• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.210-210
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• 2011

The effects of CH2F2 and N2 gas flow rates on the etch selectivity of silicon nitride (Si3N4) layers to extreme ultra-violet (EUV) resist and the variation of the line edge roughness (LER) of the EUV resist and Si3N4 pattern were investigated during etching of a Si3N4/EUV resist structure in dual-frequency superimposed CH2F2/N2/Ar capacitive coupled plasmas (DFS-CCP). The flow rates of CH2F2 and N2 gases played a critical role in determining the process window for ultra-high etch selectivity of Si3N4/EUV resist due to disproportionate changes in the degree of polymerization on the Si3N4 and EUV resist surfaces. Increasing the CH2F2 flow rate resulted in a smaller steady state CHxFy thickness on the Si3N4 and, in turn, enhanced the Si3N4 etch rate due to enhanced SiF4 formation, while a CHxFy layer was deposited on the EUV resist surface protecting the resist under certain N2 flow conditions. The LER values of the etched resist tended to increase at higher CH2F2 flow rates compared to the lower CH2F2 flow rates that resulted from the increased degree of polymerization.

• Korean Journal of Materials Research
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• v.10 no.2
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• pp.171-174
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• 2000

In this study, the laser patterning of sputter-deposited amorphous CoNbZr films has been tried usig Nd: YAG laser. However, the metal film was not removed because of its high reflectance of the alser on the metal surface. To solve this problem, authors tried to screen-print a block polymer on the metal film and then irradiate the laser on the polymer. This is a new method which was suggested by this study. Using this new method, the metal films were effectively removed with the laser power of 114W even though the metal films was not removed with the laser power of 332W using the conventional method. This result leads to the conclusion that the block polymer acts as a laser energy absorbing and transferring layer.

• Korean Journal of Materials Research
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• v.13 no.2
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• pp.126-132
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• 2003

In order to evaluate the corrosion resistance at the anode side separator for molten carbonate fuel cell, STS316 and SACC-STS316 (chromium and aluminum were simultaneously deposited by diffusion into STS316 authentic stainless steel substrate by pack-cementation process) were applied as the separator material. In case of STS316, corrosion proceeded via three steps ; a formation step of corrosion product until stable corrosion product, a protection step against corrosion until breakaway occurs, a advance step of corrosion after breakaway. Especially, STS316 would be impossible to use the separator without suitable surface modification because of rapid corrosion rate after formation of corrosion product, occurs the severe problem on stability of cell during long-time operation. Whereas, SACC-STS316 was showed more effective corrosion resistance than the present separator, STS316 due to the intermetallic compound layer such as NiAl, Ni3Al formed on the surface of STS316 specimen. And it is anticipated that, in order to use SACC-STS316 alternative separator at the anode side, coating process, which can lead to dense coating layer, has to be developed, and by suitable pre-treatment before using it, very effective corrosion resistance will be achieved.

• Proceedings of the Materials Research Society of Korea Conference
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• 2012.05a
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• pp.95.1-95.1
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• 2012

Very High Temperature gas cooler Reactor (VHTR) has been considered as one of the most promising nuclear reactor because of many advantages including high inherent safety to avoid environmental pollution, high thermal efficiency and the role of secondary energy source. The TRISO coated fuel particles used in VHTR are composed of 4 layers as OPyC, SiC, IPyC and buffer PyC. The significance of CVD-SiC coatings used in tri-isotropic(TRISO) nuclear coated fuel particles is to maintain the strength of the whole particle. Various methods have been proposed to evaluate the mechanical properties of CVD-SiC film at room temperature. However, few works have been attempted to characterize properties of CVD-SiC film at high temperature. In this study, micro tensile system was newly developed for mechanical characterization of SiC thin film at elevated temperature. Two kinds of CVD-SiC films were prepared for micro tensile test. SiC-A had [111]-preferred orientation, while SiC-B had [220]-preferred orientation. The free silicon was co-deposited in SiC-B coating layer. The fracture strength of two different CVD-SiC films was characterized up to $1000^{\circ}C$.The strength of SiC-B film decreased with temperature. This result can be explained by free silicon, observed in SiC-B along the columnar boundaries by TEM. The presence of free silicon causes strength degradation. Also, larger Weibull-modulus was measured. The new method can be used for thin film material at high temperature.

• Journal of the Korean Ceramic Society
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• v.51 no.4
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• pp.231-242
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• 2014

An interconnect in solid oxide fuel cells (SOFCs) electrically connects unit cells and separates fuel from oxidant in the adjoining cells. The interconnects can be divided broadly into two categories - ceramic and metallic interconnects. A thin and gastight ceramic layer is deposited onto a porous support, and metallic interconnects are coated with conductive ceramics to improve their surface stability. This paper provides a short review on ceramic materials for SOFC interconnects. After a brief discussion of the key requirements for interconnects, the article describes basic aspects of chromites and titanates with a perovskite structure for ceramic interconnects, followed by the introduction of dual-layer interconnects. Then, the paper presents protective coatings based on spinel-or perovskite-type oxides on metallic interconnects, which are capable of mitigating oxide scale growth and inhibiting Cr evaporation.

• Journal of the Korean Magnetics Society
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• v.6 no.6
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• pp.411-416
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• 1996

We have studied the effect of a spin-dependence interface electron scattering on the giant magnetoresistance by adding a Fe magnetic material to the Co/Cu interfaces. The $Fe(50\;{\AA})/[Co(17\;{\AA})/Fe(t\;{\AA})/Cu(24\;{\AA})]_{20}$ multilayers are deposited on the Corning glass 2948 and 7059 substrates in a dc magnetron sputtering system. The magnetoresistance ratio is 22 % in the only Co/Cu multilayer, while it is increased to 26 % with inserted ultra thin Fe interface layer and reduced with increasing thickness of the Fe interface layer. It was investigated to the dependence of the magnetoresistance behaviors on annealing temperature. The magnetic properties of the multilayers were measured by vibrating sample magnetometer. Also, the structures and the surface roughness of samples were characterized by X-ray diffraction and atomic force microscope, respectively. The magnetoresistance ratio was increased to annealing temperature $300^{\circ}C$, but reduced at the temperature higher than $300^{\circ}C$ due to the interfacial diffuse.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.361-361
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• 2011

Cu(InGa)(SeS2) (CIGS) thin film solar cells have recently reached an efficiency of 20%. Recent studies suggest a double graded band gap structure of the CIGS absorber layer to be a key issue in the production of high efficiency thin film solar cell using by sputtering process method. In this study, Cu(InGa)(SeS2) absorbers were manufactured by selenization and surfulization, we have deposited CIG precusor by sputtering and Se layer by evaporation before selenization. The objective of this study is to find out surfulization effects to improve Voc and to compare with non-surfulization Cu(InGa)Se2 absorbers. Even if we didn't analysis Ga depth profile of Cu(InGa)(SeS2) absorbers, we confirmed increasing of Eg and Voc through surlization process. In non-surfulization Cu(InGa)Se2 absorbers, Eg and Voc are 0.96eV and 0.48V. Whereas Eg and Voc of Cu(InGa)(SeS2) absorbers are 1.16eV and 0.57V. And the efficiency of 9.58% was achieved on 0.57cm2 sized SLG substrate. In this study, we will be discussed to improve Eg and Voc through surfulization and the other method without H2S. gas.

• Korean Journal of Materials Research
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• v.12 no.3
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• pp.211-214
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• 2002

Properties of 52/48 PZT films with various thicknesses for piezoelectric micro-electro mechanical systems (MEMS) devices fabricated by multi-coating method on $Pt(3500{\AA})/Ti(400{\AA})/SiO_2(3000{\AA})/Si$(525$\mu\textrm{m}$) substrates were investigated. PZT films were deposited by spin-coating process at 3500 rpm for 30 sec, followed by pyrolysis at 45$0^{\circ}C$ for 10 min producing the thickness of about 120nm. These processes were repeated 4, 8, 12, 16 and 20 times in order to have various thicknesses, respectively. Finally, they were crystallized at $650^{\circ}C$ for 30 min. All thick PZT films showed dense and homogeneous surface microstructures. Thick PZT films showed crystalline structures of random orientations with increasing thickness. Dielectric constants of thick PZT films were increased with increasing film thickness and reached 800 at 100kHz for 2.3$\mu\textrm{m}$ thick PZT film. $P_r\; and\; E_c$ of 2.3$\mu\textrm{m}$ thick PZT films were about 20$\mu$C/$\textrm{cm}^2$ and 63kV/cm. Depth profile analysis by Auger Electron Spectroscopy (AES) of 4800 $\AA$ thick PZT film showed the formation of the perovskite phase on Pt layer by Pb diffusion behavior. It was considered that Pb-Pt intermediate layer promoted PZT (111) columnar structures.

• Korean Journal of Materials Research
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• v.3 no.5
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• pp.521-528
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• 1993

Ni-graphi~e composite powders were prepared by reduct ion of $Ni^{++}$ from arnmoniacal nickel sulfate solution on graphite core by hydrogen gas at elevated temperature and pressure. Effect of coating catalyst. Anthraquinone $(C_6H_4COC_6H_4 CO)$, on the reduction rate and the properties of nickel layer were investigated by SEM, X-ray, size and chemical analysis. 1nduct.ion period, a time lag between the ~njection of hydrogen gas and the start of the reduction, was 22 to 70 mins and was affected by the size and amount of Anthraquinone. Kickel layer deposited on the surface of graphite core material was composed of nickel nodules whose sizes were different with vari~ ous reduction conditions. Minimum diameter of nickel nodules was about 2-3$\mu \textrm m$.

• Journal of Welding and Joining
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• v.20 no.3
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• pp.74-83
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• 2002

In order to investigate the hot cracking phenomena of the Inconel 690 overlay welds, the hot cracking test(modified Varestraint test) was performed by varying augmented strain and welding speed in GTAW. A total of five kinds of specimens was used in the hot cracking test. The specimens used were two kinds of one layer specimens that were composed of just Inconel 690 deposited metal and three kinds of double layer specimens that were composed with as upper part of Inconel 690 weld metal and lower part of SA508 cl.3 or STS 309L. The main results are as fo11ows: In the welds composed of just Inconel 690, as the augmented strain was more increased and the welding speed was more decreased, the extent of cracking was more increased. And these cracks were mainly solidification cracks, and liquation cracks were also observed partially in HAZ. And hot cracking susceptibily of Inconel 690 welds by using filler metals containing Nb were higher than that of the welds with Nb free. The hot cracking susceptibility of Inconel 690 weld metal was increased with dilution of SA 508 cl.3 and STS 309L, and the influence of SA 508 cl.3 was higher than that of 575 309L. The results of calculation of $TSC\Delta$ and $TLC\Delta$ in Inconel 690 weld metal changed by dilution with base metal or neighboring welds were agreed well with the results of hot cracking test in this study. Therefore, it was expected that the hot cracking was considerably decreased or prevented by using proper welding conditions such as lower heat input, filler metals, base metal and neighboring welds.