• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.557-557
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• 2007

최근 Ruthenium (Ru)은 높은 화학적 안정성, 누설전류에 대한 높은 저항성, 저유전체와의 높은 안정성 등과 같은 특성으로 인해 캐패시터의 하부전극으로 각광받고 있다. 이렇게 형성된 Ru 하부전극은 각 캐패시터간의 분리와 평탄화를 위해 CMP 공정이 도입되게 되었다. 이러한 CMP 공정후에는 화학적 또는 물리적 상호작용에 의해 웨이퍼 표면에 오염물이 발생할 수 있다. CMP 공정중에 공급되는 슬러리에는 부식액, pH 적정제, 연마입자등이 첨가되는데 이때 사용된 연마입자는 CMP 공정후 입자오염을 유발할 수 있다. 그러므로, CMP 공정후에는 이러한 오염으로 인해 cleaning 공정이 반드시 필요하게 되었다. 하지만, Post Ru CMP cleaning에 대한 연구는 아직 미비한 상태이다. 그리하여 본 연구에서는 post Ru CMP cleaning에 대한 연구와 cleaning solution 그리고 첨가제에 따른 영향을 살펴보았다.

• Korean Chemical Engineering Research
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• v.43 no.4
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• pp.487-494
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• 2005

Nowadays a large amount of wastewater containing metal working fluids and cleaning agents is generated during the cleaning process of parts working in various industries of automobile, machine and metal, and electronics etc. In this study, aqueous or semi-aqueous cleaning wastewater contaminated with soluble or nonsoluble oils was treated using ultrafiltration system. And the membrane permeability flux and performance of oil-water separation (or COD removal efficiency) of the ultrafiltration system employing PAN as its membrane material were measured at various operating conditions with change of membrane pore sizes and soil concentrations of wastewater and examined their suitability for wastewater treatment contaminated with soluble or insoluble oil. As a result, in case of wastewater contaminated with soluble oil and aqueous or semi-aqueous cleaning agent, the membrane permeability increased rapidly even though COD removal efficiency was almost constant as 90 or 95％ as the membrane pore size increased from 10 kDa to 100 kDa. However, in case of the wastewater contaminated with nonsoluble oil and aqueous or semi-aqueous cleaning agent, as the membrane pore size increased from 10 kDa to 100 kDa and the soil concentration of wastewater increased, the membrane permeability was reduced rapidly while COD removal efficiency was almost constant. These phenomena explain that since the membrane material is hydrophilic PAN material, it blocks nonsoluble oil and reduces membrane permeability. Thus, it can be concluded that the aqueous or semi-aqueous cleaning solution contaminated with soluble oil can be treated by ultrafiltration system with the membrane of PAN material and its pore size of 100 kDa. Based on these basic experimental results, a pilot plant facility of ultrafiltration system with PAN material and 100 kDa pore size was designed, installed and operated in order to treat and recycle alkaline cleaning solution contaminated with deep drawing oil. As a result of its field application, the ultrafiltration system was able to separate aqueous cleaning solution and soluble oil effectively, and recycle them. Further more, it can increase life span of aqueous cleaning solution 12 times compared with the previous process.

• Journal of Korean Ophthalmic Optics Society
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• v.11 no.1
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• pp.27-34
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• 2006

We investigated the question whether the efficacy of cleaning tear components on RGP lens and preserving the superior wettability of RGP lens depended on the different type of contact lens care system - RGP lens care solution, SCL care solution, combined solution both for SCL and RGP lens or saline solution. The removal efficacy of the deposited protein was examined by Lowry protein assay and Scanning Electro Microscope(SEM) and residual lipid concentration on RGP lens was determined by High Pressure Liquid Chromatology(HPLC). Wettability was assessed with an equilibrium water-in-air contact angle method. When cared by RGP lens solution, it was demonstrated that 62 percent out of the adhered protein on RGP lens were removed and the removal efficacy of RGP lens solution was not only 4 times than saline solution and the alternative but also higher twice than SCL solution. Contrarily, the SCL solution had the most excellent removal efficacy of the adhered protein on SCL. These results suggest that the cleaning efficacy is thought to be affected by the other factors like the viscosity of care solutions, which mutual contact between RGP lens and care solutions is on the increase due to the viscosity enhancer in RGP lens care solution. RGP lens solution had the greatest removing efficacy to cholesterol and the residual cholesterol concentration was decreased to 50%. It is significant for RGP lens to preserve the superior wettability which means the predictive value for comfortable wearing and it showed that the RGP lens solution offered the most excellent efficacy to maintain the surface wettability. Combined solution both for SCL and RGP lens had weak efficacy of cleaning and maintaining wettability for RGP lens compared to RGP lens care solution.

• Journal of Industrial Technology
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• v.37 no.1
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• pp.12-15
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• 2017

It is important in dentistry that the provisional cement should be cleaned thoroughly from the crown before definitive cementation. The provisional cement has been removed by physical means such as curette, scaler, pumice, or sand-blasting with alumina particles, which is time-consuming, irritating, tedious, even causing crack. To avoid such troubles occurring through such physical cleaning means, the chemical solutions for dissolving the provisional cement remaining in dental crown were prepared, and solubilizing power of the solutions was measured and compared. The solution composed of MEA, NaOH, chloride chemicals ($CHCl_3$, $CCl_4$, $CH_2Cl_2$), surfactants (Igepal, Tween20), chelating agent (EDTA), and Ethyl cellosolve was most effective for dissolving the provisional cement.

• Korean Journal of Materials Research
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• v.31 no.1
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• pp.8-15
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• 2021

Transparent, photocatalytic, and self-cleaning TiO2 thin film is developed by TiO2 sol-gel coating on glass and polycarbonate (PC) substrates. Acetyl acetone (AcAc) suppresses the precipitation of TiO2 by forming a yellowish (complex) transparent sol-gel. XPS analysis confirms the presence of Ti2p and O1s in the thin films on glass and PC substrates. The TiO2-sol is prepared by stabilizing titanium (IV) isopropoxide (TTIP) with diethylamine and methyl alcohol. The addition of AcAcsilane coupling solution to the TiO2-sol instantaneously turns to yellowish color owing to the complexing of titanium with AcAc. The AcAc solution substantially improves the photocatalytic property of the TiO2 coating layer in MB solutions. The coated TiO2 film exhibits super hydrophilicity without and with light irradiation. The TiO2 thin film stabilized by adding 8.7 wt% AcAc shows the highest photo-degradation for methylene blue (MB) solution under UV light irradiation. Also, the optimum photocatalytic activity is obtained for the 8.7 wt% AcAc-stabilized TiO2 coating layer calcined at 450 ℃. The thin-films on glass exhibit fast self-cleaning from oleic acid contamination within 45 min of UV-light irradiation. The appropriate curing time at 140 ℃ improves the anti-fogging and thermal stability of the TiO2 film coated on PC substrate. The watermark-free PC substrate is particularly beneficial to combat fogging problems of transparent substrates.

• Journal of the Korean institute of surface engineering
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• v.54 no.6
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• pp.365-370
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• 2021

In this research, we proceeded with research on plasma resistance of the cleaning process of APS(Atmospheric Plasma Spray)-Y₂O₃ coated parts used for semiconductor and display plasma process equipment. CF₄, O₂, and Ar mixed gas were used for the plasma environment, and respective alconox, surfactant, and piranha solution was used for the cleaning process. After APS-Y₂O₃ was exposed to CF₄ plasma, the surface changed from Y₂O₃ to YF₃ and a large amount of carbon was deposited. For this reason, the plasma corrosion resistance was lowered and contamination particles were generated. We performed a cleaning process to remove the defect-inducing surface YF₃ layer and carbon layer. Among three cleaning solutions, the piranha cleaning process had the highest detergency and the alconox cleaning process had the lowest detergency. Such results could be confirmed through the etching amount, morphology, composition, and accumulated contamination particle analysis results. Piranha cleaning process showed the highest detergency, but due to the very large thickness reduction, the base metal was exposed and a large number of contaminated particles were generated. In contrast, the surfactant cleaning process exhibit excellent properties in terms of surface detergency, etching amount, and accumulated contamination particle analysis.

• Korean Journal of Materials Research
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• v.27 no.11
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• pp.577-582
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• 2017

Self-cleaning and photocatalytic $TiO_2$ thin films were prepared by a facile sol-gel method followed by spin coating using peroxo titanic acid as a precursor. The as-prepared thin films were heated at low temperature($110^{\circ}C$) and high temperature ($400^{\circ}C$). Thin films were characterized by X-ray diffraction(XRD), Field-emission scanning electron microscopy(FESEM), UV-Visible spectroscopy and water contact angle measurement. XRD analysis confirms the low crystallinity of thin films prepared at low temperature, while crystalline anatase phase was found the for high temperature thin film. The photocatalytic activity of thin films was studied by the photocatalytic degradation of methylene blue dye solution. Self-cleaning and photocatalytic performance of both low and high temperature thin films were compared.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.556-559
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• 1997

This paper describes the development process of mosquito trap with the effect of air cleaning by using the substance-field analysis and evolution pattern of systems in the theory of inventive problem solving (TRIZ). By the concept of standard solution about introducing S3 substance, modification of S1 (human) and S2 (mosquito) between first substance SI and second substance S2 with harmful effect, we got the concept of the mosquito trap with mosquito attractants instead of mosquito reluctants such as mosquito stick coil and skin medicine w~th bad and toxic smell. The number of mosquitos traped by one trap near cattle shed per one n~ght in summer, was over 10 thousands with some effects of air cleaning.

• Journal of Conservation Science
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• v.22
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• pp.99-108
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• 2008

This research aimed to provide a scientific methodology for removing white and black/brown coloured stains on the wall paintings of tombs of Jinpari No 1 and No 4. in the Democratic People's Republic of Korea. For the analysis of chemical composition of stains of the samples from the wall paintings, a microscope and SEM/EDX were used. The analysis confirmed that the fomula of white coloured stains should be $CaSO_4$ or $CaCO_3$ and the black/brown coloured stains should be $CaSO_4$ or $CaCO_3$ with soil deposition. Because of the difficulties of testing several cleaning solutions on sample patches of large area of the painting, the author considered a risk-free cleaning solution as being the most appropriate one, with Ammonium bicarbonate and Anion exchange resin showing satisfactory cleaning effect without visible side effects. For the removal of dense layer of stains, the research suggested that physical cleaning should be followed by applying a cleaning solution.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.1
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• pp.56-63
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• 2012

Due to the development of construction technology, there is a considerable increase in the number of skyscrapers in the world. Accordingly, there are rapid growing requests about maintenance systems such as cleaning, painting, and monitoring the processes of facade in highrise buildings. However, it is extremely dangerous working the walls of high-rise buildings, and crashes from buildings have accounted for large proportion of constructional accidents. An alternative solution must be developed with the commercialization of automatic robot systems. For the last decade, interest in developing robots for cleaning and maintenance in facade of highrise buildings has continuously increased. The use of automatic robot systems can be expected to reduce accidents and decrease labor costs. In this paper, we propose a new kind of cleaning mechanism. We have designed and manufactured various cleaning tools for different types of facades with economic commercialization. The cleaning cycle, size, and intensity will be determined by economic constraints as well. The final goals are to design and manufacture tools and robots that can clean facades efficiently and rapidly even in dangerous places. The cleaning tool systems consist of nozzles, brush rollers, and squeezing devices. Furthermore, these tools and robots perform each process utilizing the systems of built-in guide types and gondola types for building maintenance. The performance of the proposed cleaning tools is evaluated experimentally; however additional study should be necessary for safer and more stable commercialization.