• Proceedings of the KIEE Conference
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• 2001.07c
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• pp.1896-1898
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• 2001

An offset problem caused by the static parasitic capacitors is analyzed and then some techniques to reduce their effect on the capacitive position sensor are presented. Also new offset compensation technique is proposed that by adjusting the magnitudes of the modulating signals independently, the charge imbalance between electrodes caused by the parasitic capacitors is eliminated without sensor gain variation. Simulation results are given to validate the proposed compensation technique.

• Journal of the Korea Society of Computer and Information
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• v.17 no.8
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• pp.107-114
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• 2012

We have developed a textile capacitive pressure sensor for smart gait analysis. The proposed system can convert sensor signal into step counts and pressure levels by different posture. To evaluate the performance of insole type textile capacitive sensor, we measured capacitance change by increment of weights from 10 kg to 100 kg with 10 kg increment using M1 class rectangular weights (four 20 kg weights and two 10 kg weights) which have ${\pm}10%$ tolerance. The result showed non-linearity characteristic of a general capacitive pressure sensor. The test was performed according to a test protocol for four different postures (sitting, standing, standing on a left leg and standing on a right leg) and different walking speeds (1 km/h and 4 km/h). Five healthy male subjects were participated in each test. As we expected, the pressure level was changed by pressure distribution according to posture. Also, developed textile pressure sensor showed higher recognition rate (average 98.06 %) than commercial pedometer at all walking speed. Therefore, the proposed step counts and posture monitoring system using conductive textile capacitive pressure sensor proved to be a reliable and useful tool for monitoring gait parameters.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.46 no.6
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• pp.25-30
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• 2009

In this paper, a full-digital capacitive sensor for touch key applications is proposed. The proposed circuit consists of two capacitive loads to measure and a resistor between the capacitive loads. As the method measures the delays of the resistor and two capacitive loads respectively, and obtains difference between the capacitive loads by subtracting the two delays, it can reduce the effects of changing of operating environment variables such as supplying voltage, temperature and humidity. Experimental results show the method has l.02pF resolution and can be applied to touch key applications.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.3
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• pp.33-38
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• 2002

To establish the national standard of capacitance, four main electrodes of the cross capacitor which were evaluated to linearity and roundness less the $\pm 1 \mu m$ respectively have to be adjusted symmetrically in an inner cylinder. Four LM shafts with diameter of 5 mm were installed between main electrodes of the cross capacitor, and the electrodes were adjusted, as the first step, by means of the measured capacitance. In the second step, the symmetrical adjustment up to $\pm 1.2\mu m$ was performed by using a ball sensor, ball-type movable sensor, non-contacting capacitive sensor and upper guard sensor which were developed in this project.

• Journal of Sensor Science and Technology
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• v.24 no.3
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• pp.208-213
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• 2015

The purpose of this study is to optimize the design of a capacitive pressure sensor element using the simulation of electrical characteristics. The simulation of the ceramic sensor diaphragm ($Al_2O_3$) was performed by permitting pressure to change the curvature of the diaphragm. The pressure capacitance ($C_P$) was increased from 19.63 pF to 15.26 pF by applying pressure because the distance between the electrodes has been changed from $30{\mu}m$ to $15{\mu}m$. When the thickness of the diaphragm was changed to 0.46~0.52 mm, a larger capacitance change showed in accordance with the reduced thickness, which means an increase of sensitivity. However, considering the viewpoint of the signal linearity, it was selected for the optimum thickness of the diaphragm to 0.50 mm. The designed sensor element based on simulated results was tested to measure the output characteristics. Comparing of simulated and measured results, there was a margin of error of approximately 2%.

• Journal of the Semiconductor & Display Technology
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• v.21 no.2
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• pp.107-111
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• 2022

In this paper, a plastic film type submersion sensor capable of measuring submersion speed was developed. This submersion sensor is designed as a capacitive type, and it is a sensor that outputs the change in capacitance between the electrode of the submersion sensor and the grounded body as a voltage through a C-V(capacitance-voltage) converter. We developed an submersion sensor in which two electrodes of different lengths are connected in parallel to measure the submersion speed accurately by minimizing the influence of noise such as contamination. When both electrodes of the submersion sensor are exposed to water, the rate of change of water level suddenly increases, so the submersion speed is measured by measuring the time to this point. Since the difference in length between the two electrodes of the submersion sensor does not change in any case, it is possible to accurately measure the submersion speed.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.387-393
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• 2004

General purpose of cylindrical capacitive displacement sensor(CCS) is measuring run-out motion and deflection of rotor. If CCS has narrow sensing range, its sensitivity coefficients must be calibrated precisely. And x, y component of CCS output can be coupled. In this research, CCS calibration procedure is automated with automatic calibration program and PC-controlled stage. And, coupled-terms of CCS signals were removed and the errors between measured position and mapped CCS signal were reduced obviously by sensitivity matrix that linearly.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.672-676
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• 2004

In this paper, measuring system of 5 DOF motion errors are proposed using two capacitive type sensor, a straight edge and a laser interfoerometer. Yawing error and pitching error are measured using the laser interferometer, and rolling error is measured by the reversal method using a capacitive type sensor. Linear motion errors of horizontal and vertical direction are measured using the sequential two point method. In this case, influence of angular motion errors is compensated using the previously measured angular motion errors. In the horizontal direction, measuring accuracy is within 0.05 $\mu$m and 0.27 arcsec, and in the vertical direction, it is within 0.15 $\mu$m and 0.5 arcsec. From these results, it is confirmed that the proposed measureing system is very effective to the measurement of 5 DOF motion errors in the ultra precision feed tables.

• The Journal of Korea Robotics Society
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• v.11 no.3
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• pp.140-145
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• 2016

In this paper, we fabricate arrayed-type flexible capacitive touch sensor using liquid metal (LM) droplets (4 mm spatial resolution). Poly-4-vinylphenol (PVP) layer is used as a dielectric layer on the electrode patterned Polyethylene naphthalate (PEN) film. Bonding tests between hydroxyl group (-OH) on the PVP film and polydimethylsiloxane (PDMS) are conducted in a various $O_2$ plasma treatment conditions. Through the tests, we can confirm that non-$O_2$ plasma treated PVP layer and $O_2$ plasma treated PDMS can make a chemical bond. To measure dynamic range of the device, one-cell experiments are conducted and we confirmed that the fabricated device has a large dynamic range (~60 pF).

• Proceedings of the KSME Conference
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• 2000.11a
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• pp.548-553
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• 2000

A new design of cylindrical capacitive sensor(CCS) for the displacement measurement of precision active magnetic bearing(AMB) spindle is presented in this paper. This research is motivated by the problem that existing 4-segment CCS is still sensitive to the $3^{rd}$ harmonic component of the geometric errors of a rotor. The procedure of designing new CCS starts from the modeling and error analysis of CCS. The angular size of CCS is set up as a design parameter, and new 8-segment CCS is introduced to possess an arbitrary angular size. The optimum geometry of CCS to minimize the effect of geometric errors is determined through minimum norm approach. Experimental results with test rotors have confirmed the improvement in geometric error suppression.