• International Journal of Precision Engineering and Manufacturing
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• 제3권2호
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• pp.72-77
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• 2002

In this paper, a simple method to measure the residual stress in microstructure is presented. In order to find the residual stress in micro-machined beam, the first natural frequency of the beam that has the residual stress inside is analyzed using Rayleigh's energy method. Micro gold electroplated structure is fabricated by surface micro-machining process including electroplating. The made structure is an approximate shape of clamped-clamped beam and its 1 st natural frequency is measured by resonance method. For the better estimation of the residual stress, an equivalent length of micro-fabricated beam to ideal beam is calculated by FEM. The residual stress was estimated from the equivalent length and the measured natural frequency. It was found that a tensile stress was residue in the micro beam structure.

• 한국전산구조공학회:학술대회논문집
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• 한국전산구조공학회 2000년도 가을 학술발표회논문집
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• pp.201-208
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• 2000

This paper explores the non-linear behavior of tapered beam subjected to a floating concentrated load. For applying the Bernoulli-Euler beam theory to this beam, the bending moment at any point of elastica is obtained from the final equilibrium state. By using the bending moment equation and the Bernoulli-Euler beam theory, the differential equations governing the elastica of clamped-roller beam are derived, and solved numerically. Three kinds of tapered beam types are considered. The numerical results of the non-linear behavior obtained in this study are agreed quite well to the results obtained from the laboratory-scale experiments.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 추계학술대회 논문집
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• pp.130-130
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• 2009

This paper describes the temperature characteristics of polycrystalline 3C-SiC micro resonators. The 1.2 ${\mu}m$ and 0.4 ${\mu}m$ thick polycrystalline 3C-SiC cantilever and doubly clamped beam resonators with 60 ~ 100 ${\mu}m$ lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at temperature range of $25{\sim}200^{\circ}C$. The TCF(Temperature Coefficient of Frequency) of 60, 80 and 100 ${\mu}m$ long cantilever resonators were -9.79, -7.72 and -8.0 $ppm/^{\circ}C$. On the other hand, TCF of 60, 80 and 100 ${\mu}m$ long doubly clamped beam resonators were -15.74, -12.55 and -8.35 $ppm/^{\circ}C$. Therefore, polycrystalline 3C-SiC resonators are suitable with RF MEMS devices and bio/chemical sensor applications in harsh environments.

• 한국산학기술학회논문지
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• 제13권7호
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• pp.2858-2864
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• 2012

곡선보 (curved beam)의 내평면 모멘트 및 등분포하중 하에서 평면내 (in-plane) 좌굴 (buckling)을 미분구적법(DQM)을 이용하여 해석하였다. 다양한 경계조건 (boundary conditions)과 굽힘각 (opening angles)에 따른 임계모멘트 및 임계하중을 계산하였다. DQM의 해석결과는 해석적 해답 (exact solution) 결과와 비교하였으며, DQM은 적은 요소 (grid points)를 사용하여 정확한 해석결과를 보여주었다. 두 경계조건(고정-고정, 단순지지-고정)하에서 새 결과를 또한 제시하였다.

• 한국전기전자재료학회논문지
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• 제22권4호
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• pp.314-317
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• 2009

This paper describes the temperature characteristics of polycrystalline 3C-SiC micro resonators. The $1.2{\mu}m$ and $0.4{\mu}m$ thick polycrystalline 3C-SiC cantilever and doubly clamped beam resonators with $60{\sim}100{\mu}m$ lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at temperature range of $25{\sim}200^{\circ}C$. The TCF(Temperature Coefficient of Frequency) of 60, 80 and 100 On long cantilever resonators were -9.79, -7.72 and -8.0 ppm/$^{\circ}C$. On the other hand, TCF of 60, 80 and $100{\mu}m$ long doubly clamped beam resonators were -15.74, -12.55 and -8.35 ppm/$^{\circ}C$. Therefore, polycrystalline 3C-SiC resonators are suitable with RF MEMS devices and bio/chemical sensor applications in harsh environments.

• Steel and Composite Structures
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• 제27권2호
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• pp.149-159
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• 2018

Thermo-mechanical buckling of sandwich beams with a stiff core and face sheets made of functionally graded carbon nanotube-reinforced composite (FG-CNTRC) within the framework of Timoshenko beam theory is presented. The material properties of FG-CNTRC are supposed to vary continuously in the thickness direction and are estimated through the rule of mixture. Also the properties of these materials should be considered temperature dependent. The governing equations and boundary conditions are derived by using Hamilton's principle and solved using an efficient technique called the Differential Transform Method (DTM) to achieve the critical buckling of the sandwich beam in uniform thermal environment. A detailed parametric study is guided to investigate the effects of carbon nanotube volume fraction, slenderness ratio, core-to-face sheet thickness ratio, and clamped-clamped, simply-simply and clamped-simply end supports on the critical buckling behavior of sandwich beams with FG-CNTRC face sheets. Numerical results for comparison of sandwich beams with uniformly distributed carbon nanotube-reinforced composite (UD-CNTRC) face sheets with those with FG-CNTRC face sheets are also presented.

• 한국정밀공학회지
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• 제17권12호
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• pp.195-200
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• 2000

In order to find a residual stress in the micro-machined beam, first natural frequency of the beam that has the residual stress inside is analyzed using the Rayleigh's energy method. Micro gold electroplated structure is fabricated by surface micro-machining process. The made structure is clamped-clamped beam and its 1st natural frequency is measured by resonance method. For the better estimation of the residual stress, an equivalent length of micro-machined beam to ideal beam is calculated by FEM. The residual stress is estimated from the equivalent length and the measured natural frequency.

• 한국전산구조공학회논문집
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• 제25권3호
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• pp.185-194
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• 2012

이 연구는 회전관성과 전단변형을 동시에 고려한 변단면 Timoshenko 보의 자유진동에 관한 연구이다. 변단면 보의 단면은 폭이 포물선 함수로 변화하는 변화폭 직사각형 단면으로 채택하였다. 이러한 보의 자유진동을 지배하는 수직변위에 대한 4계 상미분방정식을 유도하였다. 이 상미분방정식을 수치해석하여 고유진동수와 진동형을 산출하였다. 수치해석 예에서는 회전-회전, 회전-고정, 고정-고정 지점을 고려하였다. 진동형은 변위의 진동형뿐만 아니라 합응력의 진동형도 산출하여 그림에 나타내었다. 휨 회전각과 전단변형에 의한 수직변위 및 전단면 회전각의 구성비율을 산정하였다.

• Structural Engineering and Mechanics
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• 제32권6호
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• pp.811-833
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• 2009

In the present article bending, buckling and vibration analyses of tapered beams using Eringen non-local elasticity theory are being carried out. The associated governing differential equations are solved employing Rayleigh-Ritz method. Both Euler-Bernoulli and Timoshenko beam theories are considered in the analyses. Present results are in good agreement with those reported in literature. Beam material is considered to be made up of functionally graded materials (fgms). Non-local analyses for tapered beam with simply supported - simply supported, clamped - simply supported and clamped - free boundary conditions are carried out and discussed. Further, effect of length to height ratio on maximum deflections, vibration frequencies and critical buckling loads are studied.

• 한국농공학회지
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• 제42권6호
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• pp.122-129
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• 2000

The purpose of this study is to investigate both the fundamental and some higher natural frequencies and mode shapes of compressive members resting on the linear elastic foundation. The model of compressive member is based on the classical Bernoulli-Euler beam theory. The differential equation governing free vibrations of such members subjected to an axial load is derived and solved numerically for calculating the natural frequencies and mode shapes. The Improved Euler method is used to integrate the differential equation and the Determinant Search method combined with the Regula-Falsi method to determine the natural frequencies, respectively. In numerical examples, the hinged-hinged, hinged-clamped, clamped-hinged and clamped-clamped end constraints are considered. The convergence analysis is conducted for determining the available step size in the Improved Euler method. The validation of theories developed herein is also conducted by comparing the numerical results between this study and SAP 90. The non-dimensional frequency parameters are presented as the non-dimensional system parameters: section ratio, modulus parameter and load parameter. Also typical mode shapes are presented.