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http://dx.doi.org/10.4191/KCERS.2002.39.4.341

Effects of Heterostructure Electrodes on the Reliability of Ferroelectric PZT Thin Films  

Kim, Seung-Hyun (INOSTEK Inc., Research and Development Center)
Woo, Hyun-Jung (INOSTEK Inc., Research and Development Center)
Koo, Chang-Young (INOSTEK Inc., Research and Development Center)
Yang, Jeong-Seung (INOSTEK Inc., Research and Development Center)
Ha, Su-Min (INOSTEK Inc., Research and Development Center)
Park, Dong-Yeon (INOSTEK Inc., Research and Development Center)
Lee, Dong-Su (INOSTEK Inc., Research and Development Center)
Ha, Jo-Woong (INOSTEK Inc., Research and Development Center)
Publication Information
Journal of the Korean Ceramic Society / v.39, no.4, 2002 , pp. 341-345 More about this Journal
Abstract
The effect of the Pt electrode and the $Pt-IrO_2$ hybrid electrode on the performance of ferroelectric device was investigated. The modified Pt thin films with non-columnar structure significantly reduced the oxidation of TiN diffusion barrier layer, which rendered it possible to incorporate the simple stacked structure of Pt/TiN/poly-Si plug. When a $Pt-IrO_2$ hybrid electrode is applied, PZT thin film properties are influenced by the thickness and the partial coverage of the electrode layers. The optimized $Pt-IrO_2$ hybrid electrode significantly enhanced the fatigue properties with minimal leakage current.
Keywords
Pt; TiN; Pt-IrO$_2$ hybrid electrode; Fatigue; PZT;
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