• Title/Summary/Keyword: charge-to-breakdown

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Suppression of Boron Penetration into Gate Oxide using Amorphous Si on $p^+$ Si Gated Structure (비정질 실리론 게이트 구조를 이용한 게이트 산화막내의 붕소이온 침투 억제에 관한 연구)

  • Lee, U-Jin;Kim, Jeong-Tae;Go, Cheol-Gi;Cheon, Hui-Gon;O, Gye-Hwan
    • Korean Journal of Materials Research
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    • v.1 no.3
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    • pp.125-131
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    • 1991
  • Boron penetration phenomenon of $p^{+}$ silicon gate with as-deposited amorphous or polycrystalline Si upon high temperature annealing was investigated using high frequency C-V (Capacitance-Volt-age) analysis, CCST(Constant Current Stress Test), TEM(Transmission Electron Microscopy) and SIMS(Secondary Ion Mass Spectroscopy), C-V analysis showed that an as-deposited amorphous Si gate resulted in smaller positive shifts in flatband voltage compared wish a polycrystalline Si gate, thus giving 60-80 percent higher charge-to-breakdown of gate oxides. The reduced boron penetration of amorphous Si gate may be attributed to the fewer grain boundaries available for boron diffusion into the gate oxide and the shallower projected range of $BF_2$ implantation. The relation between electron trapping rate and flatband voltage shift was also discussed.

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SiC/SiO2 Interface Characteristics in N-based 4H-SiC MOS Capacitor Fabricated with PECVD and NO Annealing Processes (PECVD와 NO 어닐링 공정을 이용하여 제작한 N-based 4H-SiC MOS Capacitor의 SiC/SiO2 계면 특성)

  • Song, Gwan-Hoon;Kim, Kwang-Soo
    • Journal of IKEEE
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    • v.18 no.4
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    • pp.447-455
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    • 2014
  • In this research, n-based 4H-MOS Capacitor was fabricated with PECVD (plasma enhanced chemical vapor deposition) process for improving SiC/$SiO_2$ interface properties known as main problem of 4H-SiC MOSFET. To overcome the problems of dry oxidation process such as lower growth rate, high interface trap density and low critical electric field of $SiO_2$, PECVD and NO annealing processes are used to MOS Capacitor fabrication. After fabrication, MOS Capacitor's interface properties were measured and evaluated by hi-lo C-V measure, I-V measure and SIMS. As a result of comparing the interface properties with the dry oxidation case, improved interface and oxide properties such as 20% reduced flatband voltage shift, 25% reduced effective oxide charge density, increased oxide breakdown field of 8MV/cm and best effective barrier height of 1.57eV, 69.05% reduced interface trap density in the range of 0.375~0.495eV under the conduction band are observed.

Electrical properties of the lower dielectrics layer of PDP required high reflectance and low dielectric constants (높은 반사율과 저유전율이 요구되는 PDP의 후면 유전체 층의 전기적 특성)

  • Kwon, Soon-Seok;Ryu, Jang-Ryeol
    • 전자공학회논문지 IE
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    • v.43 no.4
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    • pp.8-12
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    • 2006
  • In this paper, reflectance and the dielectric characteristics for $P_2O_5$-ZnO-BaO system and $SiO_2-ZnO-B_2O_3$ system have been investigated as a function of contents of $TiO_2$. The reflectance was decreased with increasing the contents of $TiO_2$ contents, and the reflectance of $P_2O_5$-ZnO-BaO system was lowered than that of $SiO_2-ZnO-B_2O_3$ system. The dielectric constant of $P_2O_5$-ZnO-BaO system was higher than $SiO_2-ZnO-B_2O_3$ system, and the dielectric constant in the both system was increased with increasing of $TiO_2$ contents. This can explained as the space charge effects. These results are could be applied to the lower dielectrics layer of PDP required high reflective ratio and breakdown strength.

The TDDB Characteristics of Thin $SiO_2$ with Stress Voltage Polarity (스트레스전압 극성에 따른 얇은 산화막의 TDDB 특성)

  • Kim, Cheon-Soo;Yi, Kyoung-Soo;Nam, Kee-Soo;Lee, Jin-Hyo
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.26 no.5
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    • pp.52-59
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    • 1989
  • The reliability of the thin thermal oxide was investigated by using constant current stress method. Polysilicon gate MOS capacitors with oxide thickness range of 20-25nm were used in this experiment. Automatic measurement and statistical data analysis which were essential in reliability evaluation of VLSI process preformed by HP 9000 computer. Based on TDDB results, defect density, breakdown charge (Qbd) and lifetime of oxide film were evaluated. According to the polarity of the stress, some different characteristics were shown. Defect density was 62/$cm^2$ at negative gate injection. The value of Qbd was about 30C/$cm^2$ at positive gate injection, and about 21C/$cm^2$ at negative. The current density acceleration factor was 1.43$cm^2$/A for negative gate injection, and 1.25$cm^2$/A for positive gate injection.

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Preparation and Characterization of Organic-inorganic Hybrid Composite Film with Plate-shaped Alumina by Electrophoretic Deposition as a Function of Aging Time of Sol-Gel Binder

  • Kim, Doo Hwan;Park, Hee Jeong;Choi, Jinsub;Lim, Hyung Mi
    • Journal of the Korean Ceramic Society
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    • v.52 no.5
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    • pp.366-373
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    • 2015
  • Sol-gel binder was prepared by hydrolysis and condensation reaction using boehmite sol and methyltrimethoxysilane as a function of aging-time. The coating slurry was composed of a plate-shape alumina in the sol-gel binder for the EPD process, in which particles dispersed in the slurry were deposited on the electrode under an electric field due to the surface charge. We studied the effects of three parameters: the content of boehmite, the aging time, and the applied voltage, on the physical, thermal, and electrical properties of the hybrid composite films by EPD. The amount of boehmite was 10 ~ 20 wt% and the aging time was 0.5 ~ 72, with a fixed amount of plate-shape alumina of 10 wt%. The condition of applied voltage was 5 ~ 30 V with a distance of 2 cm between the electrode during the EPD process. We confirmed that a structure of hybrid composite films of well-ordered plate alumina was deposited on the substrate when the film was prepared using a sol-gel binder composed of 15 wt% boehmite with 1 hr aging time and EPD at 10 V. The process shows a weight loss of 7% at $500^{\circ}C$ in TGA and a breakdown voltage of 8 kV at $87{\mu}m$.

Motion Characteristics of Particle in Model GIS (모의 GIS내 금속이물의 거동특성)

  • 김경화;이재걸;곽희로
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.13 no.4
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    • pp.152-159
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    • 1999
  • This paper describes the rmtion characteristics of a particle in GIS under AC voltage. To measure the motion characteristics of the particle, a model gas chamber and parallel plain electrodes were designed and manufactured lift-off voltages of wire and spherical particles on the electrode were calculated and rreasured, and electric charge was calculated. By using a high speed carrera, the rmtion characteristics of various particles with aw}ied voltages, such as motion pattern, lift-off time, lift-off height, were analyzed 1be lift-off voltages were greatly affected by diarreters of wire and spherical particles. At voltage around lift-off voltage, the stand-up particle in vertical state rmved up and down between electrodes and the height of the lift-off particle was low. At voltage around breakdown voltage, the particle repeated vertical rotation a few times while they were being lifted off, and then, they were floating between the electrodes.trodes.

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A Study on the Wireless Communication Method for Emergency Broadcasting System in Metro Environments (도시철도용 비상방송시스템을 위한 무선통신방식 연구)

  • Jang, Soo-Hyun;Shin, Dae-Kyo;Yoon, Sang-Hun;Jung, Han-Gyun;Jin, Seong-Keun;Lim, Ki-Taeg
    • The Journal of The Korea Institute of Intelligent Transport Systems
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    • v.17 no.6
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    • pp.202-210
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    • 2018
  • Recently, the subway running in metro environments has a problem in securing the safety of passengers due to the failure of announcement in emergency situations such as breakdown, train accidents and power outage in the underground tunnels. Thus, there is a need to develop an emergency broadcasting system that can provide the announcement to all passenger cars in any emergency situations on the railway route. In this paper, the applicability of various wireless communication technologies for the emergency broadcasting system through the measurement campaign was examined in Seoul metropolitan subway. A WAVE(Wireless Access in Vehicular Environments) is communication technology that can use 5.9GHz dedicated frequency band without charge and it is possible to directly communicate between terminals over 200m without the help of additional relay. Especially, it confirms robust communication performance in the various metro environments, and therefore, it is considered to be suitable as a communication method of a radio-connected emergency broadcasting system for urban subway.

Oxidation of Cu(II)-EDTA by TiO2 Photo-Catalysis(I) - The Effects of TiO2 Loading & Initial pH of Solution - (TiO2 광-촉매 반응에 의한 Cu(II)-EDTA의 산화(I) - TiO2 량과 pH의 영향 -)

  • Chung, Hung-Ho;Park, Eun-Hee;Rho, Jae-Seong;Sung, Ki-Woung;Cho, Young-Hyun
    • Applied Chemistry for Engineering
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    • v.10 no.1
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    • pp.154-159
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    • 1999
  • EDTA (ethylenediaminetetraacetic acid), a chelating agent is most widely used in industrial applications, especially for cleaning of metals in water, frequently prohibits metal removal from water in conventional water treatment technologies. It could be easier to remove aqueous metal ions by the breakdown of DETA complexed bonds first. This study investigated the availability of $TiO_2$ photo-catalysis for the aqueous phase oxidation of Cu(II)-EDTA, under an aerobic condition at $20^{\circ}C$ with $TiO_2$ (Degussa P-25) and 1.79mM of Cu(II)-EDTA. When $TiO_2$ loading was 2.0 g/L, the photo-catalytic oxidation of Cu(II)-EDTA was maximal. The tendency of EDTA adsorption onto the catalyst surface was affected by $TiO_2$ surface charge, and the oxidation rate of Cu(II)-EDTA by photo-catalysis was shown to be dependent upon the tendency of EDTA adsorption before photo-irradiation.

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Park Yeol·Kaneko Humiko Case and Performance (박열·가네코 후미코 사건과 퍼포먼스)

  • Baek, Hyun-Mi
    • Journal of Popular Narrative
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    • v.25 no.2
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    • pp.117-167
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    • 2019
  • The aim of this article is to illuminate the Park Yeol(朴烈)·Kaneko Humiko(金子文子) Case from the perspective of performance, by analyzing newspapers published in Colonial Korea. The Park Yeol·Kaneko Humiko Case include the High Treason Incident(大逆事件) case and the mysterious photo(怪寫眞) case that occurred in Tokyo in Imperial Japan from 1923 to 1926. Even though Park Yeol·Kaneko Humiko were individually imprisoned during this period, they proceeded to act shrewdly and preposterously as performers. First, they made the trial itself into an astonishing case by donning traditional Korean clothes and insisting on using the Korean language in Japanese Imperial Court. Second, they caused the judge in charge to accidentally take the so-called 'mysterious photo,' which later led to the collapse of the Japanese cabinet. The newspapers published in Colonial Korea served as unique stage on which Park Yeol and Kaneko Humiko performed. The newspaper articles reported on the public trials as if it were a drama, describing their clothes, look, and dialogue in public court. The news about them was published not as it occurred but in a plotted sequence because of a press ban, consequentially building suspense among readers. Meanwhile, the Korean newspaper editorials pointed out the injustice of the High Treason Incident, breaking down the Japanese judge's opinion. The Park Yeol·Kaneko Humiko Case was a social drama that revealed the disharmony that led to the breakdown of Taisho Democracy and imprinting national resistance in Japan as well as in Korea.