• Title/Summary/Keyword: chemical structure analysis

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Study on the Composition Analysis and Electrical Properties of Chemical Vapor Deposited PbTiO3 Thin Film (화학증착법에 의한 PbTiO3박막의 조성분석 및 전기적성질에 관한 연구)

  • 이혜용;윤순길;김호기
    • Journal of the Korean Ceramic Society
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    • v.26 no.5
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    • pp.670-676
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    • 1989
  • The PbTiO3 is well known materials having remarkable ferroelectric, piezoelectric, and pyroelectric properties. PbTiO3 thin films with a perovskite structure were successfully fabricated on titanium substrate by chemical vapor deposition. These films were characterized according to composition, crystal structure, and electrical properties. Semi-quantitative compositional analysis of the deposited films was made by Auger Electron Spectroscopy(AES). The PbTiO3 film deposited on titanium substrate at the deposition temperature 75$0^{\circ}C$, the Ti(C2H5O)4 fraction 0.15, and O2 partial pressure 0.06atm, has a columnar structure and grows with(001) preferred orientation, and has stoichiometric composition. A clear dielectric transition and offset in the dc conductivity near the transition temperature(48$0^{\circ}C$) were observed in the deposited lead titanate film.

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The Study on Pattern Dependent Modeling of ILD CMP (패턴에 따른 층간절연막 CMP의 모델리에 관한 연구)

  • 홍기식;정해도
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2001.04a
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    • pp.1121-1124
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    • 2001
  • In this study, we verify th effects of pattern density on interlayer dielectric chemical mechanical polishing process based on the analysis of Preston's equation and confirm this analysis by several experiments. Appropriate modeling equation, transformed form Preston's equations used in glass polishing, will be suggested and described the effects of this modeling during pattern wafer ILD CMP. Results indicate that the modeling is well agreed to middle density structure of the die in pattern wafer, but has some error in low and high density structure of the die. Actually, the die used in Fab, was designed to have a appropriate density, therefore this modeling will be suitable for estimating the results of ILD CMP.

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Ecotoxicity of Nonionic Surfactants based on its Chemical Structure for Closterium ehrenbergii (비이온 계면활성제의 화학구조에 따른 Closterium ehrenbergii 대한 생태독성)

  • ;Matsui Saburo
    • Environmental Analysis Health and Toxicology
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    • v.15 no.1_2
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    • pp.1-6
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    • 2000
  • This study was designed to evaluated the ecotoxicity to Closterium ehrenbergii using Nonionic surfactants based on its chemical structure. Nonionic surfactants ecotoxicity tended to increase with decreasing the number of ethylene oxide units. The Closterium ehrenbergii test was good in sensitivity and agreement with other published results. The use of Closterium ehrenbergii test offers promising potential for ecotoxicological applications.

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Structural and Spectral Characterization of a Chromium(III) Picolinate Complex: Introducing a New Redox Reaction

  • Hakimi, Mohammad
    • Journal of the Korean Chemical Society
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    • v.57 no.6
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    • pp.721-725
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    • 2013
  • Reaction between 2-pyridinecarboxylic acid (Hpic) and $K_3[Cr(O_2)_4]$ give complex $[Cr(pic)_3].H_2O$ (1) which is characterized by elemental analysis and spectroscopic methods (FT-IR, Raman) and X-ray crystallography. In the crystal structure of 1, chromium atom with coordinated by three nitrogen and three oxygen atoms has a distorted octahedral geometry. Also a water molecule is incorporated in crystal network. Each water molecule acts as hydrogen bond bridging and connects two adjacent complexes by two $O-H{\cdots}O$ hydrogen bonds.

Theoretically-based and practice-oriented formulations for the floor spectra evaluation

  • Abbati, Stefania Degli;Cattari, Serena;Lagomarsino, Sergio
    • Earthquakes and Structures
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    • v.15 no.5
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    • pp.565-581
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    • 2018
  • This paper proposes a new analytical formulation for computing the seismic input at various levels of a structure in terms of floor response spectra. The approach, which neglects the dynamic interaction between primary structure and secondary element, is particularly useful for the seismic assessment of secondary and non-structural elements. The proposed formulation has a robust theoretical basis and it is based on few meaningful dynamic parameters of the main building. The method has been validated in the linear and nonlinear behavior of the main building through results coming from both experimental tests (available in literature) and parametric numerical analyses. The conditions, for which the Floor Spectrum Approach and its simplified assumptions are valid, have been derived in terms of specific interval ratios between the mass of the secondary element and the participant mass of the main structure. Finally, a practice-oriented formulation has been derived, which could be easily implementable also at code level.

Signal Analysis of Motor Current for End Point Detection in the Chemical Mechanical Polishing of Shallow Trench Isolation with Reverse Moat Structure

  • Park, Chang-Jun;Kim, Sang-Yong;Seo, Yong-Jin
    • KIEE International Transactions on Electrophysics and Applications
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    • v.2C no.5
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    • pp.262-267
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    • 2002
  • In this paper, we first studied the factors affecting the motor current (MC) signal, which was strongly affected by the systematic hardware noises depending on polishing such as pad conditioning and arm oscillation of platen and recipe, head motor. Next, we studied the end point detection (EPD) for the chemical mechanical polishing (CMP) process of shallow trench isolation (STI) with reverse moat structure. The MC signal showed a high amplitude peak in the fore part caused by the reverse meal. pattern. We also found that the EP could not be detected properly and reproducibly due to the pad conditioning effect, especially when conventional low selectivity slurry was used. Even when there was no pad conditioning effect, the EPD method could not be applied, since the measured end points were always the same due to the characteristics of the reverse moat structure with an open nitride layer.

Synthesis and Characterization of New Macroporous SnO2 Foams

  • Choi, Moon-Hyung;Paek, Seung-Min
    • Bulletin of the Korean Chemical Society
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    • v.34 no.5
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    • pp.1388-1390
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    • 2013
  • Macroporous $SnO_2$ foam was successfully synthesized via a simple soft-chemical route by hybridization between alkylamine and tin(IV) oxide. According to X-ray diffraction (XRD) analysis, the as-prepared $SnO_2$ foam had a highly ordered lamella structure along the crystallographic c-axis, which transformed to a rutile phase after thermal treatment at $300^{\circ}C$. X-ray absorption spectroscopy (XAS) at the Sn K-edge revealed that $SnO_2$ particles in the hybrid material maintained their nanosized structure after hybridization with alkylamine. Scanning electron microscope (SEM) images clearly showed that the as-prepared $SnO_2$ foam had a macroporous structure. This synthetic route can be extended to the development of open frameworks with good electrochemical properties in battery applications.

Synthesis of FePt Nanoparticles by Chemical Reduction Process (화학적인 환원 공정에 의한 FePt 나노입자의 합성)

  • 김순길;이창우;이재성
    • Journal of Powder Materials
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    • v.11 no.3
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    • pp.242-246
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    • 2004
  • FePt nanoparticles for high-density magnetic recording media were synthesized by the simultaneous chemical reduction of Fe(acac) $_2$ and Pt(acac) $_2$ with 1,2-hexadecanediol as the reducing reagent. TEM images showed that the shape of as-synthesized FePt nanoparticle was spherical and average particle size was 3 nm. Also, SAD pattern showed that crystal structure was disordered FCC (face centered cubic). These FCC structured nanoparticles were transformed FCT (face centered tetragonal) structure by annealing at 55$0^{\circ}C$ for 30 min in Ar atmosphere. XRD analysis revealed that as-synthesized FePt nanoparticles were transformed from disordered FCC to ordered FCT. Finally, the coercivity of 2 kOe for FePt nanoparticles with FCT structure was obtained by VSM measurement.