• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.10a
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• pp.241-242
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• 2012

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.11a
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• pp.729-730
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• 2010

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.20 no.5
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• pp.666-672
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• 2011

In this paper, we describes the development of automatic inspection system for detecting the defects on photovoltaic wafer by using machine vision. Until now, The defect inspection process was manually performed by operators. So these processes caused the produce of poorly-made articles and inaccuracy results. To improve the inspection accuracy, the inspection system is not only configured, but the image processing algorithm is also developed. The inspection system includes dimensional verification and pattern matching which compares a 2-D image of an object to a pattern image the method proves to be computationally efficient and accurate for real time application and we confirmed the applicability of the proposed method though the experience in a complex environment.

• Journal of the Semiconductor & Display Technology
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• v.3 no.2
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• pp.5-9
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• 2004

Microcircuit fabrication requires precise control of impurities in tiny regions of the silicon. These regions must be interconnected to create components and VLSI circuits. The patterns to define such regions are created by lithographic processes. In order to image features smaller than 70 nm, it is necessary to employ non-optical technology (or next generation lithography: NGL). One such NGL is extreme ultra-violet lithography (EUVL). EUVL transmits the pattern on the wafer surface after reflecting ultra-violet through mask pattern. If particles exist on the blank mask, it can't transmit the accurate pattern on the wafer and decrease the reflectivity. It is important to care the blank mask. We removed the particles on the wafer using focused ion beam (FIB). During removal, FIB beam caused damage the multi layer mask and it decreased the reflectivity. The relationship between particle removal and reflectivity is examined: i) transmission electron microscope (TEM) observation after particle removal, ii) reflectivity simulation. It is found that the image mode of FIB is more effective for particle removal than spot and bar mode.

• Journal of Institute of Control, Robotics and Systems
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• v.6 no.1
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• pp.112-119
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• 2000

A die-casting junction method is usually used to manufacture the tub of an IH(induction heating) jar. If there is a very small air bubble in the junction area, the thermal conductivity is deteriorated and local overheat occurs. Such problem brings serious inferiority of the IH jar. In this paper, we propose a new method to detect such defect with simply measured thermal data. Thermal distribution of preheated tubs is obtained by scanning with infrared thermal sensors and analyzed with the statistic pattern recognition method. By defining the characteristic feature as the temperature difference between sensors and using ellipsoid function as decision boundary, a supervised learning method of genetic algorithm is proposed to obtain the required parpameters. After applying the proposed method to experiment, we have proved that the rate of recognition is high even for a small number of data set.

• The Korean Journal of Nuclear Medicine Technology
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• v.18 no.2
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• pp.28-32
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• 2014

Purpose Patient motion during myocardial perfusion SPECT can produce images that show visual artifacts and perfusion defects. This artifacts and defects remain a significant source of unsatisfactory myocardial perfusion SPECT. Motion correction has been developed as a way to correct and detect the patient motion for reducing artifacts and defects, and each motion correction uses different algorithm. We corrected simulated motion patterns with several motion correction methods and compared those images. Materials and Methods Phantom study was performed. The anthropomorphic torso phantom was made with equal counts from patient's body and simulated defect was added in myocardium phantom for to observe the change in defect. Vertical motion was intentionally generated by moving phantom downward in a returning pattern and in a non-returning pattern throughout the acquisition. In addition, Lateral motion was generated by moving phantom upward in a returning pattern and in a non-returning pattern. The simulated motion patterns were detected and corrected similarly to no-motion pattern image and QPS score, after Motion Detection and Correction Method (MDC), stasis, Hopkins method were applied. Results In phantom study, Changes of perfusion defect were shown in the anterior wall by the simulated phantom motions, and inferior wall's defect was found in some situations. The changes derived from motion were corrected by motion correction methods, but Hopkins and Stasis method showed visual artifact, and this visual artifact did not affect to perfusion score. Conclusion It was confirmed that motion correction method is possible to reduce the motion artifact and artifactual perfusion defect, through the apply on the phantom tests. Motion Detection and Correction Method (MDC) performed better than other method with polar map image and perfusion score result.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.10
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• pp.942-946
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• 2006

We simulated insulation defects of stator winding wire on high voltage generator by 5 types. 4 types have one discharge source and other one has multi discharge source by simulation. For accurate decision, measurements used to PRPD pattern to occurred partial discharge source of various types. In this research, when PRPD pattern carried out or analyzed pattern recognition of discharge source, it used to powerful tools. In this result, PRPD Pattern defined to have single discharge source of 4 types by insulation defect. When insulation defect simulated, all the defected winding have not the same result. Errors for a little different can make mistakes from a subtle distinction. The difference between internal and void discharge have magnitude of pulse amplitude of inner discharge bigger than void discharge and have a shape of bisymmetry. But void discharge has a shape of bisymmetry against maximum value on polarity respectively. In cases of slot and surface discharge, we confirmed to show similar results those other researchers. In case of multi-discharge, as a result of we could classify not perfect match with occurred patterns in single discharge eachother. In the future, we will have to recognize and classify with results of multi-discharge.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.54 no.5
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• pp.198-205
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• 2005

Many precedent investigations hate been made for the reliable assessment of the insulation state of large power apparatus for which partial discharge detection is one of tile plausible way. In this work, experimental investigations have been carried out to make the comparison on the PD(partial discharge) pattern analysis related to the five different types of artificial defects such as SFMP (Single Free Moving Particle), MFMP (Multi Free Moving Particle), Void, CFP (Conductor-Fixed Protrusion), EP (Enclosure Protrusion). For each PD pattern, PD detection has been done by tee different types of PD sensors such as HFCT(High Frequency Current Transformer), AE(Acoustic Emission) and UHF(Ultra High Frequency). And, in addition, frequency spectrum by the UHF sensor has been also made for each defect respectively. As a result, it is observed that the possibility of obtaining PD pattern based on PRPD(Phase Resolved Partial Discharge) in connection with the defects tinder investigation is dependant on the type of the sensor while the spectrum analysis is always successful to be achieved for every defect. Therefore, it could be suggested that the nature of PD source can be identified more distinctively when the conventional PRPDA is combined with spectrum analysis.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.6
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• pp.82-87
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• 2006

Availability of defect test algorithm that recognizes exact and standardized defect information in order to fundamentally resolve generated defects in industrial sites by giving artificial intelligence to SAT(Scanning Acoustic Tomograph), which previously depended on operator's decision, to find various defect information in a semiconductor package, to decide defect pattern, to reduce personal errors and then to standardize the test process was verified. In order to apply the algorithm to the lately emerging Neural Network theory, various weights were used to derive results for performance advancement plans of the defect test algorithm that promises excellent field applicability.

• Journal of Electrical Engineering and Technology
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• v.9 no.4
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• pp.1360-1364
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• 2014

In this paper, RCS characteristics on defect pattern of crossed dipole slot FSS having a finite size have been analyzed. To analyze RCS, we applied the electric field integral equation analysis which applies BiCGSTab algorithm with iterative method and uses RWG basis function. To verify the validity of this paper, RCS of PEC sphere has been compared to the theoretical results and FSSs with defect patterns are fabricated and measured. As defect patterns in FSS, missing one column, missing some elements, and discontinuity in surfaces are simulated and compared with the measurement results. Resonant frequency shifts in pass band and changes in bandwidth are observed. From the results, precisely predicting and designing frequency characteristics over defect patterns are essential when applying FSS structures such as FSS radomes.