• 대한전기학회:학술대회논문집
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• 대한전기학회 2003년도 추계학술대회 논문집 전기물성,응용부문
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• pp.306-308
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• 2003

본 논문은 variable optical attenuator(VOA)에 응용하기 위한 comb actuator를 설정하기 위해, 요구되는 조건에 가장 적합한 comb actuator를 설계하기 위한 방법을 제시한다. VOA 응용을 위한 comb actuator 설계에서 고려되어야 하는 조건들은 comb actuator의 performance(변위, 공진 주파수), 구동 전압 그리고 공정의 한계(최소 선폭, 최소 간격, 두께) 등이다. 이러한 조건들이 정해지면, 이 조건들을 comb actuator의 구동력과 지지빔 스프링에 의한 복원력에 대입하여 두 힘이 평형일 때의 조건으로부터 comb finger의 수와 구동부의 질량 및 지지빔의 길이 등의 선계 변수들을 정할 수 있다. 그리고 comb actuator의 질량으로 부터 구동부의 면적을 구할 수 있고, 이러한 조건에서 구한 지지빔의 면적과 비교하여 적절한 구동부의 면적을 설정한다. 이상의 내용을 조합해서 요구된 조건이 comb actuator 설계에 적합한지의 여부를 확인했고, VOA 응용을 위한 요구 조건에 맞는 comb actuator 설계를 했다.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제49권2호
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• pp.132-139
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• 2000

This paper reports a novel micromachining process based on UV-LIGA process and (110) silicon anisotropic etching for fabrication of a high-aspect-ratio comb actuator. The comb electrodes are fabricated by (110) SILICON comb structure considering the etch-rate-ratio between (110) and (111) planes and lateral etch rate of a beam-type structure. The fabricated structure was$ 400\mum \; thick\; and\; 18\mum$ wide comb electrodes separated by $7\mim$ so that the height-gap ratio was about 57. Also considering resonant frequency of the comb actuator and the frequency-matching between sensing and driving mode for gyroscope application, we designed the number, width, height and length of the spring structures. Electroplated gold springs on both sides of the seismic mass were $15\mum\; wide,\; 14\mum\; thick\; and \; 500\mum$ long. The fabricated comb actuator had resonant frequency ay 1430Hz, which was calculated to be 1441Hz. The proposed fabrication process can be applicable to the fabrication of a high-aspect-ratio comb actuator for a large displacement actuator and precision sensors. Moreover, this combined process enables to fabricate a more complex structure which cannot be fabricate only by surface or bulk micromachining.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.848-853
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• 2001

Electrostatic actuation was adopted for ease of fabrication. We proposed a new driving scheme that uses the vector sum of force generated by comb-finger and by parallel plate. The moving and fixed electrodes are arranged to maximize the driving force. In this paper, an electrostatic field analysis is performed by Maxwell analysis tool for micro actuators. From the analysis, a comb-parallel type micro-actuator with 4${\mu}{\textrm}{m}$ width, 6${\mu}{\textrm}{m}$ overlap and 45${\mu}{\textrm}{m}$ height could be designed. In order to compare the new type of actuator with the conventional comb type of actuator, we arranged that both types have the same area and the same number of actuators. To make a high aspect ratio structure, we are developing fabrication process using SU-8 and electro-plating.

• KIEE International Transactions on Electrophysics and Applications
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• 제5C권6호
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• pp.264-269
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• 2005

The electrostatic comb drive actuator is one of the main building blocks in the field of micro electro-mechanical systems (MEMS). Most of the comb actuators presented previously have fingers that are rectangular in shape which produce a stable, constant force output during actuation. The use of sawtooth fixed fingers in a comb drive, which were presumed to produce an increasing force output with displacement due to the increased number of regions where fringing force, the driving force of comb actuators, appear. The dimensions of the sawtooth were derived from finite element analysis (FEA) of simplified finger models with sawtooth type fingers of various dimension and were compared to the rectangular finger model that showed that the sawtooth type fingers have $7\~9$ times stronger driving force. Finally, comb drive actuators with sawtooth type and rectangular fingers were fabricated and although the gap was bigger, the comb actuator with sawtooth type fingers showed about 1.7 times greater electrostatic force than the one with rectangular fingers at equal driving voltages. In conclusion, using the proposed sawtooth type comb fingers in a comb drive makes it possible to increase its displacement or reduce the driving voltage.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1996년도 하계학술대회 논문집 C
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• pp.1974-1976
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• 1996

An electrostatically driven comb actuator with $525{\mu}m$ height was fabricated using (110) Si anisotropic etching in the Potassium Hydroxide(KOH) solution. The etch-rate and etch-rate ratio are strongly dependent on the weight % and temperature of KOH solution. We developed the optimal condition for the anisotropic etching on (110) wafer with varying these conditions. The force that the comb-drive actuator generates is inversely proportional to the distance of gap and proportional to the height of the comb electrodes. The electrodes must have the high aspect ratio. The (110) Si anisotropic etching is very useful to get a high aspect ratio structure.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 하계학술대회 논문집 G
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• pp.2515-2517
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• 1998

The micro fresnel lens(MFL) was modeled and fabricated on a XY-stage electrostatically driven by comb actuator. The modeled MFL was approximated as a step shape with 4-phase and 4-zone plate. The focal length and diameter of the MFL is 20mm and 912${\mu}m$, respectively. The XY-stage suspending the MFL is designed to generate a large static displacement up to about 20${\mu}m$. On SOI substrates, we first fabricated MFL using the RIE(reactive Ion etching) technology and then patterned and etched bulk silicon to make XY-stage. After the fabrication of all structures on top side of the SOI substrates. $Si_3N_4$ was deposited for passivation of all structures using PECVD(plasma enhanced chemical vapor deposition). All the MFL systems width comb drive actuator were released by KOH etching from the bottom side of the SOI wafer using double-sided alignment technique. In fabrication of MFL, a dry etching conditions is established in order to improve surface roughness and to control the etched depth.

• 정보저장시스템학회논문집
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• 제10권1호
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• pp.23-26
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• 2014

In this paper, we present a novel approach for tuning the resonant frequency of torsionally driven vertical comb actuators. The tuning unit composed of thermal actuator, scissor mechanism and V-shape shaft enables continuous and reversible resonant frequency tuning. The proposed method is based on the stiffness alteration of the V-shape shaft. It is experimentally verified that the resonant frequency of the torsional microscanner is shifted up to 1.59 kHz from 1.51 kHz showing the maximum tuning ratio of 5.29%.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 춘계학술대회 논문집
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• pp.591-592
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• 2008

• 센서학회지
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• 제8권5호
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• pp.368-376
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• 1999

본 논문에서는 머리빗형 액튜에이터의 제작 공정 중에서 RIE 식각 공정시 발생하는 식각의 비등방도의 변화에 의해서 머리빗형 액튜에이터의 스프링 상수, 공진 주파수, 정전 구동력 과리고 진동자 변위 등에서 발생하는 동작 특성이 설계 값으로부터 변화되는 것을 예측하였다. 이를 위해 $6\;{\mu}m$ 두께의 폴리실리콘에 대한 RIE 식각 실험을 수행하여 RF power, $Cl_2$ 유량 그리고 챔버내 압력에 따른 비등방도를 측정하였다. 실험 결과에서 RF Power, $Cl_2$ 유량, 그리고 챔버내 압력이 증가할수록 비등방도 감소하였다. 이러한 비등방도 감소에 따른 머리빗형 구조물의 동작 특성을 세 가지 다른 지지빔의 경우에 대해 예측하였는데 세 가지는 fixed-fixed, crab-leg, 그리고 double crab-leg 구조이다. 비등방도가 감소함에 따라 즉, 지지빔의 단면이 직사각형이 아니고 사다리꼴이 되면서, 머리빗형 액튜에이더의 스프링 상수, 공진 주파수, 그리고 정전 구동력은 감소하였지만 질량체의 변위는 증가하였다. 그리고 세 가지 구조물 중에서 double crab-leg 지지빔을 갖는 머리빗형 액튜에이터의 특성이 비등방도에 의해 가장 큰 영향을 받는 것으로 나타났다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 G
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• pp.3322-3324
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• 1999

This paper studies on the design and fabrication of a micro in-plane positioning actuator integrated with a microlens. Proposed in-plane actuator is a micro XY-stage which is composed of two linear comb drive actuators being orthogonal to each other. In the fabrication of actuator, the single crystalline silicon substrate anodically bonded with a #7740 glass substrate is used because of simple release and passivation. The structure of actuator is formed on the silicon facet of bonded fixture by chlorine-based deep RIE and then released by isotropic wet etching of glass (#7740) in hydrofluoric acid solution. Fabricated actuator has a large travel range up to $30({\pm}15){\mu}m$ and high resolution less than 0.01f1l1l in each direction. Experimented resonant frequency of this actuator is 630Hz. The micro-Fresnel lens is fabricated on the square-shape glass structure prepared in the center of actuator.