• 제목/요약/키워드: deposited layer

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Al:Au 음극층을 이용한 양면발광(dual emission) 유기 EL 소자의 Al 두께별 특성 평가 (Characterization of Organic Light-Emitting Diode (OLED) with Dual Emission using Al:Au Cathode)

  • 이수환;김달호;양희두;김지헌;이곤섭;박재근
    • 반도체디스플레이기술학회지
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    • 제7권1호
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    • pp.47-51
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    • 2008
  • The Al:Au double-layer metal electrode for use in transparent, dual emission of organic light-emitting diode (OLED) was fabricated. The electrode of Al:Au metals with various thicknesses was deposited by the vacuum thermal evaporation technique. For Al thickness of 1 nm, a bottom luminance of $4880\;cd/m^2$ was observed at 8 V. Otherwise, top luminance of $2020\;cd/m^2$ were observed at 8 V. In addition, the threshold voltages of the electrodes were 2.2 V. It was forward that the inserting 1 nm Al between LiF and Au enhanced electron injection with tunneling effect.

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Evaluation of Chromatic-Dispersion-Dependent Four-Wave-Mixing Efficiency in Hydrogenated Amorphous Silicon Waveguides

  • Kim, Dong Wook;Jeong, Heung Sun;Jeon, Sang Chul;Park, Sang Hyun;Yoo, Dong Eun;Kim, Ki Nam;An, Shin Mo;Lee, El-Hang;Kim, Kyong Hon
    • Journal of the Optical Society of Korea
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    • 제17권5호
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    • pp.433-440
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    • 2013
  • We present an experimental and numerical study of spectral profiles of effective group indices of hydrogenated amorphous silicon (a-Si:H) waveguides and of their chromatic-dispersion effect on the four-wave-mixing (FWM) signal generation. The a-Si:H waveguides of 220-nm thickness and three different widths of 400, 450 and 500 nm were fabricated by using the conventional CMOS device processes on a $2-{\mu}m$ thick $SiO_2$ bottom layer deposited on 8-inch Si wafers. Mach-Zehnder interferometers (MZIs) were formed with the a-Si:H waveguides, and used for precise measurement of the effective group indices and thus for determination of the spectral profile of the waveguides' chromatic dispersion. The wavelength ranges for the FWM-signal generation were about 45, 75 and 55 nm for the 400-, 450- and 500-nm-wide waveguides, respectively, at the pump wavelength of 1532 nm. A widest wavelength range for the efficient FWM process was observed with the 450-nm-wide waveguide having a zero-dispersion near the pump wavelength.

ALD를 이용한 극박막 $HfO_2 /SiON$ stack structure의 특성 평가 (Characterization of $HfO_2 /SiON$ stack structure for gate dielectrics)

  • Kim, Youngsoon;Lee, Taeho;Jaemin Oh;Jinho Ahn;Jaehak Jung
    • 한국마이크로전자및패키징학회:학술대회논문집
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    • 한국마이크로전자및패키징학회 2002년도 추계기술심포지움논문집
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    • pp.115-121
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    • 2002
  • In this research we have investigated the characteristics of ultra thin $HfO_2 /SiON$stack structure films using several analytical techniques. SiON layer was thermally grown on standard SCI cleaned silicon wafer at $825^{\circ}C$ for 12sec under $N_2$O ambient. $HfO_2 /SiON$$_4$/$H_2O$ as precursors and $N_2$as a carrier/purge gas. Solid HfCl$_4$was volatilized in a canister kept at $200^{\circ}C$ and carried into the reaction chamber with pure $N_2$carrier gas. $H_2O$ canister was kept at $12^{\circ}C$ and carrier gas was not used. The films were grown on 8-inch (100) p-type Silicon wafer at the $300^{\circ}C$ temperature after standard SCI cleaning, Spectroscopic ellipsometer and TEM were used to investigate the initial growth mechanism, microstructure and thickness. The electrical properties of the film were measured and compared with the physical/chemical properties. The effects of heat treatment was discussed.

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Al2O3/Si/Al2O3구조를 이용한 실리콘태양전지 제작 및 특성 (Fabrication and Properties of Silicon Solar Cells using Al2O3/Si/Al2O3 Structures)

  • 김광호
    • 반도체디스플레이기술학회지
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    • 제14권4호
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    • pp.45-49
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    • 2015
  • Using a combined CVD and ALD equipment system, multi-layer quantum well structures of $Al_2O_3/a-Si/Al_2O_3$ were fabricated on silicon Schottky junction devices and implemented to quantum well solar cells, in which the 1~1.5 nm thicknesses of the aluminum oxide films and the a-Si thin film layers were deposited at $300^{\circ}C$ and $450^{\circ}C$, respectively. Fabricated solar cell was operated by tunneling phenomena through the inserted quantum well structure being generated electrons on the silicon surface. Efficiency of the fabricated solar cell inserted with multi-quantum well of 41 layers has been increased by about 10 times that of the solar cell of pure Schottky junction solar cell.

Effect of Thermal Treatment on AIOx/Co90Fe10 Interface of Magnetic Tunnel Junctions Prepared by Radical Oxidation

  • Lee, Don-Koun;In, Jang-Sik;Hong, Jong-Ill
    • Journal of Magnetics
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    • 제10권4호
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    • pp.137-141
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    • 2005
  • We confirmed that the improvement in properties of magnetic tunnel junctions prepared by radical oxidation after thermal treatment was mostly resulted from the redistribution of oxygen at the $AIOx/Co_{90}Fe_{10}$ interface. The as-deposited Al oxide barrier was oxygen-deficient but most of it re-oxidized into $Al_2O_3$, the thermodynamically stable stoichiometric phase, through thermal treatment. As a result, the effective barrier height was increased from 1.52 eV to 2.27 eV. On the other hand, the effective barrier width was decreased from 8.2 ${\AA}$ to 7.5 ${\AA}$. X-ray absorption spectra of Fe and Co clearly showed that the oxygen in the CoFe layer diffused back into the Al barrier and thereby enriched the barrier to close to a stoichiometirc $Al_2O_3$ phase. The oxygen bonded with Co and Fe diffused back by 6.8 ${\AA}$ and 4.5 ${\AA}$ after thermal treatment, respectively. Our results confirm that controlling the chemical structures of the interface is important to improve the properties of magnetic tunnel junctions.

Structural and Magnetic Properties of $FePt-B_x\;at.\%$ (X=5, 10, 15, 25 and 33) thin Film by Post-Annealing

  • Lee Young-min;Lee Byeong-Seon;Lee Chan-Gyu;Koo Bon-Heun;Shimada Y.;Kitakami O.;Okamoto S.;Miyazaki T.
    • 한국자기학회:학술대회 개요집
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    • 한국자기학회 2005년도 동계학술연구발표회 및 2차 아시안포럼
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    • pp.154-155
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    • 2005
  • Multi-layer film of $MgO/(FePt-B)_{50nm}/ MgO$ was deposited on Si(100) substrates by RF magnetron sputtering. The boron chips were uniformly placed oil tile FePt target. The boron content of thin film was found to be about 5, 10, 15, 25 and $33 at\%$ by using a CAMECA SX-51 wavelength dispersive spectroscopy (WDX). It is observed that X-ray diffraction patterns of FePt-B film by post-annealing exhibited a transformation from disordered fcc structure to ordered $Ll_0$ phase with fct structure from around $400^{\circ}C$. By adding B, annealing temperature for ordering is about $200^{\circ}C$ lower than that of pure FePt. This remarkable decrease of the annealing temperature is closely related to the high diffusivities of Fe and Pt associated with the defects caused by movements of B atoms. The maximum coercivity(Hc) for FePt films was found to be ${\~}$13 kOe after annealing at $600^{\circ}C$ for 1hr.

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플라즈마 기상 화학 증착법을 이용한 탄소나노튜브의 선택적 수직성장 기술 (Selective Growth of Freestanding Carbon Nanotubes Using Plasma-Enhanced Chemical Vapor Deposition)

  • 방윤영;장원석
    • 한국정밀공학회지
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    • 제24권6호
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    • pp.113-120
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    • 2007
  • Chemical vapor deposition (CVD) is one of the various synthesis methods that have been employed for carbon nanotube (CNT) growth. In particular, Ren et al reported that large areas of vertically aligned multi-wall carbon nanotubes could be grown using a direct current (dc) PECVD system. The synthesis of CNT requires a metal catalyst layer, etchant gas, and a carbon source. In this work, the substrates consists of Si wafers with Ni-deposited film. Ammonia $NH_3$) and acetylene ($C_2H_2$) were used as the etchant gases and carbon source, respectively. Pretreated conditions had an influence on vertical growth and density of CNTs. And patterned growth of CNTs could be achieved by lithographical defining the Ni catalyst prior to growth. The length of single CNT was increased as niclel dot size increased, but the growth rate was reduced when nickel dot size was more than 200 nm due to the synthesis of several CNTs on single Ni dot. The morphology of the carbon nanotubes by TEM showed that vertical CNTs were multi-wall and tip-type growth mode structure in which a Ni cap was at the end of the CNT.

Atmospheric chemical vapor deposition of graphene on molybdenum foil at different growth temperatures

  • Naghdi, Samira;Rhee, Kyong Yop;Kim, Man Tae;Jaleh, Babak;Park, Soo Jin
    • Carbon letters
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    • 제18권
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    • pp.37-42
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    • 2016
  • Graphene was grown on molybdenum (Mo) foil by a chemical vapor deposition method at different growth temperatures (1000℃, 1100℃, and 1200℃). The properties of graphene were investigated by X-ray diffraction (XRD), X-ray photoelectron spectroscopy, and Raman spectroscopy. The results showed that the quality of the deposited graphene layer was affected by the growth temperature. XRD results showed the presence of a carbide phase on the Mo surface; the presence of carbide was more intense at 1200℃. Additionally, a higher I2D/IG ratio (0.418) was observed at 1200℃, which implies that there are fewer graphene layers at this temperature. The lowest ID/IG ratio (0.908) for the graphene layers was obtained at 1200℃, suggesting that graphene had fewer defects at this temperature. The size of the graphene domains was also calculated. We found that by increasing the growth temperature, the graphene domain size also increased.

Enhancement in solar cell efficiency by luminescent down-shifting layers

  • Ahmed, Hind A.;Walshe, James;Kennedy, Manus;Confrey, Thomas;Doran, John;McCormack, Sarah.J.
    • Advances in Energy Research
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    • 제1권2호
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    • pp.117-126
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    • 2013
  • In this paper, core-shell semiconductor quantum dots (QDs) CdSeS/ZnS with emission at 490 nm and 450 nm were investigated for their use in luminescent down-shifting (LDS) layers. Luminescent quantum yield (LQY) of the QDs measurements in solution proposed that they were suitable candidates for inclusion in LDS layers. QDs were encapsulated in poly(methyl,methacrylate) (PMMA) polymer matrix and films were fabricated of $134{\pm}0.05$ microns. Selections of organic dyes from BASF Lumogen F range were also investigated for their use as LDS layers; Violet 570 and Yellow 083. The addition of LDS layers containing Violet 570 dye demonstrated a unity LQY when encapsulated within a PMMA matrix. A PV device of an LDS layer of Lumogen Violet 570 deposited on top of a crystalline silicon cell was fabricated where it was demonstrated to increase the efficiency of the cell by 34.5% relative.

산화물박막 증착에 의한 금속 메쉬전극 구조 광전기화학셀의 효율 개선에 관한 연구 (Efficiency Improvement of Metal-Mesh Electrode Type Photoelectrochemical Cells by Oxides Layer Coatings)

  • 한치환;박선희;성열문
    • 전기학회논문지
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    • 제60권3호
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    • pp.584-587
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    • 2011
  • In this work, the $TiO_2$ and $SnO_2$ thin films as blocking layers were coated directly onto the metal-mesh electrode surface to prevent unnecessary inflow of back-transfer electrons from the electrolyte ($I^-/I_3^-$) to the metal-mesh electrode. The DSCs were fabricated with working electrode of SUS mesh coated with blocking $TiO_2$ and $SnO_2$ layers, dye-attached mesoporous $TiO_2$ film, gel electrolyte and counter electrode of Pt-deposited F:$SnO_2$. From the experimental result, it was ascertained that the efficiency of metal electrode coated with $TiO_2$ by Dip-coating was superior to that of metal electrode coated with $SnO_2$ by Dip-coating and screen printing with the results of experiments. The photo-current conversion efficiency of the cell obtained from optimum fabrication condition was 3% ($V_{oc}$=0.61V, $J_{sc}$=11.64 mA/$cm^2$, ff=0.64) under AM1.5, 100 mW/$cm^2$ illumination.