 2015 , pp. 198-200 More about this Journal

Abstract

The microwave plasma enhanced chemical vapor deposition (PECVD) system was used to grow a carbon nanowall (CNW) on a silicon (Si) substrate with hydrogen (H₂) and methane (CH₄) gases. To find the growth mechanism of CNW, we increased the growth time of CNW from 5 to 30 min. The vertical and surficial conditions of the grown CNWs according to growth time were characterized by field emission scanning electron microscopy (FE-SEM). Energy dispersive spectroscopy (EDS) measurements showed that the CNWs consisted solely of carbon.

Keywords

Carbon based nanomaterial; Carbon nanowall; Microwave plasma enhanced vapor deposition; Carbon electrode; Growth time;

Citations & Related Records

Reference

1	D. Yoon, H. Moon, H. Cheong, J. Choi, J. Choi, and B. Park, J. Korean Phys. Soc., 55, 1299 (2009). [DOI: http://dx.doi.org/10.3938/jkps.55.1299] DOI
2	Z. Hu, K. Park, and K. Yi, J. Korean Phys. Soc., 54, 921 (2009). [DOI: http://dx.doi.org/10.3938/jkps.54.586] DOI
3	H. W. Kroto, J. R. Heath, S. C. O’Brien, R. F. Curl, and R. E. Smalley, Nature, 318, 14 (1985). [DOI: http://dx.doi.org/10.1038/318162a0] DOI
4	S. Iijima, Nature, 354, 56 (1991). http://dx.doi.org/10.1038/354056a0] DOI
5	K. S. Novoselov, A. K. Geim, S. V. Morozov, D. Jiang, Y. Zhang, S. V. Dubonos, I. V. Grigorieva, and A. A. Firsov, Science, 306, 666 (2004). [DOI: http://dx.doi.org/10.1126/science.1102896] DOI
6	S. Stankovich, D. A. Dikin, G.H.B. Dommett, K. M. Kohlhaas, E. J. Zimney, E. A. Stach, R. D. Piner, S. T. Nguyen, and R. S. Ruoff, Nature, 286, 282 (2006). [DOI: http://dx.doi.org/10.1038/nature04969] DOI
7	M. Hiramatsu and M. Hori, Carbon Nanowalls (Springer, New York, 2010). [DOI: http://dx.doi.org/10.1007/978-3-211-99718-5] DOI