• Title/Summary/Keyword: deposited layer

Search Result 2,397, Processing Time 0.027 seconds

Properties of BiSbTe3 Thin Film Prepared by MOCVD and Fabrication of Thermoelectric Devices (MOCVD를 이용한 BiSbTe3 박막성장 및 열전소자 제작)

  • Kwon, Sung-Do;Yoon, Seok-Jin;Ju, Byeong-Kwon;Kim, Jin-Sang
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.22 no.5
    • /
    • pp.443-447
    • /
    • 2009
  • Bismuth-antimony-telluride based thermoelectric thin film materials were prepared by metal organic vapor phase deposition using trimethylbismuth, triethylantimony and diisopropyltelluride as metal organic sources. A planar type thermoelectric device has been fabricated using p-type $Bi_{0.4}Sb_{1.6}Te_3$ and n-type $Bi_{2}Te_{3}$ thin films. Firstly, the p-type thermoelectric element was patterned after growth of $5{\mu}m$ thickness of $Bi_{0.4}Sb_{1.6}Te_3$ layer. Again n-type $Bi_{2}Te_{3}$ film was grown onto the patterned p-type thermoelectric film and n-type strips are formed by using selective chemical etchant for $Bi_{2}Te_{3}$. The top electrical connector was formed by thermally deposited metal film. The generator consists of 20 pairs of p- and n-type legs. We demonstrate complex structures of different conduction types of thermoelectric element on same substrate by two separate runs of MOCVD with etch-stop layer and selective etchant for n-type thermoelectric material. Device performance was evaluated on a number of thermoelectric devices. To demonstrate power generation, one side of the device was heated by heating block and the voltage output was measured. The highest estimated power of 1.3 ${\mu}m$ is obtained at the temperature difference of 45 K.

A High-resolution Seismic Survey on the Abandoned Tidal Flat in Shihwa Lake (시화호내 과거 조간대에서의 고해상 탄성파 탐사)

  • Hong, Jong Guk;Kim, Gi Yeong;Choe, Dong Rim
    • Journal of the Korean Geophysical Society
    • /
    • v.2 no.4
    • /
    • pp.251-258
    • /
    • 1999
  • A high-resolution seismic survey was conducted on the abandoned tidal flat in Shihwa Lake on the west coast of Korea. A portable vibrator was used as a seismic source and 217 shot gathers with 48-channel system were acquired. F-k filtering, residual static corrections and post-stack frequency filtering are found to be useful for signal enhancement. The overburden is divided into two seismic depositional units. Unit I is deposited in tidal environment characterized by parallel and high continuity reflection pattern. This unit comprises a dry layer (Unit Ia) and a wet layer (Unit Ib) having averagely 5 and 15 meters thick, respectively. Unit II unconformably overlain by Unit I exhibits discontinuity and hummocky reflection pattern, indicating complex channel-fill sediments in estuary. The maximum thickness of this unit is approximately 20 meter. Acoustic basement is considered as Precambrian granitic gneiss occurred in the surrounding area.

  • PDF

PZT/LSMO/Pt Thin-Film by Pulse Laser and Sol-Gel Deposition (PZT/LSMO/Pt에 대한 펄스레이저 및 졸겔법에 의한 증착연구)

  • Choi, Kang-Ryong;Shim, In-Bo;Kim, Chul-Sung
    • Journal of the Korean Magnetics Society
    • /
    • v.15 no.1
    • /
    • pp.21-24
    • /
    • 2005
  • This work is to present each properties and the interfacial characterization between PZT layer and LSMO layer of PZT/LSMO/Pt. LSMO thin film grown by KrF(248 nm) excimer lasers are used in pulsed in pulsed laser deposition(PLD). PZT coposites thin films were deposited by spin coating using a commercial resist spinner. LSMO thin film by deposition oxygen pressure 125 mtorr have rhombohedral structure on Pt(111) substrate. The PZT/LSM/Pt pre-orientate to [111] direction. The final thin films were shown that magnetic and electric property was typical value, respective. We report that the lattice between the PZT/LSMO thin film and the substrate plays a very important role and may control to another effects.

The effect of initial Pd catalyst oxidation stale on CH$_4$sensitivity of SnO$_2$thin film sensor (Pd 촉매의 부분 산화 조절을 이용한 SnO$_2$박막 센서의 CH$_4$감도 변화 연구)

  • Choi, W. K.;Cho, J.;Cho, J. S.;Song, J. H.;Jung, H. J.;Koh, S. K.
    • Journal of the Microelectronics and Packaging Society
    • /
    • v.6 no.2
    • /
    • pp.45-49
    • /
    • 1999
  • A flammable gas sensor based on the $SnO_2$thin film deposited by the reactive ion assisted deposition was fabricated and ultra-thin Pd layer as catalyst was adsorbed at surface by ion beam sputtering. The initial oxidation states of Pd catalyst were controlled to investigate the role of Pd in the sensing process of inflammale gas sensor through annealing in air and vacuum respectively. The Pd catalyst existing in pure metallic state showed the sensitivity higher than that of PdO. The result might be closely related to the fact that PdO as a surface acceptor would receive electrons via Pd sub-channel from $SnO_2$, and thus which reduces the sensitivity and delay the response time.

  • PDF

Magnetic Characteristics and Annealing Effects of $NiFe/FeMn/NiFe/CoFe/Al_2O_3/CoFe/NiFe$Spin Tunneling Junctions ($NiFe/FeMn/NiFe/CoFe/Al_2O_3/CoFe/NiFe$ 스핀 터널링 접합의 자기적 특성과 열처리 효과)

  • 최연봉;박승영;강재구;조순철
    • Journal of the Korean Magnetics Society
    • /
    • v.9 no.6
    • /
    • pp.296-300
    • /
    • 1999
  • Cross-shape structures of spin tunneling junctions were fabricated using DC magnetron sputtering and metal masks. The film structures were $substrate/Ta/NiFe/FeMn/NiFe/CoFe/Al_2O_3/CoFe/NiFe$ and $substrate/Ta/NiFe/CoFe/ Al_2O_3/CoFe/NiFe/FeMn/NiFe$. Fabrication conditions of insulating layer ($Al_2O_3$) and thickness and sputtering power of each film layer were varied, and maximum magnetoresistance ratio of 24.3 % was obtained. Magnetic characteristic variations in the above mentioned two structures and two types of substrates (Corning glass 7059 and Si(111)) were compared. Annealing of the junctions was performed to find out magnetic characteristic variations expected from the device fabrication. Magneoresistance Ratio were observed to maintain as-deposited value up to 150 $^{\circ}C$ annealing and then to drop rapidly after 180 $^{\circ}C$ annealing.

  • PDF

A Study of the Photoelectrochemical Effects of Squaraine Aggregate in Monolayer (스쿠알렌 집합체의 광전기화학적 효과에 관한 연구)

  • Young Soon Kim;Kock-Yee Law;David G. Whitten
    • Journal of the Korean Chemical Society
    • /
    • v.37 no.7
    • /
    • pp.642-647
    • /
    • 1993
  • Monolayers of pure surfactant squaraine, DSSQ(4-distearyl amino phenyl-4'-dimethylaminophenylsquaraine), were deposited on $SnO_2 $ electrodes by the Langmuir-Blodgett film technique. The DSSQ film exhibits ${\lambda}_{max}$ at ∼530 nm. The absorption is significantly red-shifted from the solution of DSSQ (633 nm in chloroform), suggesting that the squaraine chromophores form aggregates in the LB film. The photogeneration of the squaraine aggregates is studied by measuring the photocurrents in photoelectrochemical cells consisting of the squaraine of the aggregates is found to parallel its absorption spectrum and quantum efficiency as high as 0.3% has been observed. While the photocurrent was attenuated exponentially when stearic acid layers (up to 8 layers) are inserted between the squaraine layer and the electrode, it is nearly extinguished when the squaraine layer is over-coated with 2 layers of stearic acid. A model for the observation is proposed and the roles of the electrolytes and oxygen on the photogeneration process will be discussed.

  • PDF

The Effect of Microwave Annealing Time on the Electrical Characteristics for InGaZnO Thin-Film Transistors (마이크로파 조사 시간에 따른 InGaZnO 박막 트랜지스터의 전기적 특성 평가)

  • Jang, Seong Cheol;Park, Ji-Min;Kim, Hyoung-Do;Lee, Hyun Seok;Kim, Hyun-Suk
    • Korean Journal of Materials Research
    • /
    • v.30 no.11
    • /
    • pp.615-620
    • /
    • 2020
  • Oxide semiconductor, represented by a-IGZO, has been commercialized in the market as active layer of TFTs of display backplanes due to its various advantages over a-Si. a-IGZO can be deposited at room temperature by RF magnetron sputtering process; however, additional thermal annealing above 300℃ is required to obtain good semiconducting properties and stability. These temperature are too high for common flexible substrates like PET, PEN, and PI. In this work, effects of microwave annealing time on IGZO thin film and associated thin-film transistors are demonstrated. As the microwave annealing time increases, the electrical properties of a-IGZO TFT improve to a degree similar to that during thermal annealing. Optimal microwave annealed IGZO TFT exhibits mobility, SS, Vth, and VH of 6.45 ㎠/Vs, 0.17 V/dec, 1.53 V, and 0.47 V, respectively. PBS and NBS stability tests confirm that microwave annealing can effectively improve the interface between the dielectric and the active layer.

Characterization of the Barrier Layers Comprised of Inorganic Compound for Organic Light Emitting Device Applications

  • Kim, Na-Rae;Lee, Yang-Doo;Kim, Jai-Kyeong;Hwang, Sung-Woo;Ju, Byeong-Kwon
    • Journal of Information Display
    • /
    • v.7 no.3
    • /
    • pp.13-18
    • /
    • 2006
  • Currently, the flexible organic light emitting devices (OLEDs) are investigated. They are very vulnerable to moisture, and thus have been found to show some problems. Thus, an effective barrier layer is needed to protect from moisture in air. We deposited thin films with magnesium oxide (MgO) and silicon oxide $(SiO_{2})$ compounds mixed at various mixture ratios on flexible polyether sulfone (PES) substrates by an electron-beam evaporator to investigate their applizability for transparent barrier applications. In this study, we found that as the MgO fraction increased, thin films comprised of MgO and $(SiO_{2})$ compounds became more amorphous and their surface morphologies become smoother and denser. In addition, zirconium oxide $(ZrO_{2})$ was added to the above-mentioned compound mixtures. $ZrO_{2}$ made thin mixture films more amorphous and made the surface morphology denser and more uniform. The water vapor transmission rates (WVTRs) of the whole films decreased rapidly. The best WVTR was obtained by depositing thin films of Mg-Si-Zr-O compound among the whole thin films. As the thin mixture films became more amorphous, and the surface morphology become denser and more uniform, the WVTRs decreased. Therefore, the thin mixture films became more suitable for flexible OLED applications as transparent passivation layers against moisture in air.

Preparation of ZrO2 and SBT Thin Films for MFIS Structure and Electrical Properties (ZrO2 완충층과 SBT박막을 이용한 MFIS 구조의 제조 및 전기적 특성)

  • Kim, Min-Cheol;Jung, Woo-Suk;Son, Young-Guk
    • Journal of the Korean Ceramic Society
    • /
    • v.39 no.4
    • /
    • pp.377-385
    • /
    • 2002
  • The possibility of $ZrO_2$ thin film as insulator for Metal-Ferroelectric-Insulator-Semiconductor(MFIS) structure was investgated. $SrBi_2Ta_2O_9$ and $SrBi_2Ta_2O_9$(SBT) thin films were deposited on P-type Si(111) wafer by R. F. magnetron sputtering method. The electrical properties of MFIS gate were relatively improved by inserting the $ZrO_2$ buffer layer. The window memory increased from 0.5 to 2.2V in the applied gate voltage range of 3-9V when the thickness of SBT film increased from 160 to 220nm with 20nm thick $ZrO_2$. The maximum value of window memory is 2.2V in Pt/SBT(160nm)/$ZrO_2$(20nm)/Si structure with the optimum thickness of $ZrO_2$. These memory windows are sufficient for practical application of NDRO-FRAM operating at low voltage.

Influence of Process Conditions on Properties of Cu2O Thin Films Grown by Electrodeposition (전착법을 이용한 Cu2O 박막 형성 및 공정 조건에 따른 특성 변화)

  • Cho, Jae Yu;Ha, Jun Seok;Ryu, Sang-Wan;Heo, Jaeyeong
    • Journal of the Microelectronics and Packaging Society
    • /
    • v.24 no.2
    • /
    • pp.37-41
    • /
    • 2017
  • Cuprous oxide ($Cu_2O$) is one of the potential candidates as an absorber layer in ultra-low-cost solar cells. $Cu_2O$ is highly desirable semiconducting oxide material for use in solar energy conversion due to its direct band gap ($E_g={\sim}2.1eV$) and high absorption coefficient that absorbs visible light of wavelength up to 650 nm. In addition, $Cu_2O$ has other several advantages such as non-toxicity, low cost and also can be prepared with simple and cheap methods on large scale. In this work, we deposited the $Cu_2O$ thin films by electrodeposition on gold coated $SiO_2/Si$ wafers. We changed the process conditions such as pH of the solution, applied potential on working electrode, and solution temperature. Finally, we confirmed the structural properties of the thin films by XRD and SEM.