• 대한기계학회논문집A
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• 제26권1호
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• pp.121-130
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• 2002

Clean stockers are being used by semiconductor and TFT-LCD manufacturers to store and buffer work in process. Since an important function of a stocker is to keep the contained material clean. The only way to keep the stored product clean is to provide constant clean airflow the product and through stocker, The airflow across the product prevent contamination from settling on the product. Up to now, stocker typically have been configured to receive their laminar airflow from fan filter units that are located on the side of the stocker This type of stocker may have such problems as complexity of structure, increment of temperature, mechanical vibration, initial investment and running cost. In this study, In order to solve the above mentioned problems, new air control system in stocker is proposed, which is to control open ratios of exits that are located on the side of the stocker without fan filter units. Open ratios of exits need to be optimized for the same quantities of airflow in each exit. In this study, static pressure regain was used for the analysis of the open ratios of exits theoretically and Blue Ridge Numerics FEM software, CFDesign, was used fur simulating airflow in stocker. As a result, Open ratios of exits important to provide constant clean airflow can be obtained by the analysis of static pressure regain and was verified by simulation results. Therefore, new air control system in stocker can be used by the semiconductor and TFT-LCD manufacturers.

• 제어로봇시스템학회논문지
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• 제17권6호
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• pp.566-572
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• 2011

In recent semiconductor and FPD (Flat Panel Display) manufacturing processes, high clean-class delivery operation is required more and more for short working time and better product quality. Traditionally SLIM (Single-sided Linear Induction Motor) is widely used in the liner drive applications because of its simplicity in the rail structure. A magnetically levitated (Maglev) unmanned vehicle with SLIM traction, which is powered by a CPS (Contactless Power Supply) can be a high precision delivery solution for this industry. In this paper unmanned FPD-carrying vehicle, which can levitate without contacting the rail structure, is suggested for high clean-class FPD delivery applications. It can be more acceptable for the complex facilities composed with many processes which require longer rails, because of simple rail structure. The test setup consists of a test vehicle and a rounded rail, in which the vehicle can load and unload products at arbitrary position commanded through wireless communications of host computer. The experimental results show that the suggested vehicle and rail have reasonable traction servo and robust electromagnetic suspensions without any contact. The resolution of point servo errors in the SLIM traction system is accomplished under 1mm. The maximum gap error is ${\pm}0.25mm$ with nominal air gap length of 4.0mm in the electromagnetic suspensions. This type of automated delivery vehicle is expected to have significant role in the clean delivery like FPD glass delivery.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.3413-3417
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• 2007

In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants such as $NH_3$, SOx and organic gases from the outdoor air introduced into clean room. In the present study, an experiment was carried out to examine the improvement of removal efficiency for the gaseous contaminants. In order to improve the gas removal efficiency, a hot water contact heat exchanger was installed upstream of the air washer to heat and humidify the incoming outdoor air before entering the air washer.

• 한국소음진동공학회논문집
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• 제17권8호
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• pp.726-735
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• 2007

Inside the factory buildings of aprecision industry (which produces semiconductors or TFT-LCD), thousands of vibration-sensitive precision equipments operate in the clean rooms. Various utility equipments that are installed around them for proper operation cause various sources of noise and of vibration to exist inside the clean rooms and thus deteriorate the noise and the vibration environment within. In this study, we check if the existing transient vibration phenomenon is caused by the vibrations that arise from operating the utility installed near these equipments; compare and evaluate the vibration criteria of precision equipments regarding the transient vibration phenomenon; and check the efficiency of these criteria.

• 의료ㆍ복지 건축 : 한국의료복지건축학회 논문집
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• 제27권3호
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• pp.61-69
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• 2021

Purpose: Senior long-term care facilities are vulnerable to a cluster infection because of frequent physical contact, large group dining, communal living, and room sharing. This study aims to provide architectural improvement plans for a quarantine system in the facilities. Methods: Actual quarantine action data, guidelines from governments and institutes, in-depth interviews with facility staff are analyzed. Results: To prevent a cluster infection in the senior facilities, it is necessary to provide an architectural plan focusing on increasing the number of single rooms and isolation rooms, providing isolation rooms for staff, separation of a soiled room from a clean room, planing an entry vestibule and a visitor's room. Implications: It is important to analyze the existing condition of facilities that had been going through cohort isolation and provide the architectural solution to strengthen infection control.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2009년도 추계학술대회 논문집
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• pp.698-699
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• 2009

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2000년도 제15차 학술회의논문집
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• pp.162-162
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• 2000

We describe a new optical-type guide sensor for AGV. It is robust the disturbance of the light. The developed optical-type guide sensor is very useful in the clean room environment where the light disturbance is very critical through the hole on the surface of the floor.

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2005년도 하계학술발표대회
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• pp.152-152
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• 2005

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2008년도 동계학술발표대회 논문집
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• pp.452-457
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• 2008

We performed a study on the contaminant transfer in a clean space for the location of product and fan filter unit using computational fluid dynamics analysis. To simplify the real product moving process, three different non-moving cases regrading the locations of product were selected: no product, at the lower side, and at the upper and lower sides. And to investigate the characteristics of the contaminant transfer, the arrangement of fan filter units was varied. Local mean air-age and contaminant distribution were used as evaluation indices. From the results, the contaminant transfer to the product was the most when the products were simultaneously located at the upper and lower sides. And the contaminant was easily exhausted regardless of the location of product when the fan filter units were properly arranged at the top side of the clean space.

• 한국노년학
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• 제30권4호
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• pp.1163-1177
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• 2010

본 연구는 전국 복지용구사업소의 시설현황을 우편설문 및 방문을 통해 조사하고, 한국형 복지용구사업소의 적정 시설기준 수립을 위한 동선구성 및 공간구성, 면적 등의 기초적인 기준을 제시한 횡단적 조사연구이다. 이에 국내외 문헌 고찰, 전문가 의견수렴 등의 연구결과를 더하여 다음과 같은 한국형 복지용구사업소의 적정 시설기준 수립을 위한 원칙을 설정하였다. 첫째, 사업소의 유형(세정소독 여부, 대여사용 복지용구 수거 여부)에 따라 공간을 선택적으로 구성 배치한다. 둘째, 공간을 배치할 때 건물 층수, 면적은 복지용구 및 방문자의 동선이 최대한 짧고, 단순하게 구성한다. 셋째, 공간면적은 사업자가 결정한 전시체험 규모와 침대, 휠체어 등 주요한 복지용구 크기 등을 기준으로 산출한다. 넷째, 도로변 쪽으로 출입문을 내어 전시효과를 내고, 전시·체험·상담을 동시에 진행할 수 있도록 개방형 구조로 계획한다. 다섯째, 창고 및 세정소독공간은 각 출입문 및 공간을 철저히 구분하도록 하고, 동선을 구분하여 교차오염을 예방한다. 여섯째, 전시·체험·상담실은 고객 및 차량진입이 용이하도록 1층에 배치하고, 1층이 아닌 경우 휠체어를 타고 이동할 수 있는 충분한 통로를 확보하고, 엘리베이터 이용이 가능하도록 계획한다. 일곱째, 사무공간은 이용자 정보관리 중 프라이버시 보호를 위해 공간을 분리한다. 위 전제를 통해 세정소독 직접수행형 사업소는 최대 165m², 중간 150m², 최소 140m²에 전시체험실, 상담실, 세정소독실, 창고(청결, 오염), 사무실, 주차공간을 갖추도록 하고, 세정소독 위탁형 사업소는 최대 134m², 중간 119m², 최소 109m²에 전시체험실, 상담실, 사무실, 주차공간을 갖추며 복지용구 반입수거를 할 경우 창고(청결, 오염)까지 갖추도록 제시되었다.