Thermal Deformation of Glass Backplane during Flash Lamp Crystallization Process of Amorphous Silicon (플래시 램프를 이용한 비정질 실리콘 결정화 공정에서의 유리기판 열변형)
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- Transactions of the Korean Society of Mechanical Engineers B
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- v.36 no.10
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- pp.1025-1032
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- 2012