• 제목/요약/키워드: chemical doping

검색결과 535건 처리시간 0.025초

LPCVD로 제조된 다결정실리콘에 As를 주입한 시료의 비저항에 대한 온도의존성 연구 (Temperature Dependence of Resistivity in As Implanted LPCVD Polycrystalline Silicon Films)

  • 하형찬;김정태;고철기;천희곤;오계환
    • 한국재료학회지
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    • 제1권1호
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    • pp.23-28
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    • 1991
  • 저압 화학 증착법으로 증착된 다결정실리콘에 As를 이온주입하여 As농도와 $25~105^{\circ}C$ 범위의 측정온도에 따른 비저항의 변화를 조사하였다. 비저항이 최대가 되는 적정 As농도가 존재하였으며 이때 비저항의 온도의존성면에서 활성화에너지 값도 최대를 보였다. Passivation공정후 감소된 비저항이 $O_2$플라즈마 처리와 $N_2$ 분위기에서의 열처리에 의하여 회복되는 현상에 대하여 설명한다.

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GC/MS를 이용한 MX 유도체화 분석법 연구 (Analysis of derivatized MX by Gas Chromatography/Mass Spectrometry)

  • 유은아;박도연;이향기;명승운
    • 분석과학
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    • 제15권3호
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    • pp.221-228
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    • 2002
  • MX [3-chloro-4(dichloromethyl)-5-hydroxy-2(5H)-furanone]는 수돗물의 소독을 위해 첨가한 염소와 수중의 유기물이 반응하여 생성되는 강력한 변이원성 물질이다. 본 논문에서는 GC/MS를 이용하여 유도체화 시약인 2% 황산-methanol, iso-propanol, sec-butanol, n-butanol을 이용하여 MX의 유도체화를 비교하였으며, 이온화 방법으로 EI 와 NCI를 비교한 결과, NCI 방법에서 검출 한계가 1.25 pg으로 EI 방법에서는 25 pg이였으며, 25~2500 pg 범위에서 직선성을 나타내었다.

수소 첨가에 의한 비정질 ITO 박막의 기계적 특성 연구 (Effect of Hydrogen on Mechanical S tability of Amorphous In-Sn-O thin films for flexible electronics)

  • 김서한;송풍근
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2018년도 춘계학술대회 논문집
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    • pp.56-56
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    • 2018
  • Transparent conductive oxides (TCOs) have attracted attention due to their high electrical conductivity and optical transparency in the visible region. Consequently, TCOs have been widely used as electrode materials in various electronic devices such as flat panel displays and solar cells. Previous studies on TCOs focused on their electrical and optical performances; there have been numerous attempts to improve these properties, such as chemical doping and crystallinity enhancement. Recently, due to rapidly increasing demand for flexible electronics, the academic interest in the mechanical stability of materials has come to the fore as a major issue. In particular, long-term stability under bending is a crucial requirement for flexible electrodes; however, research on this feature is still in the nascent stage. Hydrogen-incorporated amorphous In-Sn-O (a-ITO) thin films were fabricated by introducing hydrogen gas during deposition. The hydrogen concentration in the film was determined by secondary ion mass spectrometry and was found to vary from $4.7{\times}10^{20}$ to $8.1{\times}10^{20}cm^{-3}$ with increasing $H_2$ flow rate. The mechanical stability of the a-ITO thin films dramatically improved because of hydrogen incorporation, without any observable degradation in their electrical or optical properties. With increasing hydrogen concentration, the compressive residual stress gradually decreased and the subgap absorption at around 3.1 eV was suppressed. Considering that the residual stress and subgap absorption mainly originated from defects, hydrogen may be a promising candidate for defect passivation in flexible electronics.

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휘발성유기화합물가스에 대한 폴리아닐린 센서의 감도 향상 (Sensitivity Enhancement of Polyaniline Sensor to Volatile Organic Compounds)

  • 유준부;유비;임정옥;변형기;허증수
    • 한국재료학회지
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    • 제17권8호
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    • pp.433-436
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    • 2007
  • Nano-structured polyaniline have been synthesized by interfacial polymerization method at room temperature. An aqueous solution of aniline in chloroform and another solution of ammonium peroxydisulfate in doping acid were prepared at different times terminated with methanol at room temperature. SEM, UV-vis were used to characterize the polyaniline with regard to their morphology and structure. The diameter and length of polyaniline can be controlled by the reaction time. Nano-structured polyaniline were found to have superior sensitivity for volatile organic compounds(VOCs). As the reaction time to increase from 30minute to 2hours the sensitivity were decreased to VOCs vapors. The sensitivity of Nano-structured polyaniline sensor appeared to VOCs better than the sensitivity of chemical synthesis sensors. The sensitivity of Nano-structured polyaniline sensor improved benzene vapors.

플라즈마 화학기상 증착법에 의한 B이 첨가된 ZnO 박막의 증착에 관한 연구 (Deposition of B-doped ZnO Thin Films by Plasma Enhanced Chemical Vapor Deposition)

  • 최준영;조해석;김영진;이용의;김현준
    • 한국재료학회지
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    • 제5권5호
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    • pp.568-574
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    • 1995
  • We investigated the effects of B-doping on the growth mechanism of ZnO films. The B-doped ZnO films, which were widely applied for transparent conducting electrode, were deposited by plasma enhanced chemcial vapor depostion(PECVD) using diethylzinc(DEZ), No.sub 2/. and B$_{2}$H$_{6}$. The deposition conditions were a sbustrate temperature of 30$0^{\circ}C$, an rf power of 200, and a chamber pressure of 1 torr. At the given depostion condition, the growth rate of B-doped ZnO thin films was higher than that of undoped ones, but didn't change even with further increasing B$_{2}$H$_{6}$ flow rate and the interplanar distance between(0002) planes was reduced as B atoms substituted Zn sites.s.

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A Review of Graphene Plasmons and its Combination with Metasurface

  • Liu, Chuanbao;Bai, Yang;Zhou, Ji;Zhao, Qian;Qiao, Lijie
    • 한국세라믹학회지
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    • 제54권5호
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    • pp.349-365
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    • 2017
  • Graphene has attracted a lot of attentions due to the unique electrical and optical properties. Compared with the noble metal plasmons in the visible and near-infrared frequencies, graphene can support surface plasmons in the lower frequencies of terahertz and mid-infrared and it demonstrates an extremely large confinement at the surface because of the particular electronic band structures. Especially, the surface conductivity of graphene can be tuned by either chemical doping or electrostatic gating. These features make graphene a promising candidate for plasmonics, biosensing and transformation optics. Furthermore, the combination of graphene and metasurfaces presents a powerful tunability for exotic electromagnetic properties, where the metasurfaces with the highly-localized fields offer a platform to enhance the interaction between the incident light and graphene and facilitate a deep modulation. In this paper, we provide an overview of the key properties of graphene, such as the surface conductivity, the propagating surface plasmon polaritons, and the localized surface plasmons, and the hybrid graphene/metasurfaces, either metallic and dielectric metasurfaces, from terahertz to near-infrared frequencies. Finally, there is a discussion for the current challenges and future goals.

n-GaAs의 V/III족 비율에 따른 오믹 저항 연구 (A study on the Ohmic contact resistance as function of V/III ratio of n-GaAs)

  • 김인성;김상택;김선훈;기현철;고항주;김회종;전경남;김효진
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.25-26
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    • 2008
  • Electrical properties of Pt/Ti/Au/Pt contacts to n-GaAs were characterized as the V/III ratio of GaAs grown by metalorganic chemical vapor deposition were 25, 50, and 100, respectively. The samples have been annealed during 30sec at 350 and $450^{\circ}C$ in rapid thermal annealing, and those specific contact resistance investigated by using transmission line method. According to experimental results, the specific contact resistance between p-metal and GaAs was decreased as the V/III ratio was lower. These results indicate that Si doping concentration of GaAs increased as the vacancy of V-series of GaAs was high.

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몰리브덴이 첨가된 이산화바나듐으로 표면처리한 탄소계 전도성판의 전기저항특성 (Electrical Resistance of Mo-doped $VO_2$ Films Coated on Graphite Conductive Plates by a Sol-gel Method)

  • 최원규;정혜미;이종현;임세준;엄석기
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2008년도 추계학술대회B
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    • pp.2007-2010
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    • 2008
  • Vanadium pentoxide ($V_2O_5$) powder was prepared and mixed with Molybdenum Oxides ($MoM_3$) to form Mo-doped and -undoped $VO_2$ films by a sol-gel method on graphite conductive substrates. X-Ray diffraction (XRD) and scanning electron microscopy (SEM) was used to investigate the chemical compositions and microstructures of the Mo-doped and -undoped $VO_2$ films. The variation of electrical resistance was measured as a function of temperature and stoichiometric composition between vanadium and molybdenum. In this study, it was found that Mo-doped and -undoped $VO_2$ shows the typical negative temperature coefficient (NTC) behavior. As the amount of the molybdenum increases, the electrical resistance of Modoped $VO_2$ film gets reduced under the transition temperature and a linear decrease in the transition temperature is observed. From these experimental results, we can conclude that the electrical resistance behavior with temperature change of $VO_2$ films can be utilized as a self-heating source with the electrical current flowing through the graphite substrate.

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Effect of FTO coated on stainless steel bipolar plate for PEM fuel cells

  • 박지훈;장원영;변동진;이중기
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2009년도 춘계학술발표대회
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    • pp.55.2-55.2
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    • 2009
  • A polymer electrolyte membrane (PEM) fuel cell has been getting large interest as a typical issue in useful applications. The PEMFC is composed of a membrane, catalyst and the bipolar plate. SnOx:F films on SUS316 stainless steel were prepared as a function of substrate with using electron cyclotron resonance-metal organic chemical vapor deposition (ECR-MOCVD) in order to achieve the corrosion-resistant and low contact resistance bipolar plates for PEM fuel cells. The SnOx:F films coated on SUS316 substrate at surface plasma treatment for excellent stability, before/after heat treatment for good crystalline structure and microwave power for were characterized by X-ray diffraction (XRD), auger electron microscopy (AES) and field emission-scanning electron microscopy (FE-SEM). The SnOx:F film coated on SUS316 substrate with various process parameters were able to observe optimum interfacial contact resistance (ICR) and corrosion resistance. It can be concluded that fluorine-doping content plays an important function in electrical property and characteristic of corrosion-protective film.

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포페이트계열 형광체의 합성 및 광특성 평가 (Preparation and Luminescent Characteristics of Phosphate-Based Phosphors)

  • 노세철;김유혁
    • 한국재료학회지
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    • 제12권1호
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    • pp.21-26
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    • 2002
  • In order to search new phosphors for plasma display panel(PDP), phosphate hosts which has a host excitation band at around 150nm were prepared and their luminescent properties were investigated. In the preparation of $YPO_4: Eu\; and\; (Y,Gd)PO_4: Eu$ phosphors, the effect of oxide and oxalate starting materials on prepared phosphors were compared in terms of relative emission intensities and particle characteristics. The results showed that oxalate starting materials gave better performance in emission intensities and smaller size and more round shape phosphors which would be more applicable for high resolution display. Additionally, Gd, V, Nb and Ta ions were doped to $YPO_4:Eu$ and the luminescent properties of the resulant solid solutions were investigated to find efficient sensitizer. Among these ions, Gd, V and Nb ions increased the emission intensities of parent phosphor to around 10%. While Nb ion gave the best result in emission intensities, CIE color coordinate were improved by doping V ion into $YPO_4:Eu$ phosphor to give x=0.6523, y=0.3406 compared to commercial sample.