• International Journal of Precision Engineering and Manufacturing
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• 제7권4호
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• pp.3-7
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• 2006

Confocal scanning microscopy is a measurement technique used to observe micrometer and sub-micrometer features due to its high resolution, nondestructive properties, and 3D surface profiling capabilities. The design, implementation, and performance test of a confocal scanning microscopy system are presented in this paper. A short-wavelength laser (405 nm) and an objective lens with a high numerical aperture (0.95) were used to achieve the desired high resolution, while the x- and y-axis scans were implemented using an acousto-optic deflector and galvanomirror, respectively. An objective lens with a piezo-actuator was used to scan the z-axis. A spatial resolution of less than 138 nm was achieved, along with successful 3D surface reconstructions.

• 대한기계학회논문집B
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• 제31권2호
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• pp.159-166
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• 2007

Mixing between two or more reagents is one of important processes in biochemical microfluidics. In efficient micromixer design, it is essential to analyze flow pattern and evaluate mixing efficiency with good precision. In this work, mixing efficiency for Y-channel micromixer is measured by fluorescence intensity using LIF(Laser Induced Fluorescence) Confocal Microscope. The Y-channel micromixers are fabricated with polydimethylsiloxane(PDMS) and those are bonded to glass plate through Plasma bonding. Nile Blue A is injected into the micromixer as a fluorescence dye for measuring of fluorescence intensity by He/Ne laser. For visualization of the flow pattern, dynamic image capturing is carried out using CAM scope. For the comparison with computer simulation, modified SIMPLE algorithm for incompressible flow equation is solved for the same geometry as in the experiment. Throughout the experiments and computer simulation, accurate mixing efficiency evaluation process for a PDMS Y-channel micromixer is established.

• 반도체디스플레이기술학회지
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• 제7권1호
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• pp.11-16
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• 2008

Confocal scanning microscopy is a widely used technique for three dimensional measurements because it is characterized by high resolution, high SNR and depth discrimination. Generally an image is generated by moving one optical probe that satisfies the confocal condition on the specimen. Measurement speed is limited by movement speed of the optical probe; scanning speed. To improve measurement speed we increase the number of optical probes. Specimen region to scan is divided by optical probes. Multi-point information each optical probe points to can be obtained simultaneously. Therefore image acquisition speed is increased in proportion to the number of optical probes. And multiple optical probes from red, green and blue laser sources can be used for color imaging and image quality, i.e., contrast, is improved by adding color information by this way. To conclude, this technique contributes to the improvement of measurement speed and image quality.

• Restorative Dentistry and Endodontics
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• 제26권1호
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• pp.1-8
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• 2001

Dental Caries which has high prevalence rate, accounts for majority of dental diseases. Many treatment and preventive treatment has been developed, thereby reducing the prevalence rate, but in our country, fluoridization has not spread widely yet, so prevention has not been done satisfactorily. When dental caries progresses, irreversible damage of tooth structure occurs. In initial dental caries, demineralizing tooth structure can be remineralized, so restorative treatment is unnecessary. In this study, 20 teeth restored with composite resin without fluoride release were used and divided into two groups. Incipient dental caries were artificially made and demineralization procedure was done for 1 and 2 weeks, for each group. Changes in mineral contents around the margins were analysed with confocal laser scanning microscope. The results were as follow. 1. Both total fluorescence of the lesion and average fluorescence of the lesion of remineralized samples decreased compared to demineralizing state. (p＜0.01) 2. Confocal laser scanning microscopy can be used in quantitative analysis of mineral change. In result, confocal laser scanning microscopy can be used in quantitative analysis of mineral change and it could be used in many different fields of dentistry in the future.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.576-580
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• 2005

New real-time confocal microscopy using spectral encoding technique and slit confocal aperture is proposed and designed. Spectral encoding technique, which encodes one-dimensional spatial information of a specimen in wavelength, and slit aperture make it possible to obtain two-dimensional lateral image of the specimen simultaneously at standard video rates without expensive scanning units such as polygon mirrors and galvano mirrors. The working principle and the configuration of the system are explained. The variation in axial responses for the simplified model of the system with normalized slit width is numerically analyzed based on the wave optics theory. Slit width that directly affects the depth discrimination of the system is determined by a compromise between axial resolution and signal intensity from the simulation result. On the assumption of the lateral sampling resolution of 50 nm, design variables and governing equations of the system are derived. The system is designed to have the mapping error less than the half pixel size, to be diffraction-limited and to have the maximum illumination efficiency. The designed system has the FOV of $12.8um{\times}9.6um$, the theoretical axial FWHM of 1.1 um and the lateral magnification of-367.8.

• 한국광학회지
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• 제14권3호
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• pp.244-248
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• 2003

공초점 렌즈의 조합으로 사용되는 두 렌즈의 초점거리의 비율에 해당하는 비율 만큼 입사되는 광의 입사각을 줄일 수 있다. 이 결과로 CCD상의 간섭 패턴의 공간 주파수가 낮아진다. 따라서 CCD의 구성 화소들의 간격에 의해 한정되는 기록 가능한 공간 주파수 보다 높은 공간 주파수의 간섭 패턴을 기록할 수 있어 보다 큰 물체의 간섭 패턴을 기록할 수 있다. 또한 이러한 광학계로 기록한 간섭 패턴의 수치적 재생(Numerical Reconstrction) 결과에서는 0-차 회절광의 면적이 초점거리 비율의 역수의 제곱에 해당하는 만큼 축소되는 장점이 있다.

• 제어로봇시스템학회논문지
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• 제21권12호
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• pp.1130-1135
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• 2015

The bond pull test is the most widely used technique for the evaluation and control of wire bond quality. The wire being tested is pulled upward until the wire or bond to the die or substrate breaks. The inspector test strength of wire by manually and it takes around 3 minutes to perform the test. In this paper, we develop a 3D vision system to measure 3D position of wire. It gives 3D position data of wire to move a hook into wires. The 3D measurement method to use here is a confocal imaging system. The conventional confocal imaging system is a spot scanning method which has a high resolution and good illumination efficiency. However, a conventional confocal systems has a disadvantage to perform XY axis scanning in order to achieve 3D data in given FOV (Field of View) through spot scanning. We propose a method to improve a parallel mode confocal system using a micro-lens and pin-hole array to remove XY scan. 2D imaging system can detect 2D location of wire and it can reduce time to measure 3D position of wire. In the experimental results, the proposed system can measure 3D position of wire with reasonable accuracy.

• 지질공학
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• 제14권2호
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• pp.147-168
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• 2004

이 연구는 지하수유동에 영향을 주는 조ㆍ중ㆍ세립질 화강암 불연속면 거칠기의 특성을 비교한 것이다. 공초점 레이저 현미경으로 관찰된 거칠기 데이터는 스펙트럼 분석과 고속푸리에 변환에 의해 해석되었다. 또한 노이지가 제거된 거칠기 데이터에 대하여 거칠기 특성을 정량화하기 위하여 프랙탈 해석에 적용해 보았다. 이를 위해 조ㆍ중ㆍ세립질 화강암 코어를 대상으로 브라질리안 시험으로 인공 단열을 발생시켰다. 측정은 전체 12개의 공시체에서 36개의 조사선에서 실시되었다. 공초점 레이저 현미경을 사용하여 연속적인 거칠기를 이산 데이터로 표현할 수 있으며, 이렇게 하여 얻어진 이산데이터를 바탕으로 고속 푸리에 변환을 실시한 결과 제2 고조파 성분이 가장 큰 값을 보이고 있다. 또한 스펙트럼 에너지 분포는 조립질 공시체에서 0.9853, 중립질 공시체에서 1.0792, 세립질 공시체에서 0.6794의 평균값을 보이고 있으며, 이는 프랙탈 해석에서와 마찬가지로 거칠기가 클수록 저주파수 영역대에서 고조파의 에너지 분포가 높게 나타남을 알 수 있다.

• 한국정보통신학회논문지
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• 제15권12호
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• pp.2697-2704
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• 2011

조직 공학에서는 하이드로 젤 내 3차원 세포 배양 과정에서 세포와 세포간의 공생관계를 관찰하게 되는데, 시간이 경과함에 따라 세포들의 증가나 상호작용, 분화, 사멸되는 과정들을 고배율 공초점 현미경을 이용하여 단층 촬영하고, 촬영된 이미지들로부터 세포의 공생 메커니즘이나 변화 과정을 관찰 및 분석하기 위한 연구가 진행되고 있다. 본 연구에서는 하이드로 젤 내 3차원 세포 배양 과정에서 단층 촬영된 세포 이미지로부터 클러스터 경계선 정보를 추출하기 위한 수준별 잡음 제거 방법과 클러스터 경계선 추출 방법을 제안하였다. 실험을 통해 제안된 방법은 하이드로젤로 인한 좁쌀 모양의 잡음에 뛰어난 잡음 제거 성능을 보여 줄 뿐만 아니라 복잡한 클러스터들에 대해서 도 정확한 클러스터 경계선을 추출함을 보여 주었다.

• 제어로봇시스템학회논문지
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• 제19권11호
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• pp.979-983
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• 2013

The three-dimensional measurement method of confocal systems is a spot scanning method which has a high resolution and good illumination efficiency. However, conventional confocal systems had a weak point in that it has to perform XY axis scanning to achieve FOV (Field of View) vision through spot scanning. There are some methods to improve this problem involving the use of a galvano mirror [1], pin-hole array, etc. Therefore, in this paper we propose a method to improve a parallel mode confocal system using a micro-lens and pin-hole array in a dual microscope configuration. We made an area scan possible by using a combination MLA (Micro Lens Array) and pin-hole array, and used an objective lens to improve the light transmittance and signal-to-noise ratio. Additionally, we made it possible to change the objective lens so that it is possible to select a lens considering the reflection characteristic of the measuring object and proper magnification. We did an experiment using 5X, 2.3X objective lens, and did a calibration of height using a VLSI calibration target.