Journal of the Korean Society of Manufacturing Technology Engineers (한국생산제조학회지)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
권호 표지

Development of Automatic Precision Inspection System for Defect Detection of Photovoltaic Wafer

태양광 웨이퍼의 결함검출을 위한 자동 정밀검사 시스템 개발

  • 투고 : 2011.04.20
  • 심사 : 2011.06.04
  • 발행 : 2011.10.15
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초록

In this paper, we describes the development of automatic inspection system for detecting the defects on photovoltaic wafer by using machine vision. Until now, The defect inspection process was manually performed by operators. So these processes caused the produce of poorly-made articles and inaccuracy results. To improve the inspection accuracy, the inspection system is not only configured, but the image processing algorithm is also developed. The inspection system includes dimensional verification and pattern matching which compares a 2-D image of an object to a pattern image the method proves to be computationally efficient and accurate for real time application and we confirmed the applicability of the proposed method though the experience in a complex environment.

키워드

참고문헌

  1. Baik, J. H., 2005, "Vision of Solar Cell Technology," KISTI, Kosen Expert Review paper, pp. 21-35.
  2. Chou, P. B., Rao, A. R., Sturzenbecker, M. C., and Brecher, V. H., 1997, "Automatic Defect Classification for Semiconductor Manufacturing," Machine Vision and Application, Vol. 9, No. 4, pp. 201-207. https://doi.org/10.1007/s001380050041
  3. Tobin, K. W., 1996, Inspection in Semiconductor Manufacturing, Webster's Encyclopedia of Electrical and Electronic Engineering, Wiley & Sons, New York, pp. 242-263.
  4. Dana, H., and Christopher, M., 1982, Computer Vision, Prentice Hall, New Jersey.
  5. Martina, C., and Vassilios, G., 1999, "Multi-level Counters for Single-phase Grid Connected Photovoltaic System," Solar energy, Vol. 66, No. 5, pp 325-335. https://doi.org/10.1016/S0038-092X(99)00035-3
  6. Funck, J. W., Zhong, Y., Butler, D. A., Brunner, C. C., and Forrer, J. B., 2003, "Image Segmentation Algorithms Applied to Wood Defect Detection," Computers an Electronics in Agriculture, Vol. 41, No. 1, pp. 157-179. https://doi.org/10.1016/S0168-1699(03)00049-8
  7. Park, H. J., and Hwang, Y. M., 2001, "Dimension Measurement using the Machine Vision," Journal of the Korea Society of Precision Engineering, Vol. 18, No. 3, pp. 91-99.
  8. Boukharouha, S., Rebordao, J. M., and Wendel, P. L., 1985, "An Amplitude Method Based on the Distribution Function of an image," Computer Vision, Graphic and Image Processing, Vol.29, No. 1, pp. 47-59. https://doi.org/10.1016/S0734-189X(85)90150-1