• Title/Summary/Keyword: chemical microstructure

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A Study on STI CMP Characteristics using Microstructure Pad (마이크로 표면 구조물을 갖는 패드의 STI CMP 특성 연구)

  • Jung, Jae-Woo;Park, Ki-Hyun;Jang, One-Moon;Park, Sun-Joon;Jeong, Moon-Ki;Jeong, Hae-Do
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.11a
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    • pp.356-357
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    • 2005
  • Chemical mechanical polishing (CMP) allows the planarization of wafers with two or more materials at their surfaces. Especially, polishing pad is considered as one of the most important consumables because of its properties. Subject of this investigation is to apply CMP for planarization of shallow trench isolation structure using microstructure pad. Microstructure pad is designed to have uniform structure on its surface and fabricated by micro-molding technology. And then STI CMP performances such as oxide dishing and nitride corner rounding are evaluated.

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Mechanical Properties of Chemical Vapor Deposited SiC Coating Layer (화학증착법에 의하여 제조된 탄화규소 코팅층의 기계적 특성)

  • Lee, Hyeon-Keun;Kim, Jong-Ho;Kim, Do-Kyung
    • Journal of the Korean Ceramic Society
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    • v.43 no.8 s.291
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    • pp.492-497
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    • 2006
  • SiC coating has been introduced as protective layer in TRISO nuclear fuel particle of High Temperature Gas cooled Reactor (HTGR) due to excellent mechanical stability at high temperature. In order to inhibit the failure of the TRISO particles, it is important to evaluate the fracture strength of the SiC coating layer. ]n present work, thin silicon carbide coating was fabricated using chemical vapor deposition process with different microstructures and thicknesses. Processing condition and surface status of substrate.affect on the microstructure of SiC coating layer. Sphere indentation method on trilayer configuration was conducted to measure the fracture strength of the SiC film. The fracture strength of SiC film with different microstructure and thickness were characterized by trilayer strength measurement method nanoindentation technique was also used to characterize the elastic modulus and th ε hardness of the SiC film. Relationships between microstructure and mechanical properties of CVD SiC thin film were discussed.

Analytical Method for Determination of Microstructure of SBR and SBR Content in Blended Rubber Composites Using Pyrolytic Technique

  • Eunji Chae;Sung-Seen Choi
    • Elastomers and Composites
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    • v.57 no.4
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    • pp.188-196
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    • 2022
  • Styrene-butadiene rubber(SBR) is a copolymer of styrene and butadiene. It is composed of 1,2-unit, 1,4-unit, and styrene, and its properties are dependent on its microstructure. In general, rubber composites contain a single rubber or a blended rubber. Similarly, SBR is used by mixing with natural rubber(NR) and butadiene rubber(BR). The composition of a rubber article affects its physical and chemical properties. Herein, an analytical method for determining the microstructure of SBR using via pyrolysis is introduced. Pyrolysis-gas chromatography/mass spectrometry is widely used to analyze the microstructure of polymeric materials. The microstructure of SBR can be determined by analyzing the principal pyrolysis products formed from SBR, such as 4-vinylcyclohexene, styrene, 2-phenylpropene, 3-phenylcyclopentene, and 4-phenylcyclohexene. An analytical method for determining the composition of SBR/NR, SBR/BR, and SBR/NR/BR blends via pyrolysis is introduced. The composition of blended rubber can be determined by analyzing the principal pyrolysis products formed from each rubber component.

A New Method of HTS Material Synthesis by Combination of MCA and SHS

  • Korobova, N.;Soh, Dea-Wha
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.07b
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    • pp.1270-1273
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    • 2004
  • The combination of methane-chemical activation and Self-propagating High-temperature synthesis (SHS) has widened the possibilities for both methods. For YBCO systems the investigation showed that a short-term mechano-chemical activation of initial powders before SHS leads to single-phase and ultra-fine products. A new technique for preparation ultra-fine high-temperature superconductors of YBCO composition with a grain size d < $1{\mu}m$ is developed. The specific feature of the technique is formation of the $YBa_2Cu_3O_{7-x}$ crystalline lattice directly from an X-ray amorphous state arising as a result of mechanical activation of the original oxide mixture. The technique allows the stage of formation of any intermediate reaction products to be ruled out. X-ray and magnetic studies of ultra-fine high temperature superconductors (HTS) are carried out. Dimension effects associated with the microstructure peculiarities are revealed. A considerable enhancement of inter-grain critical currents is found to take place in the ultra-fine samples investigated.

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The Seeding Effects on the Phase Transformation of Sol-Gel Derived PZT Powder

  • Lee, Hyun-Tae;Lee, Wan-In;Kim, Yoo-Hang;Whang, Chin-Myung
    • Bulletin of the Korean Chemical Society
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    • v.23 no.8
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    • pp.1078-1084
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    • 2002
  • The formation temperature for the perovskite lead zirconate titanate [Pb(Zr,Ti)O3, PZT] derived from sol-gel route was lowered by more than $100^{\circ}C$ with the addition of crystallographically suitable seed particles, such as barium titanat e (BT) or PZT. We investigated the effect of seeding on the crystallization of perovskite phase and in the microstructure of the sol-gel derived PZT powder by varying the concentration, size and chemical species of seed particles. The phase transition as a function of temperature was monitored by DTA, XRD, and Raman spectroscopy, and the interface between the seed particle and grown PZT layer was analyzed by SEM and high resolution TEM techniques. It was found that both the heterogeneous and homogeneous nucleation contributes competitively in the formation of perovskite PZT grains.

[ $Ferro-Titanit^{(R)}$ ] - Influence of Chemical Composition and Heat Treatment on Microstructure and Mechanical Properties in Tensile Tests

  • Marsoner, S.;Ebner, R.;Foller, M.;Meyer, H.
    • Proceedings of the Korean Powder Metallurgy Institute Conference
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    • 2006.09a
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    • pp.114-115
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    • 2006
  • [ $FerroTitanit^{(R)}$ ] is an extremely high alloyed PM material containing about 20 to 35 wt.% titanium based carbides. Such materials are designed to achieve a high wear resistance, but the high volume fraction of hard phases causes a comparable low ductility in case of tensile loading. In the present study the mechanical properties of different Ferro-Titanit grades (variations in chemical composition and in heat treatment) were investigated by means of tensile tests. The mechanical properties and the fracture behaviour will be related to the chemical composition, the heat treatment and the microstructure.

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Microstructure Observations in $(1-x)NdAlO_3-xCaTiO_3$ System ($(1-x)NdAlO_3-xCaTiO_3$ 시스템의 미세구조 관찰)

  • Lee, Hwack-Joo;Ryu, Hyun;Park, Hyun-Min;Cho, Yang-Koo;Kim, Jae-Chun;Nahm, Sahn
    • Applied Microscopy
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    • v.32 no.1
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    • pp.9-15
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    • 2002
  • Microstructural investigations of $(1-x)NdAlO_3-xCaTiO_3$ (NACT) complex perovskite compounds were carried out using X-ray diffractometry, neutron diffraction and transmission electron microscopy. When $0.3{\leq}x{\leq}0.9$, NACT had not only the 1 : 1 chemical ordering of cations but also the antiphase and inphase tilting of oxygen octahedron and the antiparallel shift of cations. Both the antiphase boundaries and the ferroelastic domains were present in the microstructure. The long and straight ferroelastic domains became degenerate as x decreases. When x was smaller than 0.3, the chemical ordering was absent and the antiphase tilting of oxygen octahedron was observed. The defects like tangled dislocations and the second phase were also found in the microstructure.

Effect of Samarium Addition on Microstructure and Thermal Conductivity of Al-Si-Cu Aluminum Alloy (Sm 첨가에 따른 Al-Si-Cu 알루미늄 합금의 미세조직 및 열전도도 변화)

  • Choi, Jin-Ju;Kang, Yubin;Im, Byoungyong;Lee, Chan-Gi;Kim, Hangoo;Park, Kwang Hoon;Kim, Dae-Guen
    • Korean Journal of Materials Research
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    • v.30 no.1
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    • pp.31-37
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    • 2020
  • In this study, the effects of Sm addition (0, 0.05, 0.2, 0.5 wt%) on the microstructure, hardness, and electrical and thermal conductivity of Al-11Si-1.5Cu aluminum alloy were investigated. As a result of Sm addition, increment in the amount of α-Al and refinement of primary Si from 70 to 10 ㎛ were observed due to eutectic temperature depression. On the other hand, Sm was less effective at refining eutectic Si because of insufficient addition. The phase analysis results indicated that Sm-rich intermetallic phases such as Al-Fe-Mg-Si and Al-Si-Cu formed and led to decrements in the amount of primary Si and eutectic Si. These microstructure changes affected not only the hardness but also the electrical and thermal conductivity. When 0.5 wt% Sm was added to the alloy, hardness increased from 84.4 to 91.3 Hv, and electric conductivity increased from 15.14 to 16.97 MS/m. Thermal conductivity greatly increased from 133 to 157 W/m·K.