• Journal of the Korean Institute of Telematics and Electronics
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• v.27 no.7
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• pp.1049-1058
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• 1990

Mathematical modeling equations of a parallel plate type reactor were obtained in the PECVD process in preparing hydrogenated amorphous silicon. Velocity profiles, temperature profiles and concentration profiles in the reactor were calculated from the model. The theoretical approach was attempted to obtain the deposition rate and film uniformity at different operating conditions by calculating RF discharge parameters and establishing the reaction mechanisms of a-Si:H thin film. The modelling equations are solved by a finite difference method with control volume balance. The mean electrom energy in discharge was applied to model simulation parameter. The magnitudes of the predicted deposition rate are in good aggrement with those of experiment. The results of computer simulation shows that uniform deposition profiles can.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.22 no.1
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• pp.61-69
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• 1998

Vapor Axial Deposition (VAD), one of optical fiber preform fabrication processes, is performed by deposition of submicron-size silica particles that are synthesized by combustion of raw chemical materials. In this study, flow field is assumed to be a forced uniform flow perpendicularly impinging on a rotating disk. Similarity solutions obtained in our previous study are utilized to solve the particle transport equation. The particles are approximated to be in a polydisperse state that satisfies a lognormal size distribution. A moment model is used in order to predict distributions of particle number density and size simultaneously. Deposition of the particles on the disk is examined considering convection, Brownian diffusion, thermophoresis, and coagulation with variations of the forced flow velocity and the disk rotating velocity. The deposition rate and the efficiency directly increase as the flow velocity increases, resulting from that the increase of the forced flow velocity causes thinner thermal and diffusion boundary layer thicknesses and thus causes the increase of thermophoretic drift and Brownian diffusion of the particles toward the disk. However, the increase of the disk rotating speed does not result in the direct increase of the deposition rate and the deposition efficiency. Slower flow velocity causes extension of the time scale for coagulation and thus yields larger mean particle size and its geometric standard deviation at the deposition surface. In the case of coagulation starting farther from the deposition surface, coagulation effects increases, resulting in the increase of the particle size and the decrease of the deposition rate at the surface.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.7 no.3
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• pp.521-527
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• 1995

The average particle deposition velocity toward a vertical wafer surface in a vertical airflow chamber was measured by a wafer surface scanner(PMS Model SAS-3600). Polystyrene latex(PSL) spheres with diameters between 0.3 and $0.8{\mu}m$ were used. To examine the effect of the airflow velocity on the deposition velocity, experiments were conducted for three vertical airflow velocities ; 20, 30, 50cm/s. Experimental data of particle deposition velocity were compared with those given by prediction model suggested by Liu and Ahn(1987).

• Journal of Mechanical Science and Technology
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• v.20 no.10
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• pp.1646-1652
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• 2006

A model of mechanical behavior of microcantilever due to intrinsic strain during deposition of MEMS structures is derived. A linear ordinary differential equation is derived for the beam deflection as a function of the thickness of the deposited layer. Closed-form solutions are not possible, but numerical solutions are plotted for various dimensionless ratios of the beam stiffness, the intrinsic strain, and the elastic moduli of the substrate and deposited layer. This model predicts the deflection of the cantilever as a function of the deposited layer thickness and the residual stress distribution during deposition. The usefulness of these equations is that they are indicative of the real time behavior of the structures, i.e. it predicts the deflection of the beam continuously during deposition process.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.667-670
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• 2002

Uniform metal-droplet deposition using laser is analyzed. Using the variation principle and modeling the semi-solid phase as a non-Netwonian slurry, this model can greatly save the computational expenses that conventional numerical procedures have suffered from. The simulation results revealed that the developed model could reasonably describe the collision behavior of molten metal with solid surface. Simulations were made with variation of the falling distance and time.

• Journal of Korea Water Resources Association
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• v.40 no.5
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• pp.409-418
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• 2007

Combined sewer solid deposition during dry weather periods and their resuspension during wet weather periods has long been recognized as a major contributor to the first-flush phenomenon. Also, these deposition of sewer solids results in a loss of flow capacity that may restrict flow and cause a local flooding at urban area. In order to solve these problems, measurement of solid deposition for a given sewer system for extended period is needed but this task is very difficult and extremely expensive. This paper presents the development and applicability of estimation equations for solid deposition in sewer systems based on the solid deposition estimated using MOUSE model. As results, the comparison between estimated and measured solid deposition is difficult due to the absent of measured data, but the estimated values using developed equations show applicability compared with the results of MOUSE model and the estimation equations developed by the EPA.

• Journal of Korea Water Resources Association
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• v.41 no.9
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• pp.885-894
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• 2008

The deposition of solids in combined sewer systems results in a loss of flow capacity that may restrict flow and cause a local flooding and enhanced solids deposition. In order to solve these problems and proper pipe management, estimations of solid loads on land surface in a drainage basin and solid deposition in sewer system due to rainfall are needed but these tasks are very difficult and very expensive. In this study, procedures for estimating solid loads on surface in a drainage basin were applied and analyzed in Gunja drainage basin in Korea. Also, this paper presents the development and application of estimation equation for solid deposition in sewer system due to rainfall based on the solid deposition estimated using MOUSE model. As results, the comparison between estimated and measured solid deposition is difficult due to the absent of measured data, but the estimated values using developed equations show applicability compared with the results of MOUSE model and the application of the other basin. The developed estimation equations can be used usefully for the management of combined sewer system.

• Journal of Korean Society for Atmospheric Environment
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• v.19 no.5
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• pp.551-560
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• 2003

Particle deposition in human lungs was investigated theoretically by using asymmetric five-lobe lung model. The volumes of each of the five lobes were different, thereby forming an asymmetric lung structure. The tidal volume and flow rate of each lobe were scaled according to lobar volume. The total and regional deposition with various breathing patterns were calculated by means of tracking volume segments and accounting for particle loss during inhalation and exhalation. The deposition fractions were obtained for each airway generation and lung lobe, and dominant deposition mechanisms were investigated for different size particles. Results show that the tidal volume and flow rate have a characteristic influence on particle deposition. The total deposition fraction increases with an increase in tidal volume for all particle sizes. However, flow rate has dichotomous effects: a higher flow rate results in a sharp increase in deposition for large size particles, but decreases deposition for small size particles. Deposition distribution within the lung shifts proximally with higher flow rate whereas deposition peak shifts to the deeper lung region with larger tidal volume. Deposition fraction in each lobe was proportional to its volume. Among the three main deposition mechanisms, diffusion was dominant for particles < 0.5 ${\mu}{\textrm}{m}$ whereas sedimentation and impaction were most influential for larger size particles. Impaction was particularly dominant for particles> 8 ${\mu}{\textrm}{m}$. The results may prove to be useful for estimating deposition dose of inhaled pollutant particles at various breathing conditions.

• The Journal of the Petrological Society of Korea
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• v.22 no.4
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• pp.273-289
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• 2013

Fallout ash is a notorious hazard that can have a variety of damages on agriculture and infrastructure and, most notably to aviation and human health. This study discusses the design of a conceptual model to aid in modeling the dispersal and deposition of ash from Mt. Baekdu volcano. It includes a discussion of assumptions and boundary conditions of the model as well as a detailed diagram of the conceptual model, complete with input parameters, units and equations. The two main processes contained within the model are the dispersal and deposition of ash, the outputs obtained from running the model, if designed, would be the total amount of fine ash contained in the eruption column, distance travelled by ash and ash thickness at surface.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.9
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• pp.741-746
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• 2009

Compare to conventional Indium Tin Oxide (ITO) film deposition methods, cesium assisted sputtering method has been shown superior electrical, mechanical, and optical film properties. However, it is not easy to use cesium assisted sputtering method since ITO film properties are very sensitive to Cesium assisted equipment condition but their mechanism is not yet clearly defined physically or mathematically. Therefore, to optimize deposited ITO film characteristics, development of accurate and reliable process model is essential. For this, in this work, we developed ITO film deposition process model using neural networks and design of experiment (DOE). Developed model prediction results are compared with conventional statistical regression model and developed neural process model has been shown superior prediction results on modeling of ITO film thickness, sheet resistance, and transmittance characteristics.