• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.221-221
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• 2014

The present work proposes an improved numerical simulator for design and modification of large area capacitively coupled plasma (CCP) processing chamber. CCP, as notoriously well-known, demands the tremendously huge computational cost for carrying out transient analyses in realistic multi-dimensional models, because electron dissociations take place in a much smaller time scale (${\Delta}t{\approx}10-8{\sim}10-10$) than time scale of those happened between neutrals (${\Delta}t{\approx}10-1{\sim}10-3$), due to the rf drive frequencies of external electric field. And also, for spatial discretization of electron flux (Je), exponential scheme such as Scharfetter-Gummel method needs to be used in order to alleviate the numerical stiffness and resolve exponential change of spatial distribution of electron temperature (Te) and electron number density (Ne) in the vicinity of electrodes. Due to such computational intractability, it is prohibited to simulate CCP deposition in a three-dimension within acceptable calculation runtimes (<24 h). Under the situation where process conditions require thickness non-uniformity below 5%, however, detailed flow features of reactive gases induced from three-dimensional geometric effects such as gas distribution through the perforated plates (showerhead) should be considered. Without considering plasma chemistry, we therefore simulated flow, temperature and species fields in three-dimensional geometry first, and then, based on that data, boundary conditions of two-dimensional plasma discharge model are set. In the particular case of SiH4-NH3-N2-He CCP discharge to produce deposition of SiNxHy thin film, a cylindrical showerhead electrode reactor was studied by numerical modeling of mass, momentum and energy transports for charged particles in an axi-symmetric geometry. By solving transport equations of electron and radicals simultaneously, we observed that the way how source gases are consumed in the non-isothermal flow field and such consequences on active species production were outlined as playing the leading parts in the processes. As an example of application of the model for the prediction of the deposited thickness uniformity in a 300 mm wafer plasma processing chamber, the results were compared with the experimentally measured deposition profiles along the radius of the wafer varying inter-electrode gap. The simulation results were in good agreement with experimental data.

• Magazine of the Korean Society of Agricultural Engineers
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• v.40 no.5
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• pp.91-99
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• 1998

The widespread use of thin shell structures has created a need for a systematic method of analysis which can adequately account for arbitrary geometric form and boundary conditions as well as arbitrary general type of loading. Therefore, the stress and analysis of thin shell has been one of the more challenging areas of structural mechanics. A wide variety of numerical methods have been applied to the governing differential equations for spherical and cylindrical structures with a few results applicable to practice. The analysis of axisymmetric spherical shell is almost an every day occurrence in many industrial applications. A reliable and accurate finite element analysis procedure for such structures was needed. Dynamic loading of structures often causes excursions of stresses well into the inelastic range and the influence of geometry changes on the response is also significant in many cases. Therefore both material and geometric nonlinear effects should be considered. In general, the shell structures designed according to quasi-static analysis may fail under conditions of dynamic loading. For a more realistic prediction on the load carrying capacity of these shell, in addition to the dynamic effect, consideration should also include other factors such as nonlinearities in both material and geometry since these factors, in different manner, may also affect the magnitude of this capacity. The objective of this paper is to demonstrate the dynamic characteristics of spherical shell. For these purposes, the spherical shell subjected to uniformly distributed step load was analyzed for its large displacements elasto-viscoplastic static and dynamic response. Geometrically nonlinear behaviour is taken into account using a Total Lagrangian formulation and the material behaviour is assumed to elasto-viscoplastic model highly corresponding to the real behaviour of the material. The results for the dynamic characteristics of spherical shell in the cases under various conditions of base-radius/central height(a/H) and thickness/shell radius(t/R) were summarized as follows : The dynamic characteristics with a/H. 1) AS the a/H increases, the amplitude of displacement in creased. 2) The values of displacement dynamic magnification factor (DMF) were ranges from 2.9 to 6.3 in the crown of shell and the values of factor in the mid-point of shell were ranged from 1.8 to 2.6. 3) As the a/H increases, the values of DMF in the crown of shell is decreased rapidly but the values of DMF in mid-point shell is increased gradually. 4) The values of DMF of hoop-stresses were range from 3.6 to 6.8 in the crown of shell and the values of factor in the mid-point of shell were ranged from 2.3 to 2.6, and the values of DMF of stress were larger than that of displacement. The dynamic characteristics with t/R. 5) With the thickness of shell decreases, the amplitude of the displacement and the period increased. 6) The values of DMF of the displacement were ranged from 2.8 to 3.6 in the crown of shell and the values of factor in the mid-point of shell were ranged from 2.1 to 2.2.

• Journal of the Society of Naval Architects of Korea
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• v.54 no.3
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• pp.267-273
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• 2017

Pressure hulls of submerged structures are generally designed as circular cylinders, spheres or cones with form of axisymmetric shell of revolution to withstand the high external pressure of deep ocean. The compressive buckling (implosion) due to hydrostatic pressure is the main concern of structural design of pressure hull and many design codes are provided for it. It is well-known that the buckling behavior of thin shell of revolution is very sensitive to the initial geometric imperfections introduced during the construction process of cutting and welding. Hence, the theoretical solutions for thin shells with perfect geometry often provide much higher buckling pressures than the measured data in tests or real structures and more precise structural analysis techniques are prerequisite for the safe design of pressure hulls. So this paper dealt with various buckling pressure estimation techniques for unstiffened circular cylinder under hydrostatic pressure conditions. The empirical design equations, eigenvalue analysis technique for critical pressure and collapse behaviors of thin cylindrical shells by the incremental nonlinear FE analysis were applied. Finally all the obtained results were compared with those of the pressure chamber test for the aluminium models. The pros and cons of each techniques were discussed and the most rational approach for the implosion of circular cylinder was recommended.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.33 no.6
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• pp.418-426
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• 2009

The effect of an inertia moment of a pump flywheel on the thermal-hydraulic behaviors of the KALIMER-600(Korea Advanced LIquid MEtal Reactor) reactor pool during an early-phase of a loss of normal heat sink accident was investigated. The thermal-hydraulic analyses for a steady and a transient state were made by using the COMMIX-1AR/P code. In the present analysis a quarter of the reactor geometry was modeled in a cylindrical coordinate system, which includes a quarter of a reactor core and a UIS, a half of a DHX and a pump and a full IHX. In order to evaluate the effects of an inertia moment of the pump flywheel, a coastdown flow whose flow halving time amounts to 3.69 seconds was supplied to a natural circulation flow in the reactor vessel. Thermal-hydraulic behaviors in the reactor vessel were compared to those without the flywheel equipment. The numerical results showed a good agreement with the design values in a steady state. It was found that the inertia moment contributes to an increase in the circulation flow rate during the first 40 seconds, however to a decrease of it there after. It was also found that the flow stagnant region induced by a core exit overcooling decelerated the flow rate. The appearance of the first-peak temperature was delayed by the flow coastdown during the initial stages after a reactor trip.

• Journal of Energy Engineering
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• v.11 no.1
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• pp.10-17
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• 2002

The objective of performing this study is to develop low emission condensing gas boiler. To reduce NOx and CO, three reasonable distances between burner and heat exchanger were decided through the experiments of model plane burner. Three burners with different diameter were made and then emission characteristics were examined. The optimum burner geometry was determined from flame stability, pollutant emission characteristics and applicability to the practical boiler system. In the domain of equivalence ratio 0.68~0.85, turn-down ratio of the burner designed by this research was extended to a wider range of 5 : 1. Thermal efficiency of the boiler developed by this study reached to 97% (LHV basis) of heating water efficiency at heating load of 20,000 kcal/hr when fueled by both of LNG or LPG. Emission ($O_2$=0%, wet basis) of NOx and CO concentration was 26 ppm and 85 ppm when fueled by LNG, 41 ppm and 113 ppm when fueled by LPG respectively.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.19 no.4
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• pp.1-8
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• 2005

Plasma researches using parallel-plate electrodes are widely used in semiconductor application such as etching and thin film deposition. Therefore, a quantitative understanding and control of plasma behavior are becoming increasingly necessary because their important applications and simulation techniques have been actively carried out in order to solve such problems above. In this paper, we developed a two-dimensional(2D) self-consistent fluid model, because 2D models can deal with real reactor geometries. The fluid model is based on particle continuity equations for taking account of an electrode system in a cylindrical geometry. An pure Ar gas was used at 500[mTorr] and radio-frequency (13.56(MHz)). Four models were simulated under the different electrode geometries which have chamber widths of 5.25, 6.0, 8.0, and 10.0[cm] and we compared their results with each other. Plasma uniformity and a do self-bias voltage were also discussed.

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.17-22
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• 2007

Low-cycle environmental fatigue tests of cast austenitic stainless steel CF8M at the condition of fatigue strain rate 0.04%/sec were conducted at the pressure and temperature, 15MPa, $315^{\circ}C$ of a operating pressurized water reactor. The used test rig was limited to install an extensometer at the gauge length of the cylindrical fatigue specimen inside the small autoclave. So the magnet type LVDT's were used to measure the fatigue displacement at the specimen shoulders inside the high temperature and high pressure water autoclave. However, the displacement and strain measured at the specimen shoulders is different from the one at the gauge length for the geometry and the cyclic strain hardening effect. FEM calculated the displacement and the strain of the gauge length from the data measured at the shoulders. Tensile test properties in elastic and plastic behavior of CF8M material were used in the FEM analysis. A series of low cycle fatigue tests simulating the cyclic strain hardening effect verified that the FEM calculation was well agreed with the simulated tests. The process and method developed in this study would be so useful to produce reliable environmental fatigue curves of CF8M stainless steel in pressurized water reactors.

• Advances in Energy Research
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• v.5 no.2
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• pp.91-105
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• 2017

Thermal hydraulic (TH) analysis of nuclear power reactors is utmost important. In this way, the numerical codes that preparing TH data in reactor core are essential. In this paper, a subchannel analysis of a Russian pressurized water reactor (WWER1000) core with enhanced numerical code is carried out. For this, in fluid domain, the mass, axial and lateral momentum and energy conservation equations for desired control volume are solved, numerically. In the solid domain, the cylindrical heat transfer equation for calculation of radial temperature profile in fuel, gap and clad with finite difference and finite element solvers are considered. The dependence of material properties to fuel burnup with Calza-Bini fuel-gap model is implemented. This model is coupled with Isotope Generation and Depletion Code (ORIGEN2.1). The possibility of central hole consideration in fuel pellet is another advantage of this work. In addition, subchannel to subchannel and subchannel to rod connection data in hexagonal fuel assembly geometry could be prepared, automatically. For a demonstration of code capability, the steady state TH analysis of a the WWER1000 core is compromised with Thermal-hydraulic analysis code (COBRA-EN). By thermal hydraulic parameters averaging Fuel Assembly-to-Fuel Assembly method, the one sixth (symmetry) of the Boushehr Nuclear Power Plant (BNPP) core with regular subchannels are modeled. Comparison between the results of the work and COBRA-EN demonstrates some advantages of the presented code. Using the code the thermal modeling of the fuel rods with considering the fission gas generation would be possible. In addition, this code is compatible with neutronic codes for coupling. This method is faster and more accurate for symmetrical simulation of the core with acceptable results.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.32 no.2
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• pp.177-185
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• 2008

Low-cycle environmental fatigue tests of cast austenitic stainless steel CF8M at the condition of fatigue strain rate 0.04%/sec were conducted at the pressure and temperature, 15MPa, $315^{\circ}C$ of a operating pressurized water reactor (PWR). The used test rig was limited to install an extensometer at the gauge length of the cylindrical fatigue specimen inside a small autoclave. So the magnet type LVDT#s were used to measure the fatigue displacement at the specimen shoulders inside the high temperature and high pressure water autoclave. However, the displacement and strain measured at the specimen shoulders is different from the one at the gauge length for the geometry and the cyclic strain hardening effect. Displacement of the fatigue specimen gauge length calculated by FEM (finite element method) used to modify the measured displacement and fatigue life at the shoulders. A series of low cycle fatigue life tests in air and PWR conditions simulating the cyclic strain hardening effect verified that the FEM modified fatigue life was well agreed with the simulating test results. The process and method developed in this study for the environmental fatigue test inside the small sized autoclave would be so useful to produce reliable environmental fatigue curves of CF8M stainless steel in pressurized water reactors.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.20 no.1
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• pp.88-99
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• 1996

The explicit scheme for finite element analysis of sheet metal forming problems has been widely used for providing practical solutions since it improves the convergency problem, memory size and computational time especially for the case of complicated geometry and large element number. The explicit schemes in general use are based on the elastic-plastic modeling of material requiring large computataion time. In the present work, a basic formulation for rigid-plastic explicit finite element analysis of plain strain sheet metal forming problems has been proposed. The effect of some basic parameters involved in the dynamic analysis has been studied in detail. Thus, the effective ranges of parameters have been proposed for numerical simultion by the rigid-plastic explicit finite element method. A direct trial-and-error method is introduced to treat contact and friction. In computation, sheet material is assumed to possess normal anisotropy and rigid-plastic workhardening characteristics. In order to show the validity and effectiveness of the proposed explicit scheme, computations are carried out for cylindrical punch stretching and the computational results are compared with those by the implicit scheme as well as with a commercial code. The proposed rigid-plastic exlicit finite element method can be used as a robust and efficient computational method for analysis of sheet metal forming.