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http://dx.doi.org/10.9725/kstle.2009.25.6.404

On the Relationship between Material Removal and Interfacial Properties at Particulate Abrasive Machining Process  

Sung, In-Ha (Dept. of Mechanical Engineering, Hannam University)
Publication Information
Tribology and Lubricants / v.25, no.6, 2009 , pp. 404-408 More about this Journal
Abstract
In this paper, the relationship between the material removal rate and the interfacial mechanical properties at particle-surface contact situation, which can be seen in an abrasive machining process using micro/nano-sized particles, was discussed. Friction and stiffnesses were measured experimentally on an atomic force microscope (AFM) by using colloidal probes which have a silica colloid particle in place of tip to simulate a particle-flat surface contact in an abrasive machining process. From the experimental investigation and theoretical contact analysis, the interfacial contact properties such as lateral stiffness of contact, friction, the material removal rate were presented with respect to some of material surfaces and the relationship between the properties as well.
Keywords
abrasive particle; chemical mechan ical polishing(CMP); contactstiffness; material removal rate(MRR); tribology;
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