Various Shape of Carbon Layer on Ga2O3 Thin Film by Controlling Methane Fraction in Radio Frequency Plasma Chemical Vapor Deposition |
Seo, Ji-Yeon
(Korea Institute of Ceramic Engineering and Technology, Semiconductor Materials Center)
Shin, Yun-Ji (Korea Institute of Ceramic Engineering and Technology, Semiconductor Materials Center) Jeong, Seong-Min (Korea Institute of Ceramic Engineering and Technology, Semiconductor Materials Center) Kim, Tae-Gyu (School of Mechatronics Engineering, Pusan National University) Bae, Si-Young (Korea Institute of Ceramic Engineering and Technology, Semiconductor Materials Center) |
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