• Journal of Powder Materials
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• v.19 no.5
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• pp.356-361
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• 2012

The ultra-fine and less agglomerated titanium carbonitride particles were successfully synthesized by magnesiothermic reduction with low feeding rate of $TiCl_4+1/4C_2Cl_4$ solution. The sub-stoichiometric titanium carbide ($TiC_{0.5{\sim}0.6}$) particles were produced by reduction of chlorine component by liquid magnesium at $800^{\circ}C$ of gaseous $TiCl_4+1/4C_2Cl_4$ and the heat treatments in vacuum were performed for 5 hours to remove the residual magnesium and magnesium chloride mixed with produced $TiC_{{\sim}0.5}$. The final $TiC_{{\sim}0.5}N_{0{\sim}0.5}$ particle with near 100 nm in mean size and high specific surface area of $65m^2/g$ was obtained by nitrification under nitrogen gas at $1,150^{\circ}C$ for 2 hrs.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.10a
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• pp.14-17
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• 2006

This paper describes a novel processing technique for fabrication of polymer-derived SiCN (silicone carbonitride) microstructures for super-temperature MEMS applications. PDMS (polydimethylsiloxane) mold is fabricated on SU-8 photoresist using standard UV photolithographic process. Liquid precursor is injected into the PDMS mold. Finally, solid polymer structure is cross-linked using HIP (hot isostatic pressure) at $400^{\circ}C$, 205 bar Optimum pyrolysis and anneal ins conditions are determined to form a ceramic microstructure capable of withstanding over $1400^{\circ}C$. The fabricated SiCN ceramic microstructure has excel lent characteristics, such as shear strength (15.2 N), insulation resistance ($2.163{\times}10^{14}\;{\Omega}$) and BDV (min. 1.2 kV) under optimum process condition.

• Journal of the Korean Society for Heat Treatment
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• v.2 no.2
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• pp.68-83
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• 1989

Physical metallurgy aspects of gaseous ferritic nitrocarburising are reviewed in the light of basic studies undertaken since 1975 which have illustrated inconsistencies between the iron-carbon-nitrogen ternary phase diagram at $570^{\circ}C$ and the experimental observation of the co-existence of the ${\varepsilon}$ carbonitride phase and ferrite. Thermodynamic investigations by Xu and Li together with those by Slycke et al are reviewed to illustrate compatability between a modified isothermal section of the Fe-C-N system and the formation and growth of a monophased ${\varepsilon}$ structure under a variety of processing conditions. The implications of the modified diagram in terms of innovations in industrial ferritic nitrocarburising practice are discussed, together with limitations on the control of the process. The importance of the developing technology of black nitrocarburising for enhanced wear, fatigue, and corrosion resistance is emphasised. Basic studies and industrial status of austenitic nitrocarburising treatments are also reviewed, which highlight the importance of substrate strengthening for high load bearing applications of anti-scuff thermochemical treatments.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.216-216
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• 2009

This paper describes a novel processing technique for the fabrication of polymer-derived SiCN (silicone carbonitride) microstructures for extreme microelectromechanical system (MEMS) applications. A polydimethylsiloxane (PDMS) mold was formed on an SU-8 pattern using a standard UV photolithographic process. Next, the liquid precursor, polysilazane, was injected into the PDMS mold to fabricate free-standing SiCN microstructures. Finally, the solid polymer SiCN microstructure was cross-linked using hot isostatic pressure at $400^{\circ}C$ and 205 bar. The optimal pyrolysis and annealing conditions to form a ceramic microstructure capable of withstanding temperatures over $1400^{\circ}C$ were determined. Using the optimal process conditions, the fabricated SiCN ceramic microstructure possessed excellent characteristics includingshear strength (15.2 N), insulation resistance ($2.163{\times}10^{14}\;{\Omega}$, and BDV (1.2 kV, minimum). Since the fabricated ceramic SiCN microstructure has improved electrical and physical characteristics compared to bulk Si wafers, it may be applied to harsh environments and high-power MEMS applications such as heat exchangers and combustion chambers.

• Journal of Powder Materials
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• v.16 no.2
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• pp.98-103
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• 2009

The ultrafine titanium carbonitride particles ($TiC_{0.7}N_{0.3}$) below 100nm in mean size were successfully synthesized by Mg-thermal reduction process. The nanostructured sub-stoichiometric titanium carbide ($TiC_{0.7}$) particles were produced by the magnesium reduction at 1123K of gaseous $TiC_{l4}+xC_2Cl_4$ and the heat treatments in vacuum were performed for five hours to remove residual magnesium and magnesium chloride mixed with $TiC_{0.7}$. And final $TiC_{0.7}N_{0.3}$ phase was obtained by nitrification under normal $N_2$ gas at 1373K for 2 hrs. The purity of produced $TiC_{0.7}N_{0.3}$ particles was above 99.3% and the oxygen contents below 0.2 wt%. We investigated in particular the effects of the temperatures in vacuum treatment on the particle refinement of final product.

• Journal of the Korean Society for Heat Treatment
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• v.1 no.1
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• pp.8-12
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• 1988

This study has been carried out to evaluate gaseous nitrocarburizing treatment undertaken for pure iron at $570^{\circ}C$ in an atmosphere containing 50% endothermic gas, generated from natural gas, and 50% ammonia. The results obtained from the experiment are as follows ; 1) The microstructure of gaseous nitrocarburized pure iron consists of the compound layer on the surface and the diffusion zone beneath it. The compound layer progresses uniformly into ferrite with a thickness of $20{\mu}$ obtained after treating for 3 hours. 2) Chemical analysis has shown that the compound layer has a C/N ratio of 0.19 and that the average combined interstitial content of the compound layer is about 30 atomic percent, which is close to the lower limit of the ${\varepsilon}$-carbonitride phase field in Fe-C-N phase diagram. 3) X-ray diffraction analysis has revealed that the compound layer consists mainly of the c.p.h. phase, ${\varepsilon}-Fe_3$(C.N) and a small amount of $Fe_4N$ and traces of ferrite are also present in the compound layer. 4) The microhardness of the compound layer is about 600 V.H.N and shows a relatively sharp fall-off at the compound layer/diffusion zome interface. 5) The average actual degree of ammonia dissociation is calculated to be 27% for a gaseous nitrocarburizing treatment carried out at $570^{\circ}C$.

• Journal of Sensor Science and Technology
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• v.15 no.1
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• pp.53-57
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• 2006

This paper describes a novel processing technique for fabrication of polymer-derived SiCN (silicone carbonitride) microstructures for super-temperature MEMS applications. PDMS (polydimethylsiloxane) mold is fabricated on SU-8 photoresist using standard UV photolithographic process. Liquid precursor is injected into the PDMS mold. Finally, solid polymer structure is cross-linked using HIP (hot isostatic pressure) at $400^{\circ}C$, 205 bar. Optimum pyrolysis and annealing conditions are determined to form a ceramic microstructure capable of withstanding over $1400^{\circ}C$. The fabricated SiCN ceramic microstructure has excellent characteristics, such as shear strength (15.2 N), insulation resistance ($2.163{\times}10^{14}{\Omega}$) and BDV (min. 1.2 kV) under optimum process condition. These fabricated SiCN ceramic microstructures have greater electric and physical characteristics than bulk Si wafer. The fabricated SiCN microstructures would be applied for supertemperature MEMS applications such as heat exchanger and combustion chamber.

• Journal of the Korean Society for Heat Treatment
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• v.21 no.6
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• pp.287-292
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• 2008

Dissolution behavior of complex carbonitrides in a Nb-Ti-V microalloyed steel was quantitatively examined by electrical resistivity, transmission electron microscopy (TEM), and optical microscopy. The electrical resistivity increased with solution treatment temperature up to $1250^{\circ}C$ for a holding time of 15 min. But, an increasing rate of electrical resistivity with temperature was obviously decreased above $1150^{\circ}C$. As the solution treatment temperature increases, irregular shaped Nb-rich carbonitrides disappear and cuboidal Ti-rich carbonitrides are observed. Abnormal grain growth occurs above $1250^{\circ}C$ for a holding time of 15 min. The optimal solution treatment temperature of a Nb-Ti-V microalloyed steel was determined as $1200^{\circ}C$ for a holding time of 15 min.

• Journal of the Korean Ceramic Society
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• v.26 no.3
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• pp.323-330
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• 1989

Wear restance titanium carbonitride (TiCN) films were deposited on the SKH9 tool steels and WC-Co cutting tools by plasma assisted chemical vapor deposition (PACVD) using a gaseous mixture of TiCl4, CH4, N2, H2 and Ar. The effects of the deposition temperature and RF(Radio Frequency) power on the deposition rate, chlorine content and crystallinity of the deposited layer were studied. The experimental results showed that the stable and adherent films could be obtained above the deposition temperature of 47$0^{\circ}C$ and maximum deposition rate was obtained at 485$^{\circ}C$. The deposition rate was much affected by RF power and maximum at 40W. The crystallinity of the deposited layer was improved with increasing the deposition temperature and RF power. The TiCN films deposited by PACVD contained much chlorine. The chlorine content in the TiCN films was affected by deposition conditions and decreased with improving the crystallinity of the deposited layer. The deposited TiCN films deposited at the deposition temperature of 52$0^{\circ}C$ and RF power of 40W had an uniform surface with very fine grains of about 500$\AA$ size. The microhardness of the deposited layer was 2,300Kg/$\textrm{mm}^2$.

• Korean Journal of Metals and Materials
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• v.49 no.12
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• pp.917-923
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• 2011

Dissolution and precipitation behaviors of complex carbonitrides in austenite of a V-Nb microalloyed steel were quantitatively examined through electrical resistivity measurement and transmission electron microscopy. The electrical resistivity increased with solution treatment temperature up to $1240^{\circ}C$ and then was saturated at $225n{\Omega}m$ for a holding time of 10 min. The electrical resistivity method was also used to quantitatively measure the isothermal precipitation kinetics of the complex carbonitrides in austenite. Nb-rich precipitates were observed in austenite at the early stages of precipitation, but Nb was replaced by V up to the equilibrium amount within the precipitates with further holding time. The time-temperature-precipitation diagram showed a C-type curve; nose temperature and its incubation time were $900^{\circ}C$ and 100 s, respectively.