• 센서학회지
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• 제16권3호
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• pp.174-178
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• 2007

This paper presents a novel, highly sensitive condenser microphone with a flexure hinge diaphragm. We used the finite-element analysis (FEA) to evaluate the mechanical and acoustic performance of the condenser microphone with a hinge diaphragm. And we fabricated the miniature condenser microphones with area of 1.5 mm${\times}$1.5 mm. From the simulation results, we confirmed that the maximum displacements at the center of flexure hinge diaphragms are several hundred times, compared with flat diaphragms. The sensitivities of fabricated miniature microphones are about $12.87{\mu}V/Pa$ at 1 kHz under a low bias voltage of 1 V, and the frequency response is flat upto 13 kHz.

• 센서학회지
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• 제16권1호
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• pp.62-67
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• 2007

This paper presents a novel MEMS condenser microphone with rigid backplate to enhance acoustic characteristics. The MEMS condenser microphone consists of membrane and backplate chips which are bonded together by gold-tin (Au/Sn) eutectic solder bonding. The membrane chip has 2.5 mm${\times}$2.5 mm, $0.5{\mu}m$ thick low stress silicon nitride membrane, 2 mm${\times}$2 mm Au/Ni/Cr membrane electrode, and $3{\mu}m$ thick Au/Sn layer. The backplate chip has 2 mm${\times}$2 mm, $150{\mu}m$ thick single crystal silicon rigid backplate, 1.8 mm${\times}$1.8 mm backplate electrode, and air gap, which is fabricated by bulk micromachining and silicon deep reactive ion etching. Slots and $50-60{\mu}m$ radius circular acoustic holes to reduce air damping are also formed in the backplate chip. The fabricated microphone sensitivity is $39.8{\mu}V/Pa$ (-88 dB re. 1 V/Pa) at 1 kHz and 28 V polarization voltage. The microphone shows flat frequency response within 1 dB between 20 Hz and 5 kHz.

• 한국소음진동공학회논문집
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• 제16권12호
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• pp.1272-1278
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• 2006

This paper presents a novel MEMS condenser microphone with rigid backplate to enhance acoustic characteristics. The MEMS condenser microphone consists of membrane and backplate chips which are bonded together by gold-tin(Au/Sn) eutectic solder bonding. The membrane chip has $2.5mm{\times}2.5mm$, 0.5${\mu}m$ thick low stress silicon nitride membrane, $2mm{\times}2mm$ Au/Ni/Cr membrane electrode, and 3${\mu}m$ thick Au/Sn layer. The backplate chip has $2mm{\times}2mm$, 150${\mu}m$ thick single crystal silicon rigid backplate, $1.8mm{\times}1.8mm$ backplate electrode, and air gap, which is fabricated by bulk micromachining and silicon deep reactive ion etching. Slots and $50{\sim}60{\mu}m$ radius circular acoustic holes to reduce air damping are also formed in the backplate chip. The fabricated microphone sensitivity is 39.8 ${\mu}V/Pa$(-88 dB re. 1 V/Pa) at 1 kHz and 28 V polarization voltage. The microphone shows flat frequency response within 1 dB between 20 Hz and 5 kHz.

• 오토저널
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• 제11권2호
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• pp.18-23
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• 1989

본 기고에서는 필자의 경험을 바탕으로 콘덴서 마이크로폰(condenser microphone)을 압력측정 프로우브에 직접 연결하여 압력변동성분을 측정하는 방법을 소개하고, 이 방법의 적용예와 문제점을 검토하고자 한다.

• 한국음향학회지
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• 제8권5호
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• pp.23-32
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• 1989

표준 컨덴서 마이크로폰의 정밀 교정은 가역원리를 이용한 가역교정에 의해 이루어진다. 본 연구에서는 가역교정 중에서도 결합기를 이용하는 음압교정(pressure calibration)을 수행하여 세 개의 1인치 컨덴서 마이크로폰의 음압감도를 결정하였다. 마이크로본의 음압감도를 정밀하게 결정하기 위해서는 전압이나 결합기의 치수를 정밀하게 측정하여야 하며 결합기의 구조상 발생하는 제반 현상들에 대한 보정을 정확하게 해 주어야 한다. 이와같은 사항들을 정화하게 고려할 경우 가역교정에 의한 교정정밀도는 저주파와 중간 주파수 영역에서 0.05dB이며 10kHz 이상에서는 0.ldB가 된다.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2010년도 춘계학술대회 논문집
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• pp.760-761
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• 2010

As is widely known, SPL measurement using sound level meter (SLM) is limited to higher than 30 dBA, because of the self-noise n(x) of condenser microphone (CM). The authors confirmed n(x) is composed of 3 kinds, each of which is stable enough under the condition -20 ~ +50 deg C to eliminate the influence of n(x) by subtracting its energy from the squared input signal in the integration process, as well as to develop new type of SLM with ultra-low SPL measuring function. This is so-called "0-dB SLM" since it enables to measure SPL down to around 0 dB-SPL. The RMS of n(x) is acquired and stored in ROM in advance, by placing CM in the supersilent space or by using dummy microphone with equivalent capacitance before the actual measurements.

• 한국음향학회지
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• 제4권1호
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• pp.35-42
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• 1985

This paper suggests a method on the use of very long linear array microphone in order to obtain clear loud sound reinforcement system without howling. According to the results of the theoretical investigation, we have made that a linear array microphone. This is made of one hundred small condenser microphone having 2 cm of spatical period. To estimate the effect of sound reinforcement system physically and subjectively, four cases have been experimented : In case of using no sound reinforcement, nondirectivity microphone, rectangular window and Hnning window in linear array microphone. The experimental results prove that the case of Hnning window in linear array microphone is more excellent.

• Transactions on Electrical and Electronic Materials
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• 제9권3호
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• pp.128-133
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• 2008

In this paper, in order to analyze property of frequency response in microphone using optical sensor, acousto-optic sensor system has been implemented. The capacitance microphone and fiber-optic transmission path type fiber-optic microphone (FOM) have weaknesses in directivity, size, weight, and price. However suggested optical microphone can be constituted by cheap devices, so it has many benefits like small size, light weight, high directivity, etc. Head part of optical microphone which is suggested in this paper is movable back and forth by sound pressure with the attached reflection plate. Operating point has also been determined by measuring the response characteristics. The choosing the point, which has maximum linearity and sensitivity has changing the distance between optical head and vibrating plate. We measured the output of the O/E transformed signal of the optical microphone while frequency of sound signal is changed using sound measurement /analysis program, "Smaart Live" and "USBPre", which are based on PC, and compared the result from an existing capacitance microphone. The measured optical microphone showed almost similar output characteristics as those of the compared condenser microphone, and its bandwidth performance was about 4 kHz at up to 3 dB.

• 한국콘텐츠학회논문지
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• 제8권6호
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• pp.8-15
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• 2008

본 논문에서는 광 마이크로폰의 주파수 응답특성 분석을 위해 시스템을 제안하고 구현하였다. 현재 사용되어지고 있는 캐패시턴스 마이크로폰과 광섬유 전송로형 광 마이크로폰(FOM)은 낮은 지향성과 크기, 무게, 비싼 가격 등에서 단점을 나타내고 있다. 반면 제안된 광 마이크로폰은 저가의 소자로 구성할 수 있으며, 소형, 경량화, 높은 지향성 등의 장점을 갖는다. 본 논문에서 제안하는 광 마이크로폰의 헤드 부는 인가된 음압에 따라서 전후로 움직이게 되어있으며, 반사판이 부착되어 있는 형태로 구성되어 있다. 광 헤드와 진동판사이의 거리를 변화시켜가며 응답특성을 측정하여 선형성과 민감도가 최대인 지점을 동작 점으로 결정하였다. 컴퓨터 기반 음향 측정/분석 프로그램인 Smaart Live와 USBPre를 사용하여 음향 신호의 주파수를 변화시켜 가며 구현한 광 마이크로폰의 광전 변환된 신호의 출력을 측정하였으며, 기존의 캐패시턴스 마이크로폰과 비교 분석하였다. 측정된 광 마이크로폰은 비교 콘덴서 마이크로폰과 거의 동일한 출력 특성을 나타내었으며, 주파수 대역폭은 약 ${\pm}3$[dB] 이내에서 300[Hz]-3[kHz] 정도의 성능을 나타내었다.

• 대한의용생체공학회:의공학회지
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• 제26권3호
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• pp.139-144
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• 2005

An implantable microphone that can be utilized as part of a totally implantable hearing aid is designed and implemented. The proposed microphone is implanted in the center of the pinna, and designed to ensure the speech frequency range and the appropriate sensitivity. The characteristics of the proposed microphone are evaluated using a finite element analysis (FEA). The microphone is composed of a small electric condenser microphone, titanium case 6.2mm in diameter and 3mm high, and $10{\mu}m$ SUS316L vibrating membrane in contact with hypodermic tissue to maintain the sensitivity of the microphone. The microphone components are all made of biocompatible materials, then the assembled microphone is hermetically sealed using a polymer and ceramic. Experiments with the fabricated microphone confirm an operational bandwidth of up to 5kHz without any decline of sensitivity in 6mm of hypodermic tissue.