Design of local exhaust ventilation for preventive maintenance in semiconductor fabrication industry using CFD |
Hong, Jwaryung
(Samsung Health Research Institute, Samsung Electronics Co. Ltd.)
Koo, Jae-Han (Environment Safety Health Group, Semiconductor R&D Center, Samsung Electronics Co. Ltd.) Park, Chang-Sup (Environment Safety Health Group, Semiconductor R&D Center, Samsung Electronics Co. Ltd.) Choi, Kwang-Min (Samsung Health Research Institute, Samsung Electronics Co. Ltd.) |
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