• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.460-460
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• 2012

반도체 Device가 Shrink 함에 따라 Pattern Size가 작아지게 되고, 이로 인해 Photo Resist 물질 자체만으로는 원하는 Patterning 물질들을 Plasma Etching 하기가 어려워지고 있다. 이로 인해 Photoresist를 대체할 Hard Mask 개념이 도입되었으며, 이 Hardmask Layer 중 Amorphous Carbon Layer 가 가장 널리 사용되고 지고 있다. 이 Amorphous Carbon 계열의 Hardmask를 Etching 하기 위해서 기본적으로 O2 Plasma가 사용되는데, 이 O2 Plasma 내의 Oxygen Species들이 가지는 등 방성 Diffusion 특성으로 인해, 원하고자 하는 미세 Pattern의 Vertical Profile을 얻는데 많은 어려움이 있어왔다. 이를 Control 하기 인해 O2 Plasma Parameter들의 변화 및 Source/Bias Power 등의 변수가 연구되어 왔으며, 이와 다른 접근으로, N2 및 CO, CO2, SO2 등의 여러 Additive Gas 들의 첨가를 통해 미세 Pattern의 Profile을 개선하고, Plasma Etching 특성을 개선하는 연구가 같이 진행되어져 왔다. 본 논문에서 VLSI Device의 Masking Layer로 사용되는, Carbon 계 유기 층의 Plasma 식각 특성에 대한 연구를 진행하였다. Plasma Etchant로 사용되는 O2 Plasma에 새로운 첨가제 가스인 카르보닐 황화물 (COS) Gas를 추가하였을 시 나타나는 Plasma 내의 변화를 Plasma Parameter 및 IR 및 XPS, OES 분석을 통하여 규명하고, 이로 인한 Etch Rate 및 Plasma Potential에 대해 비교 분석하였다. COS Gas를 정량적으로 추가할 시, Plasma의 변화 및 이로 인해 얻어지는 Pattern에서의 Etchant Species들의 변화를 통해 Profile의 변화를 Mechanism 적으로 규명할 수 있었으며, 이로 인해 기존의 O2 Plasma를 통해 얻어진 Vertical Profile 대비, COS Additive Gas를 추가하였을 경우, Pattern Profile 변화가 개선됨을 최종적으로 확인 할 수 있었다.

• Clean Technology
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• v.24 no.3
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• pp.157-165
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• 2018

In this study, the removal of $Si_3N_4$ particles from the surface of a silicon wafer was investigated by using supercritical carbon dioxide, the IPA co-solvent and cleaning additive chemicals. First, the solubility of several surfactants and binders in supercritical carbon dioxide solubility and particle dispersibility in the binders were evaluated in order to confirm their suitability for the supercritical cleaning process. Particle removal experiments were carried out with adjusting various process parameters and reaction conditions. The surfactants used in the experiment showed little particle removal effect, producing secondary contamination on the surface of wafers. On the other hand, 5 wt% (with respect to $scCO_2$) of the cleaning additive mixture of trimethyl phosphate, IPA, and trace HF resulted in 85% of particle removal efficiency after $scCO_2$ flowing for 4 minutes at $50^{\circ}C$, 2000 psi, and the flow rate of $15mL\;min^{-1}$.

• Polymer(Korea)
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• v.35 no.3
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• pp.228-231
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• 2011

The rate of vulcanization of nonpolar ethylene-propylene-diene terpolymer(EPDM)/carbon black compounds was investigated by using hot air and microwave as a heating source. The present study parameters such as heating source, sample thickness, and loading of an additive. The compound thickness was the main factor in the hot air vulcanization. It was due to the poor thermal conductivity of EPDM; that is, the thicker thickness, the lower vulcanization rate. For 100% vulcanization, the compound with 3 mm thickness required 7 min at $250^{\circ}C$ in the hot air system. However, the vulcanization of EPDM compounds by microwave system was not affected by the thickness while strongly dependent on the amount of a polar additive, carbon black. A compound with 80 phr of carbon black was perfectly vulcanized within 30 sec. These results suggest that the use of microwave as a heating source is an effective method for the vulcanization of compounds including a polar component.

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.124.1-124.1
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• 2005

• Carbon letters
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• v.12 no.4
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• pp.243-248
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• 2011

Two different types of graphite, such as flake graphite (FG) and spherical graphite (SG), were used as anode materials for a lithium-ion secondary battery in order to investigate their electrochemical performance. The FG particles were prepared by pulverizing natural graphite with a planetary mill. The SG particles were treated by immersing them in acid solutions or mixing them with various carbon additives. With a longer milling time, the particle size of the FG decreased. Since smaller particles allow more exposure of the edge planes toward the electrolyte, it could be possible for the FG anodes with longer milling time to deliver high reversible capacity; however, their initial efficiency was found to have decreased. The initial efficiency of SG anodes with acid treatments was about 90%, showing an over 20% higher value than that of FG anodes. With acid treatment, the discharge rate capability and the initial efficiency improved slightly. The electrochemical properties of the SG anodes improved slightly with carbon additives such as acetylene black (AB), Super P, Ketjen black, and carbon nanotubes. Furthermore, the cyclability was much improved due to the effect of the conductive bridge made by carbon additives such as AB and Super P.

• Journal of Korea Foundry Society
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• v.15 no.6
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• pp.604-615
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• 1995

Austenitic stainless steel castings using expandable polystylene(referred to hereafter as EPS) patterns are often affected by distinctive defects associated with incomplete decomposition of the EPS as the molds are filled with metal. The quality of the castings, with particular reference to carbon pick-up in austenitic stainless steel is further influenced to a significant extent by such factors as reduced pressure, the additive by adding $Na_2CO_3$ in coating. The steel composition and microstructure were examined at the surface layer of castings, at depths of 1mm, by taking successive layers of swarf and analysis. In experiments, the carburizing atmosphere was neutralized, showing that the coating performed efficiently by decomposing almost instantly on heating and liberating $CO_2$. The upper parts of castings obtained using EPS patterns were slightly higher in carbon pick-up than other parts. Comparing the 316L and 304 stainless steel castings, qualitative and quantative differences could be found between the carbon pick-up behaviours as influence of the carbon content and alloying elements. Carbide former such as Cr makes carbon more soluble in the steel. This must make carbon pick-up in the surface layer but at the same time richer in carbon especially in the 304 stainless steel castings.

• Journal of Korean Society for Atmospheric Environment
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• v.21 no.6
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• pp.605-612
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• 2005

In this study, the possible use of HMDA (Hexamethylenediamine) as additive to enhance reaction between $CO_{2}$ and AMP (2-amino-2-methyl-1-propanol) which has higher absorption capacity than that of MEA (Monoethanolamine) was investigated. Also, the absorption capacity for $CO_{2}$ was compared with addition of HMDA, piperazine or MDEA (N-methyldiethanolamine) into $30\;wt\%$ AMP at $40^{circ}C$ and $CO_{2}$ partial pressure ranging from 0.5 to 120 kPa. Apparent rate constant ($K_{app}$) and absorption capacity with the addition of $5\∼20\;wt\%$ HMDA into AMP increased $214.2\∼276.3\%$ and $29.9\∼91.7\%$ than those of AMP alone. As a result, when $5\;wt\%$ HMDA added into AMP, the increasing rate of the absorption rate and the absorption capacity was found to be the highest. In addition, the absorption capacity increased $6.8\%,\;9.8\%,\;11.6\%$ with addition of MDEA, piperazine or HMDA respectively as compared to AMP alone at $CO_{2}$ partial pressure of 20 kPa. Consequently, HMDA as additive to improve absorption capacity of AMP was superior to other additives.

• Journal of Climate Change Research
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• v.2 no.2
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• pp.107-113
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• 2011

In this research, we described the experimental results for the improvement of Potassium based sorbents. These sorbents have been actually used in the 0.5 MW $CO_2$ capture plant located in Hadong #3 Power Plant. Firstly, we had shaped two kinds of sorbents using a spray dryer. These sorbents applied magnetite & copper oxide as an additive. And the magnetite sorbent was evaluated more excellent relatively in the attrition index. Secondly, We had obtained TGA multicycle experimental results of the improved Potassium based sorbent which applied magnetite as an additive. Consequently, $CO_2$ sorption capacity had been sustained 5.5 wt% after 2nd cycle and attrition index was very excellent as 0.5%. Finally, we had investigated the characteristics of the sorbent following in properties of supporters. As a result, the sorption capacity of the KMO sorbent used base material as a supporter was appeared as 7.2 wt%.

• Korean Journal of Agricultural Science
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• v.46 no.1
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• pp.93-102
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• 2019

The materials of artificial soils in the production process of container seedlings have a great influence on plant growth. Peat moss, vermiculite, and perlite have been used as major components of artificial soils for many years; however, they could decrease carbon fixation carried out by the soil and cause environmental problems such as a change in the water quality. Thus, environmental friendly materials to replace them must be developed. The purpose of this study was to verify the optimum additive materials of artificial soils and their mixed ratios for the growth and seedling quality index (SQI) of Quercus serrata. Rice husk, mushroom sawdust, and pine bark were each used as an additive material and mixed into the growth medium at 10% and 20% of the total volume. There was no significant difference in the height growth of Q. serrata. The 20% mushroom sawdust decreased the root collar diameter by 23.4% compared to the control. The total dry weight was highest with the 10% rice husk and was significantly lower by 10.3% for the 20% mushroom sawdust compared to the control. Additionally, the SQI for all the treatments showed no tendency to increase compared with the control. Thus, this study showed the possibility of recycling biomaterials from agriculture and forest for seedling production. This method could reduce environmental problems and help eco-friendly nurseries to achieve a carbon negative impact by the recycling of by-products.

• Journal of the Korean Vacuum Society
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• v.21 no.3
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• pp.178-184
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• 2012

Carbon coils could be synthesized on nickel catalyst layer-deposited silicon oxide substrate using $C_2H_2$ and $H_2$ as source gases and $SF_6$ as an additive gas under thermal chemical vapor deposition system. The characteristics (formation density and morphology) of as-grown carbon coils were investigated as functions of additive gas flow rate and the cycling on/off modulation of $C_2H_2/SF_6$ flows. Even in the lowest $SF_6$ flow rate (5 sccm) in this work, the cycling on/off modulation injection of $SF_6$ flow for 2 minutes could give rise to the formation of nanosized carbon coils, whereas the continuous injection of $SF_6$ flow for 5 minutes could not give rise to the carbon coils formation. With increasing $SF_6$ flow rates from 5 to 30 sccm, the cycling on/off modulation injection of $SF_6$ flow confines the geometry for the carbon coils to the nanosized ones. Fluorine's role of $SF_6$ during the reaction was regarded as the main cause for the confinement of carbon coils geometries to the nano-sized ones.