• Journal of Sensor Science and Technology
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• v.13 no.2
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• pp.101-109
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• 2004

This paper presents a novel z-axis accelerometer with perfectly aligned vertical combs fabricated using the extended sacrificial bulk micromachining (extended SBM) process. The z-axis accelerometer is fabricated using only one (111) SOI wafer and two photo masks without wafer bonding or CMP processes as used by other research efforts that involve vertical combs. In our process, there is no misalignment in lateral gap between the upper and lower comb electrodes, because all critical dimensions including lateral gaps are defined using only one mask. The fabricated accelerometer has the structure thickness of $30{\mu}m$, the vertical offset of $12{\mu}m$, and lateral gap between electrodes of $4{\mu}m$. Torsional springs and asymmetric proof mass produce a vertical displacement when an external z-axis acceleration is applied, and capacitance change due to the vertical displacement of the comb is detected by charge-to-voltage converter. The signal-to-noise ratio of the modulated and demodulated output signal is 80 dB and 76.5 dB, respectively. The noise equivalent input acceleration resolution of the modulated and demodulated output signal is calculated to be $500{\mu}g$ and $748{\mu}g$. The scale factor and linearity of the accelerometer are measured to be 1.1 mV/g and 1.18% FSO, respectively.

• Journal of Sensor Science and Technology
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• v.13 no.2
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• pp.128-132
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• 2004

Short wave infrared (SWIR) photovoltaic devices have been fabricated from metal organic vapour phase epitaxy (MOVPE) grown n- on p- HgCdTe films on GaAs substrates. The MOVPE grown films were processed into mesa type discrete devices with wet chemical etching employed for meas delineation and ZnS surface passivatlon. ZnS was thermally evaporated from effusion cell in an ultra high vacuum (UHV) chamber. The main features of the ZnS deposited from effusion cell in UHV chamber are low fixed surface charge density, and small hysteresis. It was found that a negative flat band voltage with -0.6 V has been obtained for Metal Insulator Semiconductor (MIS) capacitor which was evaporated at $910^{\circ}C$ for 90 min. Current-Voltage (I-V) and temperature dependence of the I-V characteristics were measured in the temperature range 80 - 300 K. The Zero bias dynamic resistance-area product ($R_{0}A$) was about $7500{\Omega}-cm^{2}$ at room temperature. The physical mechanisms that dominate dark current properties in the HgCdTe photodiodes are examined by the dependence of the $R_{0}A$ product upon reciprocal temperature. From theoretical considerations and known current expressions for thermal and tunnelling process, the device is shown to be diffusion limited up to 180 K and g-r limited at temperature below this.

• Journal of Sensor Science and Technology
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• v.29 no.4
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• pp.215-219
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• 2020

MnCo₂S₄/CoS₂ electrode with highly accessible electroactive sites is prepared using the hydrothermal method. The electrode exhibits an areal capacitance of 0.75 Fcm^-2 at 6 mAcm^-2 in 1 M KOH. The capacitance is further increased to 2.06 Fcm^-2 by adding K₃Fe(CN)₆ and K₄Fe(CN)₆ (a redox couple) to KOH. This increment is associated with the redox-active properties of cobalt and manganese transition metals, as well as the ion pair of [Fe(CN)₆]^-3/[Fe(CN)₆]^-4. The capacitance retention of the MnCo₂S₄/CoS₂ electrode is 87.5% for successive 4000 charge-discharge cycles at 10 mAcm^-2 in a composite electrolyte system of KOH and ferri/ferrocyanide. The capacitance enhancement is supported by the lowest equivalent series resistance (0.62 Ωcm^-2) of MnCo₂S₄/CoS₂ in the presence of redox additive couple compared with the bare KOH electrolyte.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.3
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• pp.33-40
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• 2010

Multizeros(multiple order zeros) optical beams which belong to the Laguerre-Gaussian beams, have rotational phase and conically-shaped amplitude structures around multizeros points in their phase and amplitude profiles, respectively. Especially, they have their own characteristics that the multizero points do not vanish over free-space propagation. Therefore, they are expected to be adequate for the applications of long-range optical measurement by using their multizero points as optical markers for the deformation sensing. In this paper, fundamental properties of multizeros optical beams for long-range optical measurement applications are investigated and clarified. In particular, the mathematical investigations are described on the characteristics of multizeoros optical beams such as (1) separation of a multizero into isolated single order zeros, (2) topological charge of zeros distribution which are induced by superposing them. And also the outline of a fundamental experiment and its result are explained briefly.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.45 no.2
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• pp.140-147
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• 2017

This paper describes the design and implementation of previously developed PMU (Power Monitoring Unit) for LiPB (Lithium-ion Polymer Battery) that is electric propulsion used as unmanned aerial vehicle's power source. Improved PMU provides stable voltage and current to various sensors and elctric motors necessary during flight. Voltage and current monitoring function that is measured by improved PMU more precisely be enhanced and the monitoring channel and temperature sensor is added. To verify the improved performance of the equipment, it is integrated to electric propulsion system of unmanned aerial vehicle. PMU is calibrated through the ground test. And PMU's performance is checked through the flight test.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2012.10a
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• pp.267-271
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• 2012

In this paper a power management unit for solar energy harvesting is proposed. If solar energy is sufficient, Power Management Unit(PMU) directly supplies load with solar energy. By contrast, if solar energy is insufficient to operate sensor nodes, voltage booster(VB) boosts the solar cell's output voltage, and then PMU supplies load with the harvested energy. The designed circuit had been fabricated using a 018um CMOS process. In the first case, the PMU supplies load with more energy than in the second case. In the second case where a VB is used, the PMU operates to supply load with solar energy even when illumination is low and minimum solar cells with very low output voltage are used.

• Journal of Sensor Science and Technology
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• v.7 no.1
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• pp.51-60
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• 1998

La-modified $PbTiO_{3}$(PLT) thin plates were prepared for the fabrication of PLT pyroelectric IR sensors. The effects of the preparation parameters such as tile sintering temperature, the La content, and the ambient powder quantity, on the microstructural and dielectric properties of PLT thin plates were investigated by X-ray diffraction, scanning electron microscope, and measurements of relative density and dielectric properties. With an increased La content, the tetragonality c/a was decreased but the densification and the grain size were increased, which is considered to be due to the increased Pb vacancy concentration to maintain charge neutrality at the increased of La content. When the quantity of the ambient powder wvas increased, the tetragonality was slightly increased, which is believed io be due to the reduced evaporation of PbO. But the e(fect is insignificant compared to that of La content. The dielectric constant at room temperature was increased and the Curie temperature was decreased in accordance with the decreased tetragonality ratio c/a with the increase of La content. The dielectric constant and tan ${\delta}$ of $500{\mu}m$ thick PLT thin plate with 10 wt% excess PbO and 10 mol% La contant sintered at $1250^{\circ}C$ for 2 hours in ambient powder of $0.02\;g/cm^{3}$ were 360 and 0.02, respectively.

• Journal of Sensor Science and Technology
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• v.24 no.1
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• pp.22-28
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• 2015

This study demonstrates a polyimide nerve cuff electrode with a conductive polymer for improving recording signal quality at peripheral nerve. The nerve cuff electrodes with platinum (Pt), iridium oxide (IrOx), and poly(3,4-ethylenedioxythiophene): p-toluene sulfonate (PEDOT:pTS) were fabricated and investigated their electrical characteristics for improving recorded nerve signal quality. The fabricated nerve cuff electrodes with Pt, IrOx, and PEDOT:pTS were characterized their impedance and CDC by using electrochemical impedance spectroscopy (EIS) and cyclic voltammetry. The impedance of PEDOT:pTS measured at 1 kHz was $257{\Omega}$, which was extremely lower than the value of the nerve cuff electrodes with IrOx ($15897{\Omega}$) and Pt ($952{\Omega}$), respectively. Furthermore, the charge delivery capacity (CDC) of the nerve cuff electrode with PEDOT:pTS was dramatically increased to 62 times than the nerve cuff electrode with IrOx. In ex-vivo test using extracted sciatic nerve of spaque-dawley rat (SD rat), the PEDOT:pTS group exhibited higher signal-to-interference ratio than IrOx group. These results indicated that the nerve cuff electrode with PEDOT:pTS is promising for effective implantable nerve signal recording.

• Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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• v.36 no.2
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• pp.75-84
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• 2018

The purpose of this study is that the low-cost mobile mapping system using INS (Inertial Navigation System) based on MEMS (Micro Electro Mechanical System) could decipher the interpretation of road facility with the accuracy of x, y 0.546m plane error. Even though the MMS (Mobile Mapping System) technology as a new measurement technology has been used vividly to set up geographic information by some world leading surveying equipment manufacturers, the domestic technology is still in its beginning stage. Several domestic institutes and companies tried to catch up the leading technology but they just produced prototypes which needs more stabilization. Through this thesis, we developed low-cost mobile mapping system installed with INS based on MEMS after time synchronizing sensors for MMS such as LiDAR (Light Detection And Ranging), CCD (Charge Coupled Device), GPS/INS (Global Positioning System / Inertial Navigation System) and DMI (Distance Measurement Instrument).

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.11a
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• pp.436-439
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• 2002

Recently, It has performed that the basic research of the photoconductive material and the development and application of the digital radiograph detector which is divided into the direct and indirect method. The objective of this study investigate the effect of the electric characteristic about changing the composition of Arsenic in hybrid detector system for compensating a defect of conventional. We fabricated samples using the amorphous Selenium and Arsenic alloy with various concentrations of the Arsenic{seven step 0.1%, 0.3%, 0.5%, 1%, 1.5%, 3%, 5%). And using EFIRON optical adhesives the formed multi-layer$(Gd_{2}O_{2}S(Eu^{2+}))$ composed phosphor layer. X-ray and light sensitivity was measured to study x-ray response characteritics. As results, highest value was measured as output net charge and SNR were $315.7pC/cm^2/mR$ and 99.4 at 0.3%As doping ratio.