• 한국재료학회지
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• 제14권11호
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• pp.821-827
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• 2004

Titanium oxide thin films were prepared on Si(100) substrates by R.F. magnetron reactive sputtering at $30\sim200watt$ R.F power range, and annealed at $600^{\circ}C\sim800^{\circ}C$ for 1 hour. The properties of $TiO_2$ thin films were analyzed using x-ray, ${\alpha}-step$, ellipsometer, scanning electron microscopy, and FT-IR spectrometer. Upon in-situ depositions, the initial phase of $TiO_2$ thin film showed non-crystalline phase at R.F. power $30\sim100$ watt. The crosssection of $TiO_2$ thin films were sbserved to be the columnar structure. With the increasing R.F power and annealing temperature, the grain size, crystallinity, refractive index, and void size of titanium oxides showed a tended to increase. The FT-IR transmittance spectra of titanium oxide thin films have the obsorption band of Ti-O bond, Si-O bond, Si-O-Ti bond and O-H bond. With the increase of R.F. power and annealing temperature, these films have the stronger bond structures. It is considered that such a phenomena is due to phase transition and good crystallinity

• 한국전기전자재료학회논문지
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• 제26권2호
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• pp.109-113
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• 2013

ZnO thin films were synthesized on Si substrates by MOCVD using diethyl zinc as a precursor. Effects of $O_2$/DEZ gas mixing ratio on the growth rate, surface morphology, preferred orientation, and electrical properties of the ZnO thin films were investigated with SEM, XRD, and Hall measurement. The surface reflectance variations of ZnO thin films were analyzed using laser-photometer apparatus. As the $O_2$/DEZ mixing ratio increased, growth rate and $I_{(002)}/I_{(101)}$ in XRD of ZnO thin films decreased, and the crystal structure was changed from columnar to planar structure. All ZnO films deposited at various CVD conditions exhibited c-axis (002) plane preferred orientation. The electrical properties of ZnO thin films mainly depended on the carrier mobility.

• 열처리공학회지
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• 제9권1호
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• pp.19-26
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• 1996

Melt-quenching of steels leads to various metallographic effects such as refinement of grain size, extension of the solid solubility of carbon and alloying elements, and is expected to improve the mechanical properties of conventional steels. Furthermore, this technique is a useful method for producing sheet directly from liquid state. And it will lend itself to development as a continuous cast process which offers significant savings in energy and product costs. The purpose of this study is to present the microstructures of melt-quenched austenitic stainless steels. As the results of this study, the morphology of melt-quenched microstructure show that the roll contact area is columnar structure, and the free surface area is dendrite structure. As the line speed increases, the ratio of $d_{colunnar}/d_{total}$ increases from 0.12 to 0.60, but the ribbon thickness decreases from $150{\mu}m$ to $30{\mu}m$.

• 한국표면공학회지
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• 제40권6호
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• pp.258-261
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• 2007

Relationships between the electrical resistivity and the growth characteristic of $SnO_2$ thin films were investigated. $SnO_2$ thin films with thickness from 64 nm to 91 nm were made by controlling the RF deposition energy from 80 to 150 W. These $SnO_2$ thin films were annealed at $200^{\circ}C{\sim}700^{\circ}C$ temperature range of $100^{\circ}C$ interval in the $O_2$ gas condition. After annealing treatments, the microstructures of the $SnO_2$ thin films were changed mixed structure(amorphous & crystalline) to lamina columnar crystalline structure. Both the film thickness and the grain size were increased with increasing the local crystallization of $SnO_2$ microstructure of thin films by annealing treatment. Their electrical resistivity increased up to the annealing temperature of $400^{\circ}C$, and then slowly decreased.

• 반도체디스플레이기술학회지
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• 제7권1호
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• pp.29-34
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• 2008

In this paper, the DE(double erosion) cathode for the reactive magnetron sputtering system is developed for high deposition rate and high target utilization efficiency. The utilization efficiency of the developed DE cathode is 22% higher than that of normal SE(single erosion) cathode. Sputtering process for the nickel oxide thin films with the DE cathode is performed under the following conditions; power with $1kW{\sim}3kW$, pressure with 4mtorr and 8mtorr, oxygen flow ratio with $0%{\sim}80%$. As a result, the hysteresis phenomenon of discharge voltage in 4mtorr is lower than that in 8mtorr and the hysteresis phenomenon of discharge voltage is getting lower as the applied power is getting higher. The structure of cross section and surface roughness of the thin films are observed by FE-SEM and AFM. The structure of cross section of the thin films is columnar and the average surface roughness under oxygen flow ratio of 0%, 52.5% and 65.0% are $2.08{\AA}$, $2.20{\AA}$ and $0.854{\AA}$, respectively.

• Animal cells and systems
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• 제6권4호
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• pp.327-333
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• 2002

Among the silk glands in the black widow spider Latrodectus mactans, the ampullate one is the most predominant gland in both sexes, and is com-posed of three functional parts - excretory duct, storage ampulla and convoluted tail regions. This experiment was performed using mechanical pulling stimulation with electric motor equipment to reveal a correlation between silk usage and silk producing system in this poisonous spider. The mature secretory products in glandular epithelium are closely packed and appear as electron-opaque spherical vesicles. A part of the vesicles with fine fibrillar paracrystalline texture seems to store some proteins which will function at the time of final assembly into fibrils. Most of the secretory silk products which originated from the rough endoplasmic reticula of the glandular epithelial cells are grown by fusion with surrounding small vesi-cles. However, the Golgi complex does not seem to play an important role in this process of secretion. According to progressive maturation of secre-tory silk product, these granules are progressively filled with a fine fibrillar material, and thus appear much more electron-dense than those of earlier states. When the secretory product is extruded from the glandular cavity, the epithelium is rapidly changed to a thinner layer of tall columnar cells with less definitive cell membranes. After extruding there ave a few secre-tory droplets within these cells, thus causing this region to stain much lighter.

• 한국재료학회지
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• 제10권4호
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• pp.276-281
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• 2000

Si(111) 표면을 NH$_3$분위기에서 실리콘질화물(SiNx)로 변형시킨 후 탄화규소(silicon carbide, SiC) 박막을 성장하였다. 질화시간이 증가함에 따라 SiC 박막 두께가 감소함을 관찰하였다. 또한 성장변수에 따라 SiC/Si 계면에서 결정결함인 틈새를 없앨 수 있었다. 100nm, 300nm, 500nm의 SiNx/Si 기판 위에 SiC 박막을 성장시켰다. 성장된 SiC 박막들은 모두 [111]면을 따라 성장되었고, SiC 결정들이 원주형 낟알로 성장되었다. SiC/SiNx 계면에서 void를 관찰할 수 없었다. 이러한 실험 결과는 SOI 구조의 산화규소를 SiNx로 대체함으로써 SiC 소자 제작에 응용될 수 있는 방향을 제시하고 있다.

• 한국세라믹학회지
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• 제39권4호
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• pp.341-345
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• 2002

The effect of the Pt electrode and the $Pt-IrO_2$ hybrid electrode on the performance of ferroelectric device was investigated. The modified Pt thin films with non-columnar structure significantly reduced the oxidation of TiN diffusion barrier layer, which rendered it possible to incorporate the simple stacked structure of Pt/TiN/poly-Si plug. When a $Pt-IrO_2$ hybrid electrode is applied, PZT thin film properties are influenced by the thickness and the partial coverage of the electrode layers. The optimized $Pt-IrO_2$ hybrid electrode significantly enhanced the fatigue properties with minimal leakage current.

• 한국자기학회지
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• 제4권1호
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• pp.32-38
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• 1994

조성변조 Co/Pt 다층박막의 자기적 성질 및 자기광학적 성질에 박막제조시 스퍼터링 Ar 가스 압력이 끼치는 영향을 조사하였다. 다층박막을 dc-magnetron 스퍼터링 방법으로 Ar 가스의 압 력을 2에서 30 mTorr 까지 변화시켜 가면서 제조한 후 주사 전자 현미경과 x-ray 회절실험을 이용한 미세구조의 분석과 보자력, 포화 자화량, Kerr 회전각, 반사도등의 자기 및 자기광학적 특성을 조사 하였다. Ar 가스의 압력이 10 mTorr 이하에서는 주상구조(colummar structure)가 형성되지 않다가 20 mTorr 부터 급격히 증가함이 관찰되었고, 이는 초격자 박막의 미세구조의 변화에 기인한다고 사 려된다. 또, 포화 자화량과 Kerr 회전각, 반사율등의 변화를 Ar 가스 압력의 변화에 따른 박막의 미 세구조와 연관지어서 설명하였다.

• 대한기계학회논문집A
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• 제40권8호
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• pp.721-724
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• 2016

실제 사용되는 기계 구조물의 수명 예측은 공정산포, 미래의 하중조건, 손상 모델의 불완전성 등으로 인하여 실험실에서 얻은 결과와 차이를 보일 수 밖에 없다. 본 연구에서는 이러한 불확실성이 내포된 기계 구조물의 피로파괴를 사전에 예지하기 위해 이중센서를 개발하고, 상온에서 단축 피로 하중을 받는 구조물에 적용하여 실증하였다. 이중 센서는 피로하중을 받는 대상 구조물보다 약간 더 큰 응력이 인가되도록 고안된 감지 구조물에 변형률 게이지를 부착한 형태이며, 균열이 센서자체에 먼저 발생함으로써 피로파괴를 예지하며, 쌍으로 제작된 감지부의 변형률 차를 이용하여 변동하중 하에서도 정상상태와 고장상태를 구분이 가능하다.