(Substrate and pretreatment dependence of Cu nucleation by metal-organic chemical vapor deposition) |
Kwak, Sung-Kwan
(Dept. of Electronics Engineering, Kyung Hee University)
Lee, Myoung-Jae (Dept. of Electronics Engineering, Kyung Hee University) Kim, Dong-Sik (Dept. of Computer Engineering, Inha Technical College) Kang, Chang-Soo (Dept. of Electronic Engineering, Yuhan College) Chung, Kwan-Soo (Dept. of Electronics Engineering, Kyung Hee University) |
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