• 제어로봇시스템학회논문지
• /
• 제12권11호
• /
• pp.1095-1101
• /
• 2006

The clean tube system was developed as a means of transferring air-floated wafers inside a closed tube filled with super clean air. This paper presents a wafer position sensing method in the clean tube system, where the photo proximity sensors are used. The first presented method uses the two positions sensed lately in order to compute the wafer center position. The next method uses the latest sensed position and the next latest position compensated with the information of the wafer velocity. The third method uses the kalman filter, which enable us to use all the previous sensing information. The simulation results are compared to show results of the presented method. In addition, the paper presents a control method to stop the wafer at the center of the unit in the clean tube system. The experimental clean tube system worked successfully with the applying the both presented methods of sensing and control.

• 제어로봇시스템학회:학술대회논문집
• /
• 제어로봇시스템학회 2000년도 제15차 학술회의논문집
• /
• pp.249-249
• /
• 2000

This paper introduces a clean mobile robot fur 4th generation LCD cassette, which is guided by optical sensor and position compensation using vision module. The mobile robot for LCD cassette transfer might be controlled by AGV controller which has powerful algorithms. It offers optimum routes to the destination of clean mobile robot by using dynamic dispatch algorithm and MAP data. This clean mobile robot is equipped with 4 axes fork type manipulator providing repeatability accuracy of $\pm$ 0.05mm.

• 청정기술
• /
• 제3권1호
• /
• pp.78-81
• /
• 1997

• 태양에너지
• /
• 제11권1호
• /
• pp.92-97
• /
• 1991

화석에너지로 부터 방출되는 온실효과 가스와 지구 온난화 현상에 대하여 조사하였다. 세계의 사회경제활동과정에서 가속화가 예상되는 에너지 수요증가에 대응하기 위하여, 온실가스 배출을 감소시킬 화석에너지 이용시스템과 핵에너지와 청정자원인 재생에너지를 포함한 종합적인 에너지공급시스템개념에 대하여 고찰하였다.

• 대한설비공학회:학술대회논문집
• /
• 대한설비공학회 2009년도 하계학술발표대회 논문집
• /
• pp.1306-1311
• /
• 2009

In recent semiconductor manufacturing clean rooms, in order to improve clean room air quality, air washers are used to remove airborne gaseous contaminants such as $NH_3$, SOx and organic gases from the outdoor air introduced into clean room. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery is therefore useful for reducing the outdoor air conditioning load for a clean room. Therefore it is desirable to recover heat from the exhaust air and use it to reheat the outdoor air. In the present study, numerical analysis and experiment was conducted to simulate the amount of energy reduction of exhaust air heat recovery type air washer system. The present numerical results showed good agreement with the results of the experimental data.

• 제어로봇시스템학회:학술대회논문집
• /
• 제어로봇시스템학회 2004년도 ICCAS
• /
• pp.1264-1268
• /
• 2004

This paper presents a wafer motion modeling of the transfer unit and the control unit in the clean tube system, which was developed as a means for transferring the air-floated wafers inside the closed tube filled with the super clean airs. The motion in the transfer unit is modeled as a mass-spring-damper system where the recovering force by air jets issued from the perforated plate is modeled as a linear spring. The motion in the control unit is also modeled as another mass-spring-damper system, but in two dimensional systems. Experiments with a clean tube system built for 12-inch wafers show the validity of the presented force and motion models.

• 설비공학논문집
• /
• 제16권5호
• /
• pp.475-481
• /
• 2004

This paper presents a force model of the clean tube system, which was developed as a means of transferring air-floated wafers inside a closed tube filled with super clean air. The recovering force from the holes for floating wafers is modeled as a linear spring and thus the wafers motion is modeled as a mass-spring-damper system. The propelling forces are modeled as linear along with the wafer location. The paper also proposes a control method to emit and stop a wafer at the center of a control unit. It reveals the minimum value of the propelling force to leave from the control unit. In order to stop the wafer, it utilizes the exact time when the wafer arrives at the position to activate the propelling force. Experiments with the clean tube system built for the 12 inch wafer shows the validity of the proposed model and the algorithm.

• 한국정밀공학회지
• /
• 제21권3호
• /
• pp.66-73
• /
• 2004

This paper presents wafer motion modeling of transfer unit in clean tube system, which was developed as a means for transferring the air-floated wafers inside the closed tube filled with the super clean airs. When the wafer is transferred in x direction with an initial velocity the motion along x direction can be modeled as a simple decaying motion due to viscous friction of the fluid. But, the motion in y direction is modeled as a mass-spring-damper system where the recovering force by air jets issued from the perforated is modeled as a linear spring. Experiments with a clean tube system built fur 12 wafer show the validity of the presented force and motion models.

• 전자진흥
• /
• 제4권7호
• /
• pp.60-63
• /
• 1984

• 청정기술
• /
• 제8권4호
• /
• pp.181-192
• /
• 2002

국내외 환경규제는 무역규제 형태로 나타나고 있으며, 이에 대비하기 위하여 오염원에 대한 원천적인 제거와 오염물질 감량을 위한 청정기술의 개발 및 도입이 시급하다. 최근에 들어서는 환경의 복원 및 재생을 도모하는 환경경영기술 개발의 필요성도 대두되고 있다. 이러한 청정기술의 도입과 효율적인 관리를 위해서는 '지속가능한 개발'이라는 개념에 기반하는 환경경영시스템이 정착되어야 한다. 본 논고에서는 청정기술 도입을 통한 환경경영시스템의 효율성과 해결해야할 문제점을 살펴보고자 한다.