• 제목/요약/키워드: ceramic oxide

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Ga2O3박막 상에서의 RF 플라즈마 화학기상증착법의 메테인 분율 조절에 의한 탄소층의 다양한 형상 제어 연구 (Various Shape of Carbon Layer on Ga2O3 Thin Film by Controlling Methane Fraction in Radio Frequency Plasma Chemical Vapor Deposition)

  • 서지연;신윤지;정성민;김태규;배시영
    • 열처리공학회지
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    • 제35권2호
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    • pp.51-56
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    • 2022
  • In this study, we controlled the shape of a carbon layer on gallium oxide templates. Gallium oxide layers were deposited on sapphire substrates using mist chemical vapor deposition. Subsequently, carbon layers were formed using radio frequency plasma chemical vapor deposition. Various shapes of carbon structures appeared according to the fraction of methane gas, used as a precursor. As methane gas concentration was adjusted from 1 to 100%, The shapes of carbon structures varied to diamonds, nanowalls, and spheres. The growth of carbon isotope structures on Ga2O3 templates will give rise to improving the electrical and thermal properties in the next-generation electronic applications.

Fabrication of Ordered or Disordered Macroporous Structures with Various Ceramic Materials from Metal Oxide Nanoparticles or Precursors

  • Cho, Young-Sang;Moon, Jun-Hyuk;Kim, Young-Kuk;Choi, Chul-Jin
    • 한국분말재료학회지
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    • 제18권4호
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    • pp.347-358
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    • 2011
  • Two different schemes were adopted to fabricate ordered macroporous structures with face centered cubic lattice of air spheres. Monodisperse polymeric latex suspension, which was synthesized by emulsifier-free emulsion polymerization, was mixed with metal oxide ceramic nanoparticles, followed by evaporation-induced self-assembly of the mixed hetero-colloidal particles. After calcination, inverse opal was generated during burning out the organic nanospheres. Inverse opals made of silica or iron oxide were fabricated according to this procedure. Other approach, which utilizes ceramic precursors instead of nanoparticles was adopted successfully to prepare ordered macroporous structure of titania with skeleton structures as well as lithium niobate inverted structures. Similarly, two different schemes were utilized to obtain disordered macroporous structures with random arrays of macropores. Disordered macroporous structure made of indium tin oxide (ITO) was obtained by fabricating colloidal glass of polystyrene microspheres with low monodispersity and subsequent infiltration of the ITO nanoparticles followed by heat treatment at high temperature for burning out the organic microspheres. Similar random structure of titania was also fabricated by mixing polystyrene building block particles with titania nanoparticles having large particle size followed by the calcinations of the samples.

바이오 센서로의 응용을 위한 2차 양극산화 시간에 따른 나노튜브의 구조적, 전기적 특성 (Structural and Electrical Properties of Nanotube as Various Second Anodizing Time for Biosensor)

  • 김용준;이태호;정혜린;이성갑
    • 한국전기전자재료학회논문지
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    • 제26권10호
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    • pp.741-744
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    • 2013
  • In this study, we fabricated anodic aluminum oxide (AAO) membrane by two step anodizing process for pH detection. The structural properties were observed by X-ray diffraction (XRD) and field emission scanning electron microscope (FE-SEM). Electrochemical measurements of the pH sensor have been performed in capacitance-voltage (C-V) and drift rates. The characterization of AAO membrane exhibited high sensitivity (99.1 mV/pH) at second anodizing time of 4 min.

ECR 산소 플라즈마에 의한 $SiO_2$ 박막의 성장 거동 및 전기적 특성 (Growth and Electrical Characteristics of Ultrathin $SiO_2$ Film Formed in an Electron Cyclotron Resonance Oxygen Plasma)

  • 안성덕;이원종
    • 한국세라믹학회지
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    • 제32권3호
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    • pp.371-377
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    • 1995
  • Silicon oxide films were grown on single-crystal silicon substrates at low temperatures (25~205$^{\circ}C$) in a low pressure electron cyclotron resonance (ECR) oxygen plasma. The growth rate of the silicon oxide film increased as the temperature increased or the pressure decreased. Also, the thickness of the silicon oxide film increased at negative bias voltage, but not changed at positive bias voltage. The growth law of the silicon oxide film was approximated to the parabolic form. Capacitance-voltage (C-V) and current density-electric field (J-E) characteristics were studied using Al/SiO2/p-Si MOS structures. For a 10.2 nm thick silicon oxide film, the leakage current density at the electric field of 1 MVcm-1 was less than 1.0$\times$10-8Acm-2 and the breakdown field was higher than 10 MVcm-1. The flat band voltage of Al/SiO2/p-Si MOS capacitor was varied in the range of -2~-3 V and the effective dielectric constant was 3.85. These results indicate that high quality oxide films with properties that are similar to those of thermal oxide film can be fastly grown at low temperature using the ECR oxygen plasma.

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석유증발법에 의한 Cobalt Oxide의 분말제조 (Preparation of the Cobalt Oxide Powder by Hot Petroleum Drying Method)

  • 윤상옥;정형진
    • 한국세라믹학회지
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    • 제24권3호
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    • pp.257-262
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    • 1987
  • The characteristics of cobalt oxide powders prepared by hot petroleum drying method from the cobalt acetate were evaluated by DTA/TGA, XRD, BET, SEM and density measurement. The cobalt oxide powder could be prepared by hot petroleum drying of the emulsion of cobalt acetate salt solution and the subsequent thermal decomposition of the acetate at 300$^{\circ}C$. As the concentration of the salt solution and the calcination temperature of the dried powder increased, the surface area of the synthesized powder decreased due to the particle growth, so that after sintering the density and grain size decreased. For the same concentration of the salt solution, the surface area and sinterability of the powder by hot petroleum drying increased in comparision with those by conventional drying.

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에멀젼 증발법에 의한 산화코발트 분말의 제조에 관한 연구 (A Study on the reparation of Cobalt Oxide Powders by the Emulsion Evaporation Technique)

  • 손성호;안재우;이응조
    • 한국세라믹학회지
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    • 제30권5호
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    • pp.411-419
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    • 1993
  • A process for the preparation of cobalt oxide powders was developed by the evaporaton of emulsion containing cobalt. The characteristics of powders were examined by means of DTA, X-ray diffracton, SEM, PSA. Cobalt oxide powders were produced by evaporating the emulsion prepared by mixing cobalt sulfate solution and organic phase consisted of kerosene, Span 80 and D2EHPA in the kerosene bath at 16$0^{\circ}C$, then the precursor obtained was calcined at 100$0^{\circ}C$. As the concentration of cobalt ions in the aqueous solution, Span 80 and the stirring speed increased, the mean size of cobalt oxide powders decreased and the size distribution was improved. At the volume ratio of one of the aqueous to organic phase, the finest mean size and the optimum size distribution was obtained. On the other hand the concentration of D2EHPA and liquid paraffin had little effect on the mean size as well as on the size distribution of powders.

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마게마이트(${\gamma}-Fe_2O_3$) 소결체의 미세구조와 LPG 감지특성 (Microstructures and LPG Sensing Properties of Maghemite(${\gamma}-Fe_2O_3$) Ceramics)

  • 신형섭;오재희
    • 한국세라믹학회지
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    • 제29권6호
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    • pp.441-450
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    • 1992
  • The microstructur and LPG sensing properties of maghemite (${\gamma}-Fe_2O_3$) ceramics have been studied. The acicular and fine spherical shaped iron oxide particles were sintered at below $900^{\circ}C$. The maghemite ceramics were prepared by reduction-oxidation of sintered iron oxide. With the microstructure of acicular and/or fine grains, the maghemite ceramics have good LPG sensing properties. Increased sintering temperature deteriorates the LPG sensitivity of maghemite ceramics due to the grain growth. The maghemite ceramics prepared from the mixed iron oxide, of a large amount of acicular particles and a small amount of spherical ones, have a lower LPG sensitivity than that of the acicular iron oxide ceramics. But, they seem to be of higher mechanical strength. The optimum working temperature for LPG sensing of the maghemite ceramics was found to be $300~350^{\circ}C$.

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산화물 결합 탄화규소 다공질 소재에 관한 연구 (Studies on the Oxide Bonded Silicon Carbide Porous Materials)

  • 이재춘;국일현
    • 한국세라믹학회지
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    • 제27권2호
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    • pp.179-186
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    • 1990
  • Silicon carbide porous materials used for hot gas filters were prepared using oxide binder. Chamotte, frit and H3PO4 were starting materials to synthesize the oxide binder for high temperature-use. Room temperature bending strength of the silicon carbide porous body was increased with increasing firing temprature or with the amount of the content of frit in the oxide binder. However, in the oxidebinder fired above132$0^{\circ}C$, cristobalite form of AlPO4 phase which undergoes rapid inversion became more prominent with increasing firing time. the average pore size of the silicon carbide filter materials was found to be about one third of the average grain size of the silicon carbide powder used in this study.

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플라즈마 용사 및 EB-PVD에 의한 열벽코팅 수명에 대한 산화물 생성의 영향 (The Effect of Oxide Formation on the Lifetime of Plasma Sprayed or EB-PVD Thermal Barrier Coatings)

  • 이의열
    • 한국표면공학회지
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    • 제27권2호
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    • pp.91-98
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    • 1994
  • For the plasma sprayed as well as the EB-PVD thermal barrier coatings, the fracture paths within the oxidation products developed at the interface between the partially stabilized zirconia ceramic coating and NiCoCrAlY bond coat during cyclic thermal oxidation has been investigated. It was observed that the fracture in the oxidation products primarily took place within the oxide such as $Ni_{1-x}Co_3(Al_,Cr)_2O_4$ or at the interface between the oxide and $Al_2O_3$. It was found that Al2O3 developed first, followed by the Ni/Co/Cr rich oxides such as ,,$Ni_{1-x}Co_x(Al_,Cr)_2O_4$ $Cr_2O_3$and NiO at the interface between the ceramic coating and the bond coat in a cyclic high temperature environment. It was therfore concluded that the formation of the oxide containing Ni, Cr and Co was a life-limiting event for thermal barrier coatings during cyclic thermal oxidation.

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