• Title/Summary/Keyword: chemical materials

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Materials for Nano Patterning in Semiconductor Fabrication; Organosilicon and High Carbon-containing Materials for Spin Coating Hardmask (반도체 나노 패터닝 구현 재료: Spin 코팅 Hardmask용 유기실리콘 및 고탄소 물질)

  • Cho, Hyeon-Mo;Cheon, Hwan-Sung;Kim, Sang-Kyun;Chang, Tu-Won;Kim, Jong-Seob
    • Polymer Science and Technology
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    • v.20 no.5
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    • pp.472-480
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    • 2009
  • 반도체 미세화가 진행되면서, 이를 성공하기 위해 많은 재료물질이 요구되어진다. 이 중 미세 패턴의 붕괴를 막고 깊은 패턴을 새기기 위해서 필요한 hardmask 재료가 있다. Hardmask는 유기실리콘 재료와 탄소 함량이 높은 재료로 주로 구성되고, 이들은 193 nm 빛과 관련된 광학적 특성을 가지면서 특정 플라즈마에 대한 에치 저항성을 가지는 물성을 가지도록 디자인/합성/배합되어져 있다. 또한, 접합되는 다른 박막과의 compatibility및 용매에 대한 solubility 등이 적절해야만 나노미터 수준의 defect 없는 패턴을 구현할 수 있다.

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LS-MOCVD OF BARIUM STRONTIUM TITANATE THIN FILMS USING NOVEL PRECURSORS

  • Kwon, Hyun-Goo;Oh, Young-Woo;Park, Jung-Woo;Lee, Young-Kuk;Kim, Chang-Gyoun;Kim, Do-Jin;Kim, Yunsoo
    • Proceedings of the Korea Crystallographic Association Conference
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    • 2002.11a
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    • pp.19-19
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    • 2002
  • Perovskite-type titanate dielectrics have attracted much attention in memory devices such as DRAMs or FeRAMs due to their high dielectric constants. However, low volatility of the Ba, Sr, Pb or Zr precursors with only thd ligands has limitations in obtaining high quality thin films by liquid source metal organic chemical vapor deposition (LS-MOCVD) processes. To improve the volatility of these precursors, many attempts have been made such as adding polyether ligands to satisfy the coordinative saturation. We report the synthesis of new precursors Ba(thd)₂(tmeea) and Sr(thd)₂(tmeea), where tmeea = tris[2-(2-methoxyethoxy)ethyl]amino, and LS-MOCVD of barium strontium titanate (BSTO) thin films using these precursors. Due to increased basicity of amines compared with ethers, it is expected that the nitrogen-donor ligand will make a strong bond to a metal than an analogous oxygen-donor ligand, consequently improving the volatility and thermal behavior of these precursors. Thin films of BSTO were grown on Pt(111)/SiO₂/Si(100) substrates by LS-MOCVD using a cocktail source consisting of the conventional Ti precursor Ti(thd)₂(O/sup i/Pr), and these new Ba and Sr precursors. As-grown films were characterized by XPS, SEM, XRD, XRF, and C-V and I-V measurements. BSTO films grown at 420℃ were stoichiometric barium strontium titanate with very smooth surface morphology and their dielectric constants were found to be as targe as 450. Dependence of the composition, microstructure and the electrical properties of the BSTO films on the growth temperature, annealing temperature, working pressure, and the composition of the cocktail source will be discussed.

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Determination of Dibutyltin in Sediments Using Isotope Dilution Liquid Chromatography-Inductively Coupled Plasma Mass Spectrometry

  • Yim, Yong-Hyeon;Park, Ji-Youn;Han, Myung-Sub;Park, Mi-Kyung;Kim, Byung-Joo;Lim, Young-Ran;Hwang, Eui-Jin;So, Hun-Young
    • Bulletin of the Korean Chemical Society
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    • v.26 no.3
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    • pp.440-446
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    • 2005
  • A method is described for the determination of dibutyltin (DBT) in sediment by isotope dilution using liquid chromatography inductively-coupled plasma/mass spectrometry (LC-ICP/MS). To achieve the highest accuracy and precision, special attentions are paid in optimization and evaluation of overall processes of the analysis including extraction of analytes, characterization of the standards used for calibration and LC-ICP/MS conditions. An approach for characterization of natural abundance DBT standard has been developed by combining inductively-coupled plasma/optical emission spectrometry (ICP/OES) and LC-ICP/MS for the total Sn assay and the analysis of Sn species present as impurities, respectively. An excellent LC condition for separation of organotin species was found, which is suitable for simultaneous DBT and tributyltin (TBT) analysis as well as impurity analysis of DBT standards. Microwave extraction condition was also optimized for high efficiency while preventing species transformation. The present method determines the amount contents of DBT in sediments with expanded uncertainty of less than 5% and its result shows high degree of equivalence with reference values of an international inter-comparison and a certified reference material (CRM) within stated uncertainties.

Quantitative Evaluation of Scratch Behavior for Polymeric Materials (고분자 소재의 스크래치 거동의 정량적 평가)

  • Baek, Ki-Wan;Lee, Sung-Goo;Lee, Jae-Heung;Choi, Kil-Yeong;Weon, Jong-Il
    • Polymer(Korea)
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    • v.33 no.4
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    • pp.273-283
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    • 2009
  • Recent research issues on the scratch behaviors of polymeric materials has been investigated. In this study, the scratch characterization of polymeric materials with respect of experimental parameters, such as nature of the material, temperature, applied load, test speed, surface treatment, scratch number of times, polymer structure/functional groups, degree of cross-linking, and crystallinity, are reviewed. In addition, the testing standards and methodologies which could quantify the scratch behaviors are introduced and the current international standards are compared and summarized. The latest technical approaches for evaluating the scratch behaviors and improving the scratch resistance of polymers are also discussed.

High-Performance and Fabrication of Graphene-based Flexible Supercapacitor

  • Ra, Eun Ju;Han, Jae Hee;Kim, Kiwoong;Lee, Sun Suk;Kim, Tae-Ho;An, Ki-Seok;Lim, Jongsun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.442-442
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    • 2014
  • Although electrochemical capacitors (ECs), also known as supercapacitors or ultracapacitors, is one of the most promising energy-storage devices because of its high power density, super-high cycle life, and safe operation. We herein report a synthesis of graphene-based flexible films by kneading method. Thus, a device can be readily made by sandwiching a polymer membrane included ionic liquid electrolytes between two identical graphene-based flexible films. Devices made with these electrodes exhibit ultrahigh energy density values while maintaining the high power density and excellent cycle stability of ECs. Moreover, these ECs maintain excellent electrochemical attributes under high mechanical stress and thus hold promise for high-energy, flexible electronics.

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A study on the Corrosion Detection Sensor using Multi-Wall Carbon Nanotube (다중벽 탄소나노튜브를 이용한 철근 부식 검출 센서 제작 연구)

  • Park, Soobin;Kim, Sungyeon;Lee, Sujeong;Choi, Munjeong;Hong, Yeongjun;Kwon, Sungjun;Yoo, Bongyoung;Yoon, Sanghwa
    • Journal of the Korean institute of surface engineering
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    • v.54 no.4
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    • pp.194-199
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    • 2021
  • In this study, rebar corrosion detection sensor was fabricated using multi-walled carbon nanotubes (MWCNTs). MWCNTs were pre-treated in the acid electrolytes to attach the carboxylic acid to the surface of MWCNTs. The fabricated sensor was attached on the surface of rebar and it detected the corrosion of steel using LCR meter with variation of capacitance. The surface morphology and electrical properties were characterized using scanning electron microscope (SEM) and electrical test equipment, respectively. To verify the corrosion detection characteristics, comparison experiment using plastic bar was performed. Moreover, mechanism of corrosion detection sensor was discussed.

Studies on Mechanical Interfacial Properties of Kevlar-29 Fibers Reinforced Composites (Kevlar-29 섬유강화 복합재료의 기계적 계면 특성 연구)

  • Park, Soo-Jin;Seo, Min-Kang;Ma, Tae-Jun;Lee, Jae-Rock
    • Proceedings of the Korean Society For Composite Materials Conference
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    • 2001.10a
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    • pp.158-162
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    • 2001
  • The effects of chemical treatment on Kevlar-29 fibers have been studied in a composite system. The surface characteristics of the Kevlar-29 fibers were characterized by pH, acid-base value and X-ray photoelectron spectroscopy (XPS). The mechanical interfacial properties of final composites were studied by interlaminar shear strength (ILSS) and critical stress intensity factor ($K_{IC}$). Also, the impact properties of the composites were investigated in the differentiating studies between initiation and propagation energies, and ductile index (DI) along with maximum farce and total energy. It was found that the chemical treatment with phosphoric acid ($H_3PO_4$) solution significantly affected the degree of adhesion at interfaces between fibers and resin matrix, resulting in improving the mechanical interfacial strength of the composites. This was probably due to the presence of chemical polar groups on Kevlar surfaces, leading to an increment of interfacial binding force in a composite system.

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Synthesis and Characterization of New Dihydroindolo[3,2-b]indole and 5,6-Bis(octyloxy)-4,7-di(thiophen-2-yl)benzo[c][1,2,5]thiadiazole-Based Polymer for Bulk Heterojunction Polymer Solar Cells

  • Kranthiraja, Kakaraparthi;Gunasekar, Kumarasamy;Song, Myungkwan;Gal, Yeong-Soon;Lee, Jae Wook;Jin, Sung-Ho
    • Bulletin of the Korean Chemical Society
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    • v.35 no.5
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    • pp.1485-1490
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    • 2014
  • We have designed and developed a new ladder type tetrafused ${\pi}$-conjugated building block such as dihydroindolo[3,2-b]indole (DINI) and investigated its role as an electron rich unit. The photovoltaic properties of a new semiconducting ${\pi}$-conjugated polymer, poly[[5,10-bisoctyl-5,10-dihydroindolo[3,2-b]indole-[5,6- bis(octyloxy)-4,7-di(thiophen-2-yl)benzo[c][1,2,5]thiadiazole]], represented by PDINI-OBTC8 are described. The new polymer PDINI-OBTC8 was synthesized in donor-acceptor (D-A) fashion, where fused ${\pi}$-conjugated tetracyclic DINI, and 5,6-bis(octyloxy)-4,7-di(thiophen-2-yl) benzo[c][1,2,5]thiadiazole (OBTC8) were employed as electron rich (donor) and electron deficient (acceptor) moieties, respectively. The conventional bulk heterojunction (BHJ) device structure ITO/PEDOT:PSS/PDINI-OBTC8:PCB71M/LiF/Al was utilized to fabricate polymer solar cells (PSCs), which comprises the blend of PDINI-OBTC8 and [6,6]-phenyl-$C_{71}$-butyric acid methyl ester ($PC_{71}BM$) in BHJ network. A BHJ PSC that contain PDINI-OBTC8 delivered power conversion efficiency (PCE) value of 1.68% with 1 vol% of 1,8-diidooctane (DIO) under the illumination of A.M 1.5G 100 $mW/cm^2$.

Effects on Addition of Metal Oxides with Low Workfunctions on the Ca-Sr-Ba Oxide Cathodes for VUV Ionizers (VUV 이오나이저용 Ca-Sr-Ba계 산화물 캐소드에 낮은 일함수를 갖는 금속산화물 첨가의 영향)

  • Park, Seung-Kyu;Lee, Jonghyuk;Kim, Ran Hee;Jung, Juhyoung;Han, Wan Gyu;Lee, Soo Huan;Jeon, Sung Woo;Kim, Dae Jun;Kim, Do-Yun;Lee, Kwang-Sup
    • Korean Journal of Materials Research
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    • v.29 no.4
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    • pp.241-251
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    • 2019
  • There are several manufacturing techniques for developing thermionic cathodes for vacuum ultraviolet(VUV) ionizers. The triple alkaline earth metal emitters(Ca-Sr-Ba) are formulated as efficient and reliable thermo-electron sources with a great many different compositions for the ionizing devices. We prepare two basic suspensions with different compositions: calcium, strontium and barium. After evaluating the electron-emitting performance for europium, gadolinium, and yttrium-based cathodes mixed with these suspensions, we selected the yttrium for its better performance. Next, another transition metal indium and a lanthanide metal neodymium salt is introduced to two base emitters. These final composite metal emitters are coated on the tungsten filament and then activated to the oxide cathodes by an intentionally programmed calcination process under an ultra-high vacuum(${\sim}10^{-6}torr$). The performance of electron emission of the cathodes is characterized by their anode currents with respect to the addition of each element, In and Nd, and their concentration of cathodes. Compared to both the base cathodes, the electron emission performance of the cathodes containing indium and neodymium decreases. The anode current of the Nd cathode is more markedly degraded than that with In.