• Title/Summary/Keyword: capture velocity

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Design of local exhaust ventilation for preventive maintenance in semiconductor fabrication industry using CFD (전산유체역학을 이용한 반도체 제조공정의 PM 전용 후드 설계 연구)

  • Hong, Jwaryung;Koo, Jae-Han;Park, Chang-Sup;Choi, Kwang-Min
    • Journal of Korean Society of Occupational and Environmental Hygiene
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    • v.29 no.2
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    • pp.208-216
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    • 2019
  • Objective: The aim of this study is to control residual chemicals or by-products generated in chambers during preventive maintenance (PM) in the semiconductor manufacturing industry. We designed local exhaust ventilation using computational fluid dynamics (CFD). Methods: The air flow characteristics and capture efficiency between rectangular and slot hoods were compared numerically. The software Fluent 18.1 was used to estimate uniform velocity distribution and capture efficiency for contaminants. A metal from group 15 in the periodic table was released at the bottom of the chamber to simulate emissions. Results: The slot hood had a higher capture efficiency than a rectangular hood under the same conditions because the slot hood provided uniform air flow and higher face velocity. Also, there was no rotating swirl in the plenum for slot, that is why slot had better efficiency than rectangular even though they had similar face velocity. With less than 10 slots, the capture efficiencies for contaminants were nearly 95%. The optimum conditions for a hood to achieve high efficiency was 8 to 10 slots and a face velocity over 1 m/s. Conclusions: Well-designed ventilation systems must consider both efficiency and convenience. For this study, a slot hood that had high capture efficiency and no work disturbance was designed. This will contribute to protection of the worker's health in a PM area and other areas as well. Also, this study confirms the possibility of the application CFD in the semiconductor fabrication industry.

Effect of the Floor on the Ventilation Performance of the Vortex Vent (바닥의 위치가 Vortex Vent의 배기성능에 미치는 영향)

  • Lee, Jin-Won;Lim, Young-Bok
    • Proceedings of the SAREK Conference
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    • 2009.06a
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    • pp.154-158
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    • 2009
  • The vortex ventilation system (VV) which uses a rotating finned swirler installed coaxially with the exhaust duct is a very effective local ventilator. VV can enhance the capture depth by a factor of 3-5 compared to the conventional exhaust hood, in the absence of any solid walls nearby. In real situations there may exist ceiling, side wall and floor, all of which can affect the flow field and suction performance by way of the no-slip condition on the walls. 3D CFD simulation was performed in order to see the effect of the floor on the capture performance of the VV. The presence of floor reduced suction flow velocity, and increased the critical rotational speed which is the rotational speed required for stable vortex formation. Flow velocity profile along the axis could be well approximated by a universal functional form when the distance from the exhaust inlet is non-dimensionalized by the distance to the floor. Capture depth, define by the distance from the exhaust inlet to a point of velocity decreased to 10% of that at the inlet, is reduced by about 10% when the floor distance is 6 times the exhaust hood diameter.

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A Study on the Behavior of Droplets Colliding with Parallel Wires (평행 와이어와 충돌하는 액적 거동에 관한 연구)

  • Na, J.K.;Noh, D.H.;Jung, Y.J.;Kang, B.S.
    • Journal of ILASS-Korea
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    • v.26 no.3
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    • pp.149-156
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    • 2021
  • In this study, the behavior of the droplet colliding with parallel wires was analyzed by time-delay photography. The impact behavior modes and the critical capture speed were analyzed by changing fluids, the droplet velocity, the wire diameter and the distance between wires. Seven typical modes of impacting droplet on parallel wires were observed. The tendency of mode change was generally similar when the wire diameter was changed, but the increase of the wire diameter caused the increase of the droplet velocity at which the mode changed. The modes at the highest droplet velocity were the splitting mode when the wires were closest, the passing and splitting mode in the middle, and the passing mode when the wires were farthest apart. The critical capture speed increased as the wire diameter increased and the distance between wires decreased. The ethanol droplet showed the lowest critical capture speed.

Magnetic withdrawal of particles for multiple purposes in nuclear power plants

  • Kam, Dong Hoon;Jeong, Yong Hoon;Choi, Sung-Min;Yun, Jong-Il
    • Nuclear Engineering and Technology
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    • v.53 no.12
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    • pp.3979-3989
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    • 2021
  • Several parametric effects on the magnetic collection have been evaluated considering dimension, strength of external magnetic field, injected velocity and particle concentration in the working fluid. Besides, accidental environments, expected in the containment of nuclear power plants, have also been addressed for the capture efficiency. The capture efficiency is especially enhanced with magnetic particle size and magnetic field strength through increased magnetic force; the non-magnetic coating thickness and fluid velocity hinder the magnetic collection. Based on the assessment, the magnetic withdrawal system can effectively capture magnetic particles even under accidental environments. Withdrawal of multifunctional magnetic particles or filtering of magnetic impurities can be effectively realized through the system.

Hydrodynamic Characteristics of Absorbent and Catalyst for Pre-combustion CO2 Capture (연소 전 이산화탄소 회수를 위한 흡수제 및 촉매의 수력학적 특성)

  • Ryu, Ho-Jung;Yoon, Joo-Young;Lee, Dong-Ho;Shun, Dowon;Park, Jaehyeon;Park, Yeong-Seong
    • Clean Technology
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    • v.19 no.4
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    • pp.437-445
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    • 2013
  • To develop SEWGS (sorption enhanced water gas shift) system using dry $CO_2$ absorbent for pre-combustion $CO_2$ capture, hydrodynamic characteristics of $CO_2$ absorbents were measured and investigated. The minimum fluidization velocity of $CO_2$ absorbent was measured and the effects of the operating conditions were investigated to operate the system at bubbling fluidized bed condition. The minimum fluidization velocity decreased as pressure and temperature increased. Moreover, the minimum fluidization velocity decreased as column diameter increased. The effects of operating conditions on the solid circulation rate were measured and investigated to select appropriate operating conditions for continuous $CO_2$ capture and regeneration. The measured solid circulation rates were ranged between 10 and 65 kg/h and increased as the solid injection velocity, gas velocity in the regeneration reactor, and solid height increased.

Study of Magnetic Filtration for Subway MVAC Dust (지하철 공조실 미세먼지에 대한 자성포집연구)

  • Park, Hae Woo;Chung, Sang Gui;Jo, Young Min
    • Particle and aerosol research
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    • v.11 no.2
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    • pp.37-46
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    • 2015
  • Dust particles, which inflow to the subway mechanical ventilation and air conditioning(MVAC) chamber, contain a fair amount of iron compounds, approximately 25.2w/w%. This work attempted to capture those iron containing dust using magnetic filters. Average magnetization value of the test MVAC dust was 0.012 emu on 5,000 Oe, which could correspond sufficiently with the magnetic interaction. External permanent magnets provided with magnetization of iron mesh screen showing high gradient magnetic field(HGM). It resulted in the capture efficiency with 84.0 ~ 99.7% and 81.2 ~ 99.8% for $PM_{10}$ and $PM_{2.5}$ respectively. Magnetic capture was found to be closely associated with the magnetic intensity, mesh opening size and flow velocity.

Design of Glide Slope Capture Logic Using Model Inversion

  • Park, Hyung-Sik;Ha, Cheol-Keun;Kim, Byoungsoo
    • 제어로봇시스템학회:학술대회논문집
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    • 2001.10a
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    • pp.50.6-50
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    • 2001
  • This paper deals with a design of nonlinear glide slope capture logic using dynamic model inversion in singular perturbation, which is applicable to the autolanding in ILS. Aircraft dynamics are separated into the fast time-scale variables, related with the inner-loop design, and the slow time-scale variables, related with the outer-loop design. It is assumed that the aircraft starts landing at 1000ft of altitude, -2.5deg of flight path angle, and 250ft/sec of velocity. In the outer-loop design, commands of altitude and velocity are selected and thereby the pseudo-controls of power level and pitch rate are determined. Also the elevator input to the aircraft is determined in the inner-loop design. The final design is evaluated in 6 DOF simulation model of the associated aircraft, in which the actuator models are not included. The results show the satisfactory autolanding ...

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Using Kalman Filtering and Segmentation Techniques to Capture and Detect Cracks in Pavement

  • Hsu, C.J.;Chen, C.F.
    • Proceedings of the KSRS Conference
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    • 2003.11a
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    • pp.930-932
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    • 2003
  • For this study we used a CCD video camera to capture the pavement image information via the computer. During investigation processing, the CCD video camera captured 10${\sim}$30 images per second. If the vehicle velocity is too fast, the collected images will be duplicated and if the velocity is too slow there will be a gapped between images. Therefore, in order to control the efficiency of the image grabber we should add accessory tools such as the Differential Global Positioning System (DGPS) and odometer. Furthermore, Kalman Filtering can also solve these problems. After the CCD video camera captured the pavement images, we used the Least-Squares method to eliminate images of gradation which have non-uniform surfaces due to the illumination at night. The Fuzzy Entropy method calculates images of threshold segments and creates binary images. Finally, the Object Labeling algorithm finds objects that are cracks or noises from the binary image based on volume pixels of the object. We used these algorithms and tested them, also providing some discussion and suggestions.

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Identification of user's Motion Patterns using Motion Capture System

  • Jung, Kwang Tae;Lee, Jaein
    • Journal of the Ergonomics Society of Korea
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    • v.33 no.6
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    • pp.453-463
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    • 2014
  • Objective:The purpose of this study is to identify motion patterns for cellular phone and propose a method to identify motion patterns using a motion capture system. Background: In a smart device, the introduction of tangible interaction that can provide new experience to user plays an important role for improving user's emotional satisfaction. Firstly, user's motion patterns have to be identified to provide an interaction type using user's gesture or motion. Method: In this study, a method to identify motion patterns using a motion capture system and user's motion patterns for using cellular phone was studied. Twenty-two subjects participated in this study. User's motion patterns were identified through motion analysis. Results: Typical motion patterns for shaking, shaking left and right, shaking up and down, and turning for using cellular phone were identified. Velocity and acceleration for each typical motion pattern were identified, too. Conclusion: A motion capture system could be effectively used to identify user's motion patterns for using cellular phone. Application: Typical motion patterns can be used to develop a tangible user interface for handheld device such as smart phone and a method to identify motion patterns using motion analysis can be applied in motion patterns identification of smart device.

Spreading and Deposition Characteristics of a Water Droplet Impacting on Hydrophobic Textured Surfaces (소수성 텍스쳐 표면에 충돌한 단일 액적의 퍼짐 및 고착 특성)

  • Lee, Jae-Bong;Moon, Joo-Hyun;Lee, Seong-Hyuk
    • Journal of ILASS-Korea
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    • v.17 no.1
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    • pp.14-19
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    • 2012
  • The present study conducts experimental investigation on spreading and deposition characteristics of a $4.3{\mu}l$ de-ionized (DI) water droplet impacting upon aluminum (Al 6061) flat and textured surfaces. The micro-textured surface consisted the micro-hole arrays (hole diameter: $125{\mu}m$, hole depth: $125{\mu}m$) fabricated by the conventional micro-computer numerical control (${\mu}$-CNC) milling machine process. We examined the surface effect of texture area fraction ${\varphi}_s$ ranging from 0 to 0.57 and impact velocity of droplet ranging from 0.40 m/s to 1.45 m/s on spreading and deposition characteristics from captured images. We used a high-speed camera to capture sequential images for investigate spreading characteristics and the image sensor to capture image of final equilibrium deposition droplet for analyze spreading diameter and contact angle. We found that the deposition droplet on textured surfaces have different wetting states. When the impact velocity is low, the non-wetting state partially exists, whereas over 0.64 m/s of impact velocity, totally wetting state is more prominent due to the increase kinetic energy of impinging droplet.