• Corrosion Science and Technology
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• v.18 no.5
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• pp.206-211
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• 2019

Silicon carbide (SiC) thin films become superhard when they have microstructures of nanocolumnar crystalline grains (NCCG) with an intergranular amorphous SiC matrix. We investigated the role of ion bombardment and deposition temperature in forming the NCCG in SiC thin films. A direct-current (DC) unbalanced magnetron sputtering method was used with pure Ar as sputtering gas to deposit the SiC thin films at fixed target power of 200 W and chamber pressure of 0.4 Pa. The Ar ion bombardment of the deposited films was conducted by applying a negative DC bias voltage 0-100 V to the substrate during deposition. The deposition temperature was varied between room temperature and $450^{\circ}C$. Above a critical bias voltage of -80 V, the NCCG formed, whereas, below it, the SiC films were amorphous. Additionally, a minimum thermal energy (corresponding to a deposition temperature of $450^{\circ}C$ in this study) was required for the NCCG formation. Transmission electron microscopy, Raman spectroscopy, and glancing angle X-ray diffraction analysis (GAXRD) were conducted to probe the samples' structural characteristics. Of those methods, Raman spectroscopy was a particularly efficient non-destructive tool to analyze the formation of the SiC NCCG in the film, whereas GAXRD was insufficiently sensitive.

• Proceedings of the Korea Association of Crystal Growth Conference
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• 1997.10a
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• pp.187-187
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• 1997

Silicon nitride is the most excellent materials among structural ceramics. It has been reported that fracture toughness was improved with adding second phase particles, whisker, fiber etc. However, containing of second phase particles enhanced fracture toughness, however flexural strength was degraded. As adding nanosize SiC particles into silicon nitride, the physical properties of fluxural strength, fracture toughness, the modulus of elasticity. In this study, 2wt% $Al_2$O$_3$ and 4 wt% $Y_2$O$_3$ were added into UBE E-10 and 0, 10, 20, 30, 40, 50 vol% nano-SiC powder (Sumitomo T1 powder) were added, respectively. It is hot pressed at 185$0^{\circ}C$ for 1 hour. Most of structural ceramics for engineering application are wear resistance. In this study, wear behaviors (in water) of silicon nitride with varying the amount of nano-size silicon carbide were investigated, and was compared to physical properties. Simultaneously wear mechanism will be found out.

• Journal of the Korean Ceramic Society
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• v.34 no.10
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• pp.1092-1098
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• 1997

Electrical discharge machining (EDM) was attempted on a ceramic matrix composite containing non-conductive alumina as a matrix and conductive titania as a second phase, and was found successful. As the current or duty factor increased, the material removal rate (MRR) increased and the surface roughness also increased. The EDMed surface was covered with a number of craters of a circular shape having 100-200 microns of diameter. The melting and evaporation was suggested for the EDM mechanism. The bending strength decreased 44% after EDM, but the Weibull modulus increased more than twice. Combination of EDM and barre이 polishing resulted in the maintenance of the bending strength level. Temperature distribution near a spark in the sample was computer-simulated by use of finite element method, and was found to have similar shape to the one which the observed craters have.

• Journal of the Korean Ceramic Society
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• v.26 no.2
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• pp.228-234
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• 1989

Pressureless-sintering of SiC with additions of yttria and alumina was studied. SiC could be densified to about 97% of its theoretical density at 185$0^{\circ}C$ which is about 20$0^{\circ}C$ below the normal sintering temperature of SiC with boron and carbon. Yttria and alumina formed intergranular liquid phases at the sintering temperature and promoted densification by the liquid phase sintering mechanism. The microstructure of sintered specimens was equiaxed and the liquid phase appeared to wet and dissolve SiC grains. The fracture toughness was measured by indentation method and found to be 5.3MPa.m1/2. Processing flaws near the surface of specimens appeared to be the major fracture origin during 3-point bending tests.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.21 no.2
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• pp.23-30
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• 2022

After drilling, reaming is required to process a workpiece for obtaining an excellent surface quality. In general, a cermet is defined as a "composite of a ceramic hard phase and metal-bonded phase." Cermets have excellent abrasion resistance, thermal resistance, and performance in finishing operations that require surface roughness and processing precision. However, although cermets have significant advantages, research on them is insufficient. In this study, workpiece SM45C was machined using drills and cermet reamers. The cermet reamer was processed for drag finishing for 0, 4, and 6 min. The experimental results showed the effects of drag finishing on surface roughness and dimensional accuracy.

• Resources Recycling
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• v.31 no.6
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• pp.60-65
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• 2022

This study presents the carburization process for recycling sludge, which was formed during silicon wafer machining. The sludge used in the carburization process is a mixture of silicon and silicon carbide (SiC) with iron as an impurity, which originates from the machine. Additionally, the sludge contains cutting oil, a fluid with high viscosity. Therefore, the sludge was dried before carburization to remove organic matter. The dried sludge was washed by acid cleaning to remove the iron impurity and subsequently carburized by heat treatment under vacuum to form the SiC powder. The ratio of silicon to SiC in the sludge was varied depending on the sources and thus carbon content was adjusted by the ratio. With increasing SiC content, the carbon content required for SiC formation increased. It was demonstrated that substoichiometric SiC_x (x<1) was easily formed when the carbon content was insufficient. Therefore, excess carbon is required to obtain a pure SiC phase. Moreover, size reduction by high-energy milling had a beneficial effect on the suppression of SiC_x, forming the pure SiC phase.

• Journal of the Korean Ceramic Society
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• v.47 no.6
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• pp.485-490
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• 2010

In our previous studies, continuous SiC fiber-reinforced SiC-matrix composites ($SiC_f$/SiC) had been fabricated by two different slurry infiltration methods: vacuum infiltration and electrophoretic deposition (EPD). 12 wt% of $Al_2O_3-Y_2O_3$-MgO with respect to SiC powder was used as additives for liquid-phase assisted sintering. After hot pressing at $1750^{\circ}C$ under 20 MPa for 2 h in Ar atmosphere, a high composite density could be achieved for both cases, whereas the problems such as large grain size and non-uniform distribution of liquid phase were observed, which was resulted in the relatively poor mechanical properties of composites. Therefore, efforts have been made to reduce the grain growth during the sintering, including the optimization for hot pressing condition and utilization of spark plasma sintering using a SiC monolith. Based on the results, spark plasma sintering was found to be effective method in decreasing the amount of sintering additive, time and grain growth, which will be explained in comparison to the results of hot pressing in this paper.

• Journal of Magnetics
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• v.22 no.2
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• pp.244-249
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• 2017

To get deeper insight into the effect of intergranular additives in sintered Nd-Fe-B magnet and consequently improve the properties better, the interaction between additives (oxide, nitride, and carbide) and Nd-rich phase in the temperature range of 298.15-1400 K was analyzed thermodynamically. It can be found that the oxide additives became less stable than nitrides and carbides. Except for calcium oxide, almost all oxides could react with Nd from Nd-rich phase. To be different from oxide additives, the mechanism of nitrides and carbides was defined with various elements, either reaction with Nd from Nd-rich phase or not. The two different mechanisms would show different effects on the microstructure and hence properties of magnet. The thermodynamic analysis had a better agreement with the experimental information.

• Journal of the Korean Society of Industry Convergence
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• v.23 no.4_2
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• pp.669-674
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• 2020

Liquid-phase-sintered (LPS) SiC materials were briefly examined with their microstructure and mechanical property. Especially, effect of high-temperature exposure on the tendency of fracture toughness of LPS-SiC were introduced. The LPS-SiC was fabricated in hot-press by sintering powder mixture of sub-micron SiC and sintering additives of Al₂O₃-Y₂O₃. LPS-SiC represented dense morphology and SiC grain-growth with some amount of micro-pores and clustered additives as pore-filling. The strength of LPS-SiC might affected by distribution of micro-pores. LPS-SiC tended to decrease fracture toughness depending on increasing exposure temperature and time.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.214-217
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• 2004

숭화법을 이용한 탄화규소(Silicon carbide) 단결정 성장시 사용되는 원료의 상(phase)이 단결정 성장에 미치는 영향을 알아보기 위해 알파형 탄화규소 분말(${\alpha}-SiC$ powder)과 베타형 탄화규소 분말(${\beta}-SiC$ powder)을 각각 사용하였다. 알파형 탄화규소 분말을 사용한 경우에 단결정(single-crystal)을 성장할 수 있었으나, 베타형 탄화규소 분말을 사용하였을 때에는 다결정(poly-crystal)이 성장되었다. 다결정 형성요인에 관한 EPMA 분석결과, 베타형 탄화규소 분말의 탄소에 대한 실리콘의 원소조성비$(N_{Si}/N_C\;=\;1.57)$가 알파형 탄화규소 분말의 경우보다$(N_{Si}/N_C\;=\;0.81)$ 높음을 확인하였다. 따라서 흑연도가니(crucible) 내부의 실리콘 원자가 알파형 탄화규소 분말을 사용하는 경우보다 높은 과포화상태가 되어 종자정 표면에 미세한 실리콘 액적(droplet)이 중착되고 이것으로부터 일정하지 않은 방향성(random orientation)을 갖는 탄화규소 다결정(다양한 방향성을 갖는 다형 포함)이 성장한 것으로 실리콘과 탄소 원소에 대한 EPMA 지도(map) 결과를 통해 확인할 수 있었다.