• 제목/요약/키워드: cleaning-in-place

검색결과 64건 처리시간 0.026초

초고속 미세 액적 충돌을 이용한 나노미터 크기 입자상 오염물질의 세정에 대한 CFD 시뮬레이션 (CFD simulation of cleaning nanometer-sized particulate contaminants using high-speed injection of micron droplets)

  • 박진효;김정건;이승욱;이동근
    • 한국입자에어로졸학회지
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    • 제18권4호
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    • pp.129-136
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    • 2022
  • The line width of circuits in semiconductor devices continues to decrease down to a few nanometers. Since nanoparticles attached to the patterned wafer surface may cause malfunction of the devices, it is crucial to remove the contaminant nanoparticles. Physical cleaning that utilizes momentum of liquid for detaching solid nanoparticles has recently been tested in place of the conventional chemical method. Dropwise impaction has been employed to increase the removal efficiency with expectation of more efficient momentum exchange. To date, most of relevant studies have been focused on drop spreading behavior on a horizontal surface in terms of maximum spreading diameters and average spreading velocity of drop. More important is the local liquid velocity at the position of nanoparticle, very near the surface, rather than the vertical average value. In addition, there are very scarce existing studies dealing with microdroplet impaction that may be desirable for minimizing pattern demage of the wafer. In this study, we investigated the local velocity distribution in spreading liquid film under various impaction conditions through the CFD simulation. Combining the numerical results with the particle removal model, we estimated an effective cleaning diameter (ECD), which is a measure of the particle removal capacity of a single drop, and presented the predicted ECD data as a function of droplet's velocity and diameter particularly when the droplets are microns in diameter.

K 분할 기반 플래시 메모리 균등소거 방법론 (K Partition-Based Even Wear-Leveling Policy for Flash Memory)

  • 박제호
    • 정보처리학회논문지D
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    • 제13D권3호
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    • pp.377-382
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    • 2006
  • 플래시 메모리의 활용성이 높은 특성으로 인해 모바일 기기와 유비쿼터스 관련 기기에 대한 적용이 확장되고 있다. 하지만, 이러한 경향은 플래시 메모리의 물리적 특성으로 인해 제한 받을 수 있다. 이 논문에서는 플래시 메모리 공간의 재활용을 위한 방법론을 제안하다. 이 방법론은 메모리 재활용에 필요한 비용과 재활용 성능을 동시에 최적화하는 것을 목표로 한다. 제안하는 방법론은 특정시간에 재사용되는 메모리 세그먼트를 선택할 때 대상이 되는 메모리 공간을 다수의 하부 공간으로 분할하여 탐색 비용을 최적화한다. 아울러, 자유 세그먼트의 선택이라는 측면에서 전체 메모리 공간의 균등한 소거를 위한 방법론 또한 논의한다. 제안된 방법론들은 기존의 방법론과 함께 실험을 통해 검증하였으며, 방법론의 수행을 위한 최적화된 시스템 구성을 실험을 통하여 밝혔다.

드라이클리닝 근로자들의 유기용제 폭로와 자각증상 (Study on the Exposure Levels of Organic Solvents and Subjective Symptoms of Dry-cleaning Workers)

  • 김수영;김정윤;이연경;이석구;이영수;조영채;이태용;이동배
    • Journal of Preventive Medicine and Public Health
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    • 제31권4호
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    • pp.628-643
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    • 1998
  • To investigate the exposure levels of organic solvents and subjective symptoms of dry-cleaning workers, 77 male and 52 female dry-cleaning workers who had been worked in a small city of Chungnam province, and a large city, Taejon were selected for the study group. Air concentrations of organic solvents in the working environment were analyzed, and subjective symptoms of dry-cleaning workers were surveyed, from July to August 1996. The results obtained were as follows : 1. The concentrations of organic solvents in the working environment were within permissible TLV-TWA limits. 2. For the 13 symptom clusters, the most frequently complained symptom clusters were fatigue as 71.3%, and followed by depression and urinary disturbances as 53.5% and 51.9%. Other symptom clusters complained were below 50%. 3. Positive response rates of subjective symptoms were significantly higher in worker groups such as lived in a large city, female, higher education level, more frequently alcohol drinking, higher concentration of organic solvent in working environment, work in alone. 4. Workers who had used solvent B showed 2.3 point higher scores of subjective symptoms than those of solvent A. Of the subjective symptoms scores, amnesia and nervousness were higher in solvent B user group than solvent B user group. 5. As a result of factor analysis, 3 factors such as depression, urinary disturbance and neurologic disturbance were selected. 6. As a result of the logistic regression analysis, sex, the number of fellow workers, working time, region, job tenure, smoking, alcohol drinking, ventilating system, concentration of organic solvent in working environment and place of residence were selected for the related variables. For the conclusion, even though the concentrations of organic solvents in the working environments of dry-cleaning workers were within permissible limit of TLV-TWA, many dry-cleaning workers complained symptoms, such as fatigue, depression, urinary disturbances and so on. And the factors affecting to the symptoms of dry-cleaning workers were the number of fellow workers, work hours, region, job tenure, smoking and alcohol drinking.

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다 목적 제설장비 시스템 설계 (Configuration Design of Multi Purpose Snow Removal System)

  • 이장용
    • 대한산업공학회지
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    • 제37권4호
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    • pp.415-420
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    • 2011
  • Snow removal system is named for machinery which manages roads for passing of pedestrians and automobiles when snow is piled up on the road. This paper studies configuration design of snow removal system that has several functions-melting snow in the street without moving it to other place, transferring snow to the melter and cleaning road by spraying water for cleaning road. These sorts of functions are analyzed by function decomposition method of Kirshman and Fadel and, based upon which, machine parts are selected. Layout design would follow functional design to testify if the selected component satisfies space which is allowed by constraints.

Removal of Organic Wax and Particles on Final Polished Wafer by Ozonated DI Water

  • Yi, Jae-Hwan;Lee, Seung-Ho;Kim, Tae-Gon;Lee, Gun-Ho;Choi, Eun-Suck;Park, Jin-Goo
    • 한국재료학회지
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    • 제18권6호
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    • pp.307-312
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    • 2008
  • In this study, a new cleaning process with a low cost of ownership (CoO) was developed with ozonated DI water ($DIO_3$). An ozone concentration of 40 ppm at room temperature was used to remove organic wax film and particles. Wax residues thicker than $200\;{\AA}$ remained after only a commercial dewaxer treatment. A $DIO_3$ treatment in place of a dewaxer showed a low removal rate on a thick wax layer of $8000\;{\AA}$ due to the diffusion-limited reaction of ozone. A dewaxer was combined with a $DIO_3$ rinse to reduce the wax removal time and remove wax residue completely. Replacing DI rinse with the $DIO_3$ rinse resulted in a surface with a contact angle of less than $5^{\circ}$, which indicates no further cleaning steps would be required. The particle removal efficiency (PRE) was further improved by combining a SC-1 cleaning step with the $DIO_3$ rinsing process. A reduction in the process time was obtained by introducing $DIO_3$ cleaning with a dewaxing process.

조선시대(朝鮮時代) 충정관(忠靜冠)의 보존처리(保存處理) (Conservation of Chungjeong-Kwan, Joseon Dynasty)

  • 이미식;송미경;배순화;홍문경
    • 박물관보존과학
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    • 제3권
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    • pp.29-36
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    • 2001
  • 강원도 원성군 호저면에서 출토된 조선시대 모자(충정관)를 보존처리하였다. 모자는 양모 펠트 직물로 구성되어 있었으며, 견섬유의 끈으로 장식되어 있었다. 처리 전의 모자는 심하게 오염되어 있었고 좀벌레에 의해 손상된 상태였다. 유물의 처리과정은 부드러운 붓과 핀셋으로 고형오염물을 제거한 후 유물을 지지할 수 있는 스테인레스 망을 이용하여 퍼클로로에틸렌으로 2차례에 걸쳐 건식세탁하였다. 여분의 용매는 압지법을 사용하여 제거하였다. 세탁 후 유물의 감량률은 7.99%, 세탁 전후 유물의 색차는 2.57을 나타냄으로써 유물에 부착되어 있던 각종 오염물들이 탈락되었으며, 모자의 외관이 깨끗해지고 밝아졌다. 세탁 후 견봉사를 이용하여 장식용 끈들을 제자리에 고정시키고 모자의 모양을 잡아주는 보수 작업을 실행하였다.

Effects of DC Biases and Post-CMP Cleaning Solution Concentrations on the Cu Film Corrosion

  • Lee, Yong-K.;Lee, Kang-Soo
    • Corrosion Science and Technology
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    • 제9권6호
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    • pp.276-280
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    • 2010
  • Copper(Cu) as an interconnecting metal layer can replace aluminum (Al) in IC fabrication since Cu has low electrical resistivity, showing high immunity to electromigration compared to Al. However, it is very difficult for copper to be patterned by the dry etching processes. The chemical mechanical polishing (CMP) process has been introduced and widely used as the mainstream patterning technique for Cu in the fabrication of deep submicron integrated circuits in light of its capability to reduce surface roughness. But this process leaves a large amount of residues on the wafer surface, which must be removed by the post-CMP cleaning processes. Copper corrosion is one of the critical issues for the copper metallization process. Thus, in order to understand the copper corrosion problems in post-CMP cleaning solutions and study the effects of DC biases and post-CMP cleaning solution concentrations on the Cu film, a constant voltage was supplied at various concentrations, and then the output currents were measured and recorded with time. Most of the cases, the current was steadily decreased (i.e. resistance was increased by the oxidation). In the lowest concentration case only, the current was steadily increased with the scarce fluctuations. The higher the constant supplied DC voltage values, the higher the initial output current and the saturated current values. However the time to be taken for it to be saturated was almost the same for all the DC supplied voltage values. It was indicated that the oxide formation was not dependent on the supplied voltage values and 1 V was more than enough to form the oxide. With applied voltages lower than 3 V combined with any concentration, the perforation through the oxide film rarely took place due to the insufficient driving force (voltage) and the copper oxidation ceased. However, with the voltage higher than 3 V, the copper ions were started to diffuse out through the oxide film and thus made pores to be formed on the oxide surface, causing the current to increase and a part of the exposed copper film inside the pores gets back to be oxidized and the rest of it was remained without any further oxidation, causing the current back to decrease a little bit. With increasing the applied DC bias value, the shorter time to be taken for copper ions to be diffused out through the copper oxide film. From the discussions above, it could be concluded that the oxide film was formed and grown by the copper ion diffusion first and then the reaction with any oxidant in the post-CMP cleaning solution.

착유기 세척제가 신개발 젖소 유두컵 라이너용 고무조성물 재질에 미치는 화학적 영향 (The chemical effects of milking machine detergents on the rubber composition of the newly-developed teat cup liners)

  • 이정치
    • 한국동물위생학회지
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    • 제41권2호
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    • pp.125-131
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    • 2018
  • This study investigated the effects of the alkaline detergent and acid rinse used for cleaning milking machines on the rubber composition of the newly-developed teat cup liners. The samples prepared for use in the clean-in-place process were analyzed by ultraviolet spectrophotometer, ion chromatography and liquid chromatography. In the absorption spectrum of the first sample solution, the form of absorbance or absorption peak was largely different, compared to the absorption spectrum of alkaline detergent alone, but in the absorption spectra of the second and third sample solutions, the absorbance decreased, which was similar to the absorption spectrum in the pure acid detergent. In the ion chromatogram, two main peaks only, which might be shown by the pure alkaline detergent alone, were measured. In the liquid chromatograms, however, new peaks were observed in addition to the two main peaks caused by the pure alkaline detergent alone, which suggested that various molecular materials were created or eluted from the liner by the reaction with the alkaline detergent, but when washed with the acid detergent, any ion species were not produced. Therefore, we propose that an acid rinse should be applied, after cleaning the milking machine with the alkaline detergent.

Inhibitory effects of ultraviolet-C light and thermal treatment on four fungi isolated from pig slaughterhouses in Korea

  • Lee, Eun-Seon;Kim, Jong-Hui;Kang, Sun Moon;Kim, Bu-Min;Oh, Mi-Hwa
    • Journal of Animal Science and Technology
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    • 제64권2호
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    • pp.343-352
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    • 2022
  • Pig slaughterhouses harbor high humidity because of the necessary cleaning that takes place simultaneously with slaughter, which facilitates the existence of mold. Due to the enclosed space, there are several limitations to the control of mold growth with respect to cleaning, ventilation, and drying. In this study, the prevalence of fungi was investigated in four pig slaughterhouses in Korea. Four fungi (Aspergillus niger, Penicillium commune, Penicillium oxalicum, and Cladosporium cladosporioides) were detected with the highest frequency. These four strains were subjected to various treatments to reduce their growth. The fungi were inoculated onto stainless steel (SS) chips and treated with ultraviolet (UV)-C irradiation and hot water. Individual treatments with UV-C (15, 30, 90, 150, 300, and 600 mJ/cm2), and hot water (60, 65, 70, and 83℃) were performed to sanitize the SS chips. Simultaneous cleaning with 60℃ hot water and more than 150 mJ/cm2 of UV-C reduced the fungal incidence by > 6.5 Log from 6.6-7.0 Log CFU/cm2 (initial count). Our results demonstrate that a combined treatment of UV-C and hot water is the most economical and convenient way to prevent microbiological contamination of small tools (such as knives and sharpeners) and steel surfaces in slaughterhouses.

『순진한 테러리스트』에 재현된 스?하우스-레싱의 장소정치학 (The Squat Represented in The Good Terrorist: Lessing's Politics of Place)

  • 박선화
    • 영미문화
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    • 제14권1호
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    • pp.27-51
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    • 2014
  • Doris Lessing describes a band of revolutionaries who become involved in terrorist activities far beyond their level of competence in The Good Terrorist. Alice Mellings who is from a middle-class family has organized a squat house in London and seems capable of controlling everyone around her and anything about the house. She is seemingly like a housekeeper or a breadwinner. She also likes to be on the battlefront, for instance, demonstrating, picketing and spray-painting slogans. Such is able to easily exploit the others and she increasingly becomes the leader in the house. Recently some critics have focused on the political and social roles of the protagonist who represents a voice of terrorists in the 1980s England. Based on this, The Good Terrorist is read with the concept of the subject of feminism that Gillian Rose adopts in order to show that this subject tries to avoid the exclusion of the master subject. This subject imagines spaces which are not structured through masculinist claims to exhaustiveness. Alice as the subject of feminism shows different roles; she extorts or steals money for the maintenance of the house from her affluent parents; she spends all her time cleaning, fixing, decorating the deserted house; and she looks after the official affairs related to the house with her skills and experiences. She is systematically in charge of the house and sits at the head of the table in the kitchen. But when their activities turn into disaster and their plans fail, Alice willingly decides to close down the house after ousting the members. Here in her extorted gaze it is revealed that she takes control over the working class members of the house who are unable to lead a revolution because of their own problems and thereby the working class are dominated by the middle class. That is, the place is paradoxically recreated based on class differences, which the revolutionaries try to break. By representing the deconstruction and recreation of the place through squat houses, Lessing reveals her implicit feminism in which a new place should be produced crossing the principle of the dichotomy of gender and class.