• Title/Summary/Keyword: colloidal Nano-Silica

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Synthesis of Sludge Waste-derived Semiconductor Grade Uniform Colloidal Silica Nanoparticles and Their CMP Application (슬러지 폐기물을 활용한 반도체급 균일한 콜로이달 실리카 나노입자의 제조 및 CMP 응용)

  • Kim, Dong Hyun;Kim, Jiwon;Jekal, Suk;Kim, Min Jeong;Kim, Ha-Yeong;Kim, Min Sang;Kim, Sang-Chun;Park, Seon-Young;Yoon, Chang-Min
    • Journal of the Korea Organic Resources Recycling Association
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    • v.30 no.3
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    • pp.5-12
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    • 2022
  • This study suggests the effective recycling method of sludge waste from various industrial fields to synthesize uniform colloidal silica nanoparticles. In detail, polymers are removed from the sludge waste to attain sludge-extracted silica (s-SiO2) micron-sized particles, and ammonia assisted sonication is applied to s-SiO2, which has effectively extracted the silanol precursor. The nano-sized silica (n-SiO2) particles are successfully synthesized by a typical sol-gel method using silanol precursor. Also, the yield amounts of n-SiO2 are determined by the function of s-SiO2 etching time. Finally, n-SiO2-based slurry is synthesized for the practical CMP application. As a result, rough-surfaced semiconductor chip is successfully polished by the n-SiO2-based slurry to exhibit the mirror-like clean surface. In this regard, sludge wastes are successfully prepared as valuable semicondutor grade materials.

Fabrication of Hollow Micro-particles with Nonspherical Shapes by Surface Sol-gel Reaction (표면 솔-젤 반응을 활용한 마이크로미터 크기의 비구형상 공동 입자의 제조)

  • Cho, Young-Sang;Jeon, Seog-Jin;Yi, Gi-Ra
    • Korean Chemical Engineering Research
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    • v.45 no.6
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    • pp.611-618
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    • 2007
  • We demonstrate the sol-gel coating technique of colloidal clusters for producing hollow micro-particles with complex morphologies. Cross-linked amidine polystyrene (PS) microspheres were synthesized by emulsifier-free emulsion copolymerization of styrene and divinylbenzene. The amidine PS particles were self-organized inside toluene-in-water emulsion droplets to produce large quantities of colloidally stable clusters. These clusters were coated with thin silica shell by sol-gel reaction of tetraethylorthosilicate (TEOS) and ammonia, and the organic polystyrene cores were removed by calcination at high temperature to generate nonspherical hollow micro-particles with complex morphologies. This process can be used to prepare hollow particles with shapes such as doublets, tetrahedra, icosahedra, and others.

Synthesis of Gd2O3 : (Li, Eu) Films using Phosphor Powders Coated with SiO2 Nano Particles (SiO2 나노 입자로 코팅된 형광체 분말을 이용한 Gd2O3 : (Li, Eu) 필름 제조)

  • Park, Jung-Chul
    • Journal of the Korean Chemical Society
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    • v.47 no.6
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    • pp.619-624
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    • 2003
  • The $Gd_{1.9-x}Li_{0.1}Eu_xO_3$ (x=0.02, 0.05, 0.08, and 0.12) powders (${\thickapprox}1{\mu}m$) synthesized by sol-gel method, whose surfaces are modified in a colloidal silica suspension (size of $SiO_2$ particles: ${\sim}30$ nm), have been fabricated to highly stable and effective luminescent films on the glass substrates. Thanks to the fused $SiO_2$ nano particles in the vicinity of the glass softening temperature (at around $700^{\circ}C$), $Gd_{1.9-x}Li_{0.1}Eu_xO_3$ powders are strongly attached onto the surface of glass substrate (>9H, pencil hardness tester). This simple and low-cost method to get $Gd_{1.9-x}Li_{0.1}Eu_xO_3$ phosphor films without any loss of luminescence brightness would promise for applications to display devices.

Coloration and Chemical Stability of SiO2 and SnO2 Coated Blue CoAl2O4 Pigment (SiO2, SnO2 코팅된 청색 CoAl2O4 안료의 색상, 물성 평가 연구)

  • Yun, JiYeon;Yu, Ri;Pee, Jae-Hwan;Kim, YooJin
    • Journal of Powder Materials
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    • v.21 no.5
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    • pp.377-381
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    • 2014
  • This work describes the coloration, chemical stability of $SiO_2$ and $SnO_2$-coated blue $CoAl_2O_4$ pigment. The $CoAl_2O_4$, raw materials, were synthesized by a co-precipitation method and coated with silica ($SiO_2$) and tin oxide ($SnO_2$) using sol-gel method, respectively. To study phase and coloration of $CoAl_2O_4$, we prepared nano sized $CoAl_2O_4$ pigments which were coated $SiO_2$ and $SnO_2$ using tetraethylorthosilicate, $Na_2SiO_3$ and $Na_2SiO_3$ as a coating material. To determine the stability of the coated samples and their colloidal solutions under acidic and basic conditions, colloidal nanoparticle solutions with various pH values were prepared and monitored over time. Blue $CoAl_2O_4$ solutions were tuned yellow color under all acidic/basic conditions. On the other hand, the chemical stability of $SiO_2$ and $SnO_2$-coated $CoAl_2O_4$ solution were improved when all samples pH values, respectively. Phase stability under acidic/basic condition of the core-shell type $CoAl_2O_4$ powders were characterized by transmission electron microscope, X-ray diffraction, CIE $L^*a^*b^*$ color parameter measurements.

Zn2SiO4:Mn Phsophor Particles Prepared by Flame Spray Pyrolysis (화염분무열분해 공정에 의해 합성되어진 Zn2SiO4:Mn 형광체)

  • Kang Y. C.;Sohn J. R.;Jung K. Y.
    • Korean Journal of Materials Research
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    • v.14 no.8
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    • pp.600-606
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    • 2004
  • $Zn_{2}SiO_{4}:Mn$ phosphor particles were prepared by a flame spray pyrolysis method. It has been generally known that the high-temperature flame enables fast drying and decomposition of droplets. In the present investigation, the morphology and luminescent property of $Zn_{2}SiO_{4}:Mn$ phosphor were controlled in a severe flame preparation condition. The particle formation in the flame spray pyrolysis process was achieved by the droplet-to-particle conversion without any evaporation of precursors, which made it possible to obtain spherical $Zn_{2}SiO_{4}:Mn$ particles of a pure phase from a droplet. Using colloidal solutions wherein dispersed nano-sized silica particles were adopted as a silicon precursor. $Zn_{2}SiO_{4}:Mn$ particles with spherical shape and filled morphology were prepared and the spherical morphology was maintained even after the high-temperature heat treatment, which is necessary to increase the photoluminescence intensity. The $Zn_{2}SiO_{4}:Mn$ particles with spherical shape, which were prepared by the flame spray pyrolysis and posttreated at $1150^{\circ}C$, showed good luminescent characteristics under vacuum ultraviolet (VUV) excitation.

On the Relationship between Material Removal and Interfacial Properties at Particulate Abrasive Machining Process (연마가공에서의 접촉계면 특성과 재료제거율간의 관계에 대한 연구)

  • Sung, In-Ha
    • Tribology and Lubricants
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    • v.25 no.6
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    • pp.404-408
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    • 2009
  • In this paper, the relationship between the material removal rate and the interfacial mechanical properties at particle-surface contact situation, which can be seen in an abrasive machining process using micro/nano-sized particles, was discussed. Friction and stiffnesses were measured experimentally on an atomic force microscope (AFM) by using colloidal probes which have a silica colloid particle in place of tip to simulate a particle-flat surface contact in an abrasive machining process. From the experimental investigation and theoretical contact analysis, the interfacial contact properties such as lateral stiffness of contact, friction, the material removal rate were presented with respect to some of material surfaces and the relationship between the properties as well.