• Transactions on Electrical and Electronic Materials
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• 제12권2호
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• pp.56-59
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• 2011

The characterization of the chemical mechanical polishing (CMP) process for undensified phophosilicate glass (PSG) film is reported using design of experiments (DOE). DOE has been used by experimenters to understand the relationship between the input variables and responses of interest in a simple and efficient way, and it typically is beneficial for determining the appropriatesize of experiments with multiple process variables and making statistical inferences for the responses of interest. The equipment controllable parameters used to operate the machine consist of the down force of the wafer carrier, pressure on the back side wafer, table and spindle speeds (SS), slurry flow (SF) rate, pad condition, etc. None of these are independent ofeach other and, thus, the interaction between the parameters also needs to be understoodfor improved process characterization in CMP. In this study, we selected the five controllable equipment parameters the most recommendedby process engineers, viz. the down force (DF), back pressure (BP), table speed (TS), SS, and SF, for the characterization of the CMP process with respect to the material removal rate and film uniformity in percentage terms. The polished material is undensified PSG which is widely used for the plananization of multi-layered metal interconnects. By statistical modeling and the analysis of the metrology data acquired from a series of $2^{5-1}$ fractional factorial designs with two center points, we showed that the DF, BP and TS have the greatest effect on both the removal rate and film uniformity, as expected. It is revealed that the film uniformity of the polished PSG film contains two and three-way interactions. Therefore, one can easily infer that process control based on a better understanding of the process is the key to success in current semiconductor manufacturing, in which the size of the wafer is approaching 300 mm and is scheduled to continuously increase up to 450 mm in or slightly after 2012.

• 한국컴퓨터산업학회논문지
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• 제2권4호
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• pp.455-470
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• 2001

본 논문에서는 ATM상에서의 효율적인 VBR 비디오 소스 전송을 위한 트래픽 특성화를 다루었다. 트래픽 특성화를 위하여 전송 중 트래픽이 적은 모니터링 기법을 사용하였고 지연 요구사항을 만족시키는 동적 VBR 특성화 방식을 제안하였다. 동적 VBR 방식은 누적 제한 함수 (Cumulative Constraint Function)를 이용한 토큰 버킷 알고리즘 버퍼링을 사용하였다. 누적 제한 함수는 초기에는 peak rate로 전송을 시작하여 일정시간 동안 모니터링 한 후, 다음 트랙픽을 예측하여 적절한 버퍼를 제공하였다. 누적 프레임의 갱신을 통하여 네트워크 자원 예약량을 감소시켰고 이전 프레임 정보를 가지고 rate를 변경시켰다. 이는 적은 모니터링을 하며 오버헤드도 적다. 그리고 이전의 결정적 제한 함수 (Deterministic Constraint Function)의 복잡도를 0(n) 까지 낮추었고, 토큰 버킷의 토큰 rate와 토큰 depth를 구하여 매핑 하였다. 본 논문은 시뮬레이션을 통한 결과치를 비교 분석하여 이전의 방식보다 적은 네트워크 자원이 소모되는 것을 보여준다.

• 한국의학물리학회지:의학물리
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• 제19권4호
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• pp.219-226
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• 2008

이 연구에서는 저자들이 개발한 비정질 셀레늄층과 비정질 실리콘TFT배열을 사용하는 직접방식 디지털 X-선 영상 검출기에 대해 IEC (international electrotechnical commission)와 같은 국제표준으로 권고된 측정방법에 따라 특성을 평가하였다. 영상 성능 묘사에 사용되는 측정은 응답특성(response characteristic), 변조전달함수(MTF, modulation transfer function), 잡음전력스펙트럼(NPS, noise power spectrum), 양자검출효율(DQE, detective quantum efficiency), 양자제한 성능을 포함하고 있다. 영상특성평가 결과, 개발된 검출기의 DQE 값은 최저주파수와 최고주파수에서 각각 40%와 25%이었다. 해외 타사의 제품과 비교해서도 우월한 값을 나타내었다. 또한 MTF는 간접방식 DR, CR과 비교하면 매우 우월한 성능을 보이고 있다. 또한 양자 제한된 특성을 평가한 결과, 0.023 mR 이하에서만 제한된 특성을 보여 일반촬영용도로서 적합성을 확인할 수 있었다.

• 전기화학회지
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• 제9권2호
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• pp.59-63
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• 2006

전해코팅 법과 dip-coating 법을 이용해 산화주석(IV)을 티타늄 지지체에 코팅하여, 코팅 방법에 따른 코팅 전극의 물성과 전기화학적 특성에 대해여 연구하였다. HCl 로 전극 에칭 후, nitrate 용액에 $SnCl_2{\cdot}2H_2O$을 용해시켜 pulse technique를 이용하여 전해코팅 하였으며, dip-coating 법 또한 $SnCl_2{\cdot}2H_2O$를 사용하여 1:1V% HCl 용액에 용해시켜 코팅 소결 후 산화주석(IV)코팅 전극을 제작하였다. 두 가지 코팅 방법을 통해 제작된 산화주석(IV)코팅 전극은 전극의 물성을 비교하기 위해 x-ray diffraction (XRD), scanning election microscopy (SEM)를 관찰해보았고, 전기화학적 특성을 평가하기 위해 cyclic voltammetry (CV)를 측정하여 전위창을 비교해 보았다.

• 환경위생공학
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• 제20권2호
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• pp.12-20
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• 2005

Most of sewage treatment plants in Korea is operated for the removal of organic material. Because of low C/N ratio of domestic wastewater it is very difficult to remove nitrogen and phosphorus from wastewater. Therefore C/N ratio is key factor for the removed of nitrogen and phosphorus. PSB(photosynthetic bacteria) can remove the nutrient materials, so this study is focused on PSB characterization of nutrient removal. PSB is possible to remove nitrogen, phosphorus in anaerobic and aerobic condition. This study try to find out condition of the PSB in SBR reactor, Batch reactor. It consists of three Mode. Mode 1, 2 is to apply activated sludge process and Mode 3 is that seeded PSB in the activated sludge process. As a result of SBR process, Mode 1, 2 which was activated sludge Process showed $79\~90\%,\;66\~90\%$ of SCODcr, $94.67\~95.89\%,\;95.76\~98.56\%$ of TKN, and Mode 3 has $84\~92\%$ of SCODcr, $95.39\~99.52\%$ of TKN removal efficiency, respectively. When comparison with Mode 1, 2 and 3, most of nitrogen and phosphorus is removed at the anaerobic condition in Mode 3. but Mode 1, 2 has just revealed activated sludge process characterization. It would because of characterization of PSB.

• 방사성폐기물학회지
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• 제10권3호
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• pp.199-208
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• 2012

방사성폐기물처분을 위한 부지특성평가 기술 개발을 위해 지질특성조사와 수리지질특성조사가 1997년부터 지표기반 조사, 시추공 조사, 터널조사를 포함하여 수행되었다. 특히, 2006년에는 지하처분연구시설 (KURT, KAERI Underground Research Tunnel)을 건설하여 지하 환경에서 심부지질환경에 대한 연구 뿐 만 아니라 용질이동특성, 미생물특성, 공학적 방벽 시스템 연구 등 방사성폐기물처분을 위한 다양한 수행하고 있다. 본 연구는 한국원자력연구원내 건설된 지하처분연구시설 주변 지역을 연구지역으로 부지특성모델 구축의 일환으로 수행되었다. 연구지역의 지질모델구축을 위해 선형구조분석, 시추공/터널 조사, 지구물리탐사를 포함한 다양한 연구를 수행하여, 암질모델과 지질구조모델을 구축하였으며, 현장수리시험의 결과를 이용하여 암질모델과 지질구조모델을 포함한 지질모델에 입력된 요소에 대한 수리지질특성이 평가되었다.

• 한국미생물·생명공학회지
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• 제46권2호
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• pp.135-144
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• 2018

The rapid increase in number and diversity of Extended Spectrum ${\beta}$-Lactamases (ESBLs) producing Enterobacteriaceae in natural aquatic environment is a major health concern worldwide. This study investigates abundance and distribution of ESBL producing multidrug resistant Enterobacteriaceae and molecular characterization of ESBL genes among isolates from highly polluted stretch of river Yamuna, India. Water samples were collected from ten different sites distributed across Delhi stretch of river Yamuna, during 2014-15. A total of 506 non duplicate Enterobacteriaceae isolates were obtained. Phenotypic detection of ESBL production and antibiotic sensitivity for 15 different antibiotics were performed according to CLSI guidelines (Clinical and Laboratory Standard Institute, 2015). A subset of ESBL positive Enterobacteriaceae isolates were identified by 16S rRNA gene and screened for ESBL genes, such as $bla_{CTX-M}$, $bla_{TEM}$ and $bla_{OXA}$. Out of 506 non-duplicate bacterial isolates obtained, 175 (34.58%) were positive for ESBL production. Susceptibility pattern for fifteen antibiotics used in this study revealed higher resistance to cefazolin, rifampicin and ampicillin. A high proportion (76.57%) of ESBL positive isolates showed multidrug resistance phenotype, with MAR index of 0.39 at Buddha Vihar and Old Delhi Railway bridge sampling site. Identification and PCR based characterization of ESBL genes revealed the prevalence of $bla_{CTX-M}$ and $bla_{TEM}$ genes to be 88.33% and 61.66%, respectively. Co-occurrence of $bla_{CTX-M}$ and $bla_{TEM}$ genes was detected in 58.33% of the resistant bacteria. The $bla_{OXA}$ gene was not detected in any isolates. This study highlights deteriorating condition of urban aquatic environment due to rising level of ESBL producing Enterobacteriaceae with multidrug resistance phenotype.

• Asian Pacific Journal of Cancer Prevention
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• 제14권1호
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• pp.603-606
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• 2013

Background: Ovarian cancer is the second most common malignancy in Pakistani women, accounting for 4% of all cancers in the female population. The aim of this study was to determine sensitivity, specificity, positive and negative predictive values and 95% confidence intervals for ultrasound in characterization of ovarian masses in patients presenting at public and private tertiary care hospitals in Karachi, Pakistan. Materials and Methods: We adopted a cross-sectional analytical study design to retrospectively collect data from January 2009-11 from medical records of two tertiary care hospitals. Using a non-probability purposive sampling technique, we recruited a sample of 86 women aged between 15 and 85 years fulfilling inclusion criteria with histopathologically proven ovarian masses presenting for an ultrasound examination in our radiology departments. Results: Our retrospective data depicted sensitivity and specificity of ultrasound to be 90.7%, 95%CI (0.77, 0.97) and 91.4%, 95%CI (0.76, 0.98) respectively. Positive predictive value was 93%, 95%CI (0.79, 0.98) and negative predictive value was 89%, 95%CI (0.73, 0.96). A total of 78 ovarian masses were detected, out of which 42 were malignant and 36 were benign. Conclusions: Results of our study further reinforce the conclusion that ultrasound should be used as an initial modality of choice in the workup of every woman suspected of having an ovarian mass. It not only results in decreasing the mortality but also avoids unnecessary surgical interventions.

• 한국산업보건학회지
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• 제1권2호
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• pp.144-153
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• 1991

This study was conducted to evaluate worker exposure to airborne asbestos fibers by industry, and to evaluate polarized-light microscopy for determining airborne asbestos fibers. A total of 11 plants including asbestos textile, brake-lining manufacturing, slate manufacturing, and automobile maintenance shops were investigated. Rsults of the study are summarized as follows. 1. Worker exposure levels to airborne asbestos fibers were the highest in asbestos textile industry, followed by brake-lining manufacturing, slate manufacturing, and automobile maintenance shops, in order. In asbestos textile industry, large variation of asbestos levels was found by plants. The worst plant indicated airborne fiber concentrations in excess of 10 fibers/cc, however, the best plant showed concentrations within 0.50 fibers/cc. 2. Characterization of airborne fibers by industry indicated that fibers from asbestos textile industry were the longest with the largest aspect ratio. Fibers from automobile maintenance shops were the shortest with the smallest aspect ratio. Based on characteristics of fibers and the highest levels of concentrations, it is concluded that workers in the asbestos textile industry are exposed to the highest risk of producing asbestosis, lung cancer, and mesothelioma. 3. Result s obtained using polarized-light microscopy were $43.7{\pm}12.3%$ of the results obtained using phase contrast microscopy. This may be resulted from the worse resolution of polarized-light microscopy than that of phase contrast microscopy. Based on the results, it is recommended that polarized-light microscopy be used for mainly bulk sample analyses and further study be performed to improve the method for determining airborne samples. However, polarized-light microscopy can be used for determining thick fibers.

• Journal of Radiation Protection and Research
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• 제45권2호
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• pp.81-87
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• 2020

Background: Kori unit #1 is permanently shut down after a 40-year lifetime. The Nuclear Safety and Security Commission recommends establishing initial decommissioning plans for all nuclear and radwaste treatment facilities. Therefore, the Korea Atomic Energy Research Institute (KAERI) must establish an initial and final decommissioning plan for radwaste-treatment facilities. Radiation safety assessment, which constitutes one chapter of the decommissioning plan, is important for establishing a decommissioning schedule, a strategy, and cost. It is also a critical issue for the government and public to understand. Materials and Methods: This study provides a method for assessing external radiation dose to workers during decommissioning. An external dose is calculated following each exposure scenario, decommissioning strategy, and working schedule. In this study, exposure dose is evaluated using the deterministic method. Physical characterization of the facility is obtained by both direct measurement and analysis of the drawings, and radiological characterization is analyzed using the annual report of KAERI, which measures the ambient dose every month. Results and Discussion: External doses are calculated at each stage of a decommissioning strategy and found to increase with each successive stage. The maximum external dose was evaluated to be 397.06 man-mSv when working in liquid-waste storage. To satisfy the regulations, working period and manpower must be managed. In this study, average and cumulative exposure doses were calculated for three cases, and the average exposure dose was found to be about 17 mSv/yr in all the cases. Conclusion: For the three cases presented, the average exposure dose is well below the annual maximum effective dose restriction imposed by the international and domestic regulations. Working period and manpower greatly affect the cost and entire decommissioning plan; hence, the chosen option must take account of these factors with due consideration of worker safety.