• Title/Summary/Keyword: chemical cleaning

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Removal of Polymer residue on Graphene by Plasma treatment

  • Yun, Hye-Ju;Jeong, Dae-Seong;Lee, Geon-Hui;Sim, Ji-Ni;Lee, Jeong-O;Park, Jong-Yun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.375.2-375.2
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    • 2016
  • 그래핀(Graphene)은 원자 한 층 두께의 얇은 특성에 기인하여 우수한 투과도(~97.3%)를 나타내며, 높은 전자 이동도($200,000cm^2V^{-1}s^{-1}$)로 인하여 전기 전도도가 우수한 2차원 전자소재이다. 또한 유연하고 우수한 기계적 물성을 가지고 있어 실제로 다양한 소자에서 활용되고 있다. 그래핀을 이용하여 다양한 소자로 응용하기 위한 과정 중 하나인 포토리소그래피 공정(Photolithography process)은 원하는 패턴을 만들기 위해 제작하고자 하는 기판 위에 포토레지스트(Photoresist)를 코팅하는 과정을 거치게 된다. 하지만 이러한 과정은 소자 제작에 있어서 포토레지스트 잔여물을 남기게 된다. 그래핀 위에 남은 포토레지스트 잔여물은 그래핀의 우수한 전기적 특성을 저하시켜 소자특성에 불이익을 주게 된다. 본 연구에서는 수소 플라즈마를 이용하여 그래핀 위에 남은 중합체(Polymer) 잔여물을 제거한다. 사용한 그래핀은 화학 기상 증착법(Chemical vapor deposition)을 이용하여 성장시켰으며, PMMA(Poly(methyl methacrylate))를 이용하여 이산화규소(silicon dioxide) 기판에 전사하였다. 그래핀의 손상 없이 중합체 잔여물을 제거하기 위해 플라즈마 처리시간을 15초부터 1분까지 늘려가며 연구를 진행하였으며, 플라즈마 처리 시간에 따른 중합체 잔여물의 제거 정도와 그래핀의 보존 여부를 확인하기 위해 라만 분광법(Raman spectroscopy)과 원자간력현미경(Atomic force microscopy)을 사용하였다. 본 연구 결과를 통해 간단한 플라즈마 처리로 보다 나은 특성의 그래핀 소자를 얻게 됨으로써, 향상된 특성을 가진 그래핀 소자로 산업적 응용 가능성을 높일 수 있을 것이라 생각된다.

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The Effect of Excess Samarium Oxide on the Preparation of Sm-Fe Alloy Powder by Reduction-diffusion Method (환원-확산법에 의한 Sm-Fe 합금분말 제조시 Sm2O3 첨가량의 영향)

  • Kwak, Hun;Lee, Jung-Goo;Choi, Chul-Jin
    • Journal of Powder Materials
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    • v.16 no.5
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    • pp.336-341
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    • 2009
  • To produce alloy powders with only Sm$_2$Fe$_{17}$ single phase by reduction-diffusion (R-D) method, the effect of excess samarium oxide on the preparation of Sm-Fe alloy powder during R-D heat treatment was studied. The quantity of samarium oxide was varied from 5% to 50% whereas iron and calcium were taken 0% and 200% in excess of chemical equivalent, respectively. The pellet type mixture of samarium, iron powders and calcium granulars was subjected to heat treatment at 1100$^{\circ}C$ for 5 hours. The R-D treated pellet was moved into deionized water and agitated to separate Sm-Fe alloy powders. After washing them in deionized water several times, the powders were washed with acetic acid to remove the undesired reaction products such as CaO. By these washing and acid cleaning treatment, only 0.03 wt% calcium remained in Sm-Fe alloy powders. It was also confirmed that the content of unreacted $\alpha$-Fe in Sm$_2$Fe$_{17}$ matrix gradually decreased as the percentage of samarium oxide is increased. However, there was no significant change above 40% excess samarium oxide.

(Substrate and pretreatment dependence of Cu nucleation by metal-organic chemical vapor deposition) (유기금속화학기상증착법에 의해 증착된 구리 핵의 기판과 전처리의 의존성)

  • Kwak, Sung-Kwan;Lee, Myoung-Jae;Kim, Dong-Sik;Kang, Chang-Soo;Chung, Kwan-Soo
    • Journal of the Institute of Electronics Engineers of Korea TE
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    • v.39 no.1
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    • pp.22-30
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    • 2002
  • The nucleation of copper(Cu) with (hfac)iu(VTMS) oganometallic precursor is investigated for Si, $Sio_2$, TiN, $W_2N$ substrates. As the deposition temperature is increased, the dominant growth mechanism is observed to change from the nucleation of Cu particles to the clustering of Cu nuclei around $180^{\ciec}C$, independent of the employed substrates. It is also observed that the cleaning of substrate surfaces with the diluted HF solution improves the selectivity of Cu nucleation between TiN and $Sio_2$ substrates. Dimethyldichlorosilane treatment is found to passivate the surface of TiN substrate, contrary to the generally accepted belief, when the TiN substrate is cleaned by $H_2O_2$ solution before the treatment.

A Study on the Remanufacturing Effect of Aged Three-Way Catalysts (사용후 가솔린 자동차 삼원촉매의 재제조 효과 고찰)

  • Kwak, Seung-Min;Lim, Jong-Sun;Kim, Tae-Won;Park, Hae-Kyoung
    • Applied Chemistry for Engineering
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    • v.20 no.4
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    • pp.430-436
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    • 2009
  • Deactivated three-way catalysts which had been exposed to gasoline engine exhaust for a long time were remanufactured by ultra sonic cleaning with distilled water, sulfuric acid solution and impregnation with precious metals (Pt, Pd, Rh). The catalytic properties as well as conversion reactivity of CO, THC and NOx about fresh, aged and remanufactured catalysts were examined. Most of the pollutants deposited on the aged three-way catalysts were removed in the remanufacturing process of those catalysts. At the same time a little amount of precious metals like Pt and Pd were removed in the remanufacturing process. Under the experimental condition used in this study, in the case of the remanufactured catalysts with impregnation of precious metals, the catalytic activities were recovered to almost the same level, or higher level of that of the fresh catalyst.

Investigation of LC Alignment characteristic by Controlling Ion-beam Irradiation angles (이온빔 조사 각도에 따른 액정 배향 특성 연구)

  • Park, Hong-Gyu;Oh, Byeong-Yun;Kim, Young-Hwan;Kim, Byoung-Yong;Han, Jin-Woo;Chun, Ji-Yun;Han, Jeong-Min;Seo, Dae-Shik
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.04a
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    • pp.43-43
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    • 2008
  • Recently, it is widely studied to liquid crystal (LC) alignment using ion-beam exposure. Because conventional rubbing method has some problems such as defects from dust and electrostatic charges and rubbing scratch during rubbing process. Moreover rubbing method needs cleaning process to remove these defects. Therefore rubbing-free techniques like ion-beam method are strongly required. We studied LC alignment by controlling ion-beam irradiation angles and electro-optical (EO) characteristics of twisted nematic LC on the polyimide surface. In this experiment, a good uniform alignment of the nematic liquid crystal (NLC) with the ion-beam exposure on the polyimide (PI) surface was observed. We also achieved low pretilt angle as function of ion-beam irradiation angles. X-ray photoelectron spectroscopic (XPS) analysis provided chemical evidence for LC alignment by controlling ion-beam irradiation angles. In addition, it can be achieved the good EO properties of the ion-beam-aligned twisted nematic liquid crystal display (TN-LCD) on PI surface. Some other experiments results and discussion will be included in the presentation.

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해저 오염 퇴적층 복원 처리를 위한 BMP 패키지 기술 개발

  • Bae, Jun-Hong;Ha, Mun-Geun;Eo, Gyeong-Hae;Kim, Seung-Hyeok;Park, Chan-Hu;Kim, Byeong-U;Gu, Geun-Hoe;Yun, Cheol-Won
    • Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
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    • 2002.05a
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    • pp.12-16
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    • 2002
  • Soil, ground water and sea bed are exposed to continuous accumulation of polluted materials causing serious environmental damage. It has been reported that such pollution causes a massive mortality of fish stock in rivers by the resuspension of toxic chemicals during strong wind conditions. Therefore, it becomes apparent that there is an immediate demand for the restoration treatment of polluted river bed (or sea bed) sediment layers. Pollution levels of major rivers and ports such as Pal-dang, Kyung-an rivers, Ma-san port are becoming public concern and are posing a serious environmental threat. In particular, the pollution of Shi-hwa river has become a nation wide issue for last few years. In spite of such public concern, the pollution level of such rivers or port are getting worse everyday. In this study, an environmentally sound engineering package is introduced which helps to restore the polluted river bed or sea bed sediments. This engineering package is consisted of a suction facility followed by a series of mechanical, chemical as well as biological treatment units. The suction facility is designed to minimize the secondary pollution due to the resuspension of toxic materials during suction. The sea bed cleaning engineering package is designed to be installed on the top of a floating barge. Such combination of environmental plant and shipbuilding technology provides a cost-effective solution, minimizing the cost involved in the transportation between suction and treatment facilities.

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A implementation of system which checks the vehicle oil identification and quantitative gas (자동차 석유 및 정량주유 체크 시스템의 구현)

  • Jeong, Da-Woon;Baek, Sung-Hyun;Jang, Jong-Wook
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.15 no.6
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    • pp.1277-1282
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    • 2011
  • Recently, many car drivers were damaged by gas station which support similar oil product and not quantitative gas. It were expected to increase above-mentioned damages. By using similar oil products, caused damage are working of lubrication in the fuel line, elf-cleaning function, the part of the early deterioration, impure accumulation in the fuel line, toxicity material in exhaust emissions and unidentified chemical reaction. To prevent these damages, proposed system use in-vehicle state data with OBD-II protocol, measure quantitative gas and similar oil. In this paper, there have implemented similar oil identification and quantitative gas system through OBD-II scanner to provide WiFi communcation by using WinCe development Board.

A Survey on the Management of Chemical Substances and Airborne Concentration in Laundries Exposed to Organic Solvents (일부 세탁소의 유기용제 관리실태 및 공기중 노출농도에 관한 조사)

  • Roh, Young-Man;Kwon, Gi-Bum;Park, Seoung-Hyun;Jeong, Jee-Yeon
    • Journal of Korean Society of Occupational and Environmental Hygiene
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    • v.11 no.1
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    • pp.70-77
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    • 2001
  • This study was conducted to identify the current status of occupational safety and health by checklist and to evaluate the airborne exposure to chemicals and to provide the appropriate recommendation for safety and health of laundries. A total of 20 laundries located in tile Gyungi district area were surveyed from July 20 to September 15, 2000. The prevalence of laundries having a stove and gas range were found to be 25 % and 55 %, respectively. Smoking is not allowed in 60 % of the laundries. Only 10 % of dry-cleaners were isolated. Ventilation systems in laundries had not been annually inspected. Most of the workers didn't put on respirators, MSDS were not available, and storage bottles did not contain warning labels. The bulk samples of dry cleaning agent include many chemicals that are not controlled by the MOL in Korea. The detected airborne organic solvents in the laundries were benzene, toluene, p-xylene, m-xylene, o-xylene, perchloroethylene, and 2-butoxy ethanol. The airborne concentrations of organic solvents were much less than the occupational exposure limits proposed by the Ministry of Labor(MOL) in Korea. But the concentrations of benzene exceeded the TLV of ACGIH. This study showed that the current status of occupational safety and health was not appropriate for workers in laundries. It is recommended that laundry workers should be educated for the treatment and storage of hazardous organic solvents to improve the occupational safety and health of the working environment as well as MSDS usage. Also, extended research and survey for the organic solvents that are not controlled by the MOL has to be conducted.

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Forming Process of Surface Contaminants on Ten-story Stone Pagoda of Wongaksa Temple, Seoul (서울 원각사지 십층석탑의 표면오염물 형성과정)

  • Chun, Yu Gun;Lee, Myeong Seong;Kim, Yuri;Lee, Sun Myung;Lim, Bo A
    • Journal of Conservation Science
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    • v.32 no.3
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    • pp.365-375
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    • 2016
  • This study was interpreted the forming process of surface contaminants on ten-story stone pagoda of Wongaksa temple, Seoul. Results of research, we estimated that black contaminants were formed by graphite stuck carbon in air pollution substance after that gypsum was generated by chemical weathering on stone pagoda. White contaminants were built by recrystallization of calcite that were made by decomposition of finishing materials and structure on the stone surface. To preserve a long-term of stone pagoda in Wongaksa temple, there were required that continuous monitoring, anticorrosion treatment and contaminants cleaning of protective facilities.

Understanding Alginate Fouling in Submerged Microfiltration Membrane System for Seawater Pretreatment (해수전처리를 위한 침지식 정밀여과 멤브레인 시스템에서 Alginate 파울링의 이해)

  • Jang, Hoseok;Kwon, Deaeun;Kim, Jeonghwan
    • Membrane Journal
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    • v.26 no.1
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    • pp.55-61
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    • 2016
  • Organic fouling observed in submerged membrane filtration as a pretreatment for seawater desalination increases energy consumption for membrane operation because of requiring frequent chemical cleaning and membrane replacement. In membrane pretreatment for seawater facing with algae blooms, membrane fouling was observed in submerged microfiltration using sodium alginate model compound which is one of the main components of extracellular polymeric substances. Without aeration, aglinate fouling increased with its concentration while aeration reduced the alginate fouling effectively regardless of its concentration tested. In the absence of aeration, alingate fouling tended to be decreased with increasing calcium concentration. However, this effectiveness was reduced by increasing sodium chloride concentration. At high concentration of sodium chloride and calcium similar to the seawater conditions, aeration reduced initial fouling. However, as time progressed, the effect of increased airflow rate on fouling reduction was not significant, implying that optimum airflow rate to control alginate fouling in submerged microfiltration can exist.