Browse > Article
http://dx.doi.org/10.7746/jkros.2016.11.3.140

Verification of Bonding Force between PVP Dielectric Layer and PDMS for Application of Flexible Capacitive-type Touch Sensor with Large Dynamic Range  

Won, Dong-Joon (Mechanical Engineering, Pohang University of Science and Technology)
Huh, Myoung (Mechanical Engineering, Pohang University of Science and Technology)
Kim, Joonwon (Mechanical Engineering, Pohang University of Science and Technology)
Publication Information
The Journal of Korea Robotics Society / v.11, no.3, 2016 , pp. 140-145 More about this Journal
Abstract
In this paper, we fabricate arrayed-type flexible capacitive touch sensor using liquid metal (LM) droplets (4 mm spatial resolution). Poly-4-vinylphenol (PVP) layer is used as a dielectric layer on the electrode patterned Polyethylene naphthalate (PEN) film. Bonding tests between hydroxyl group (-OH) on the PVP film and polydimethylsiloxane (PDMS) are conducted in a various $O_2$ plasma treatment conditions. Through the tests, we can confirm that non-$O_2$ plasma treated PVP layer and $O_2$ plasma treated PDMS can make a chemical bond. To measure dynamic range of the device, one-cell experiments are conducted and we confirmed that the fabricated device has a large dynamic range (~60 pF).
Keywords
Capacitive-type touch sensor; Poly-4-vinylphenol (PVP); Bonding; Large dynamic range;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 E.G. Bakhoum, M.H.M Cheng, "Capacitive pressure sensor with very large dynamic range," IEEE T. COMP. PACK. MAN., vol. 33, no. 1, pp. 79-83, 2010.   DOI
2 H.K. Lee, J. Chung, S.I. Chang, and E. Yoon, "Real-time measurement of the three-axis contact force distribution using a flexible capacitive polymer tactile sensor," J. Micromech. Microeng., vol. 21, no. 3, pp. 035010, February, 2011.   DOI
3 M.Y. Cheng, C.L. Lin, Y.T. Lai, and Y.J. Yang, "A polymer-based capacitive sensing array for normal and shear force measurement," Sensors, vol. 10, pp. 10211-10225, October, 2010.   DOI
4 J.A. Dobrzynska, M.A.M. Gijs, "Polymer-based flexible capacitive sensor for three-axial force measurements," J. Micromech. Mciroeng., vol. 23, no. 1, pp. 015009, November, 2012.
5 H.K. Lee, J. Chung, S.I. Chang, and E. Yoon, "Normal and Shear Force Measurement Using a Flexible Polymer Tactile Sensor With Embedded Multiple Capacitors," J. Microelectromech. S., vol. 17, no. 4, pp. 934-942, August, 2008.   DOI
6 L. Viry, A. Levi, M. Totaro, A. Mondini, V. Mattoli, B. Mazzolai et al., "Flexible three-axial force sensor for soft and highly sensitive artificial touch," Adv. Mater., vol. 26, no. 17, pp. 2659-2664, February, 2014.   DOI
7 R.D. Ponce Wong, J.D. Posner, and V.J. Santos, "Flexible microfluidic normal force sensor skin for tactile feedback," Sensor. Actuat. A-Phys, vol. 179, pp. 62-69, June, 2012.   DOI
8 M.Y. Cheng, C.L. Lin, and Y.J. Yang, "Tactile and shear stress sensing array using capacitive mechanisms with floating electrodes," in IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), Wanchai, Hong Kong, 2010, pp. 228-231.
9 M.Y. Cheng, X.H. Huang, C.W. Ma, and Y.J. Yang, "A flexible capacitive tactile sensing array with floating electrodes," J. Mciromech. Microeng., vol. 19, pp. 115001, September, 2009.   DOI
10 D.J. Won, S. Baek, H. Kim, and J. Kim, "Arrayed-type touch sensor using micro liquid metal droplets with large dynamic range and high sensitivity," Sensor. Actuat. A-Phys, vol. 235, no. 1, pp. 151-157, November, 2015.   DOI
11 K. Fukuda, Y. Takeda, M. Mizukami, D. Kumaki, and S. Tokito, "Fully solution-processed flexible organic thin film transistor arrays with high mobility and exceptional uniformity," Sci. Rep-UK, vol. 4, no. 3947, February, 2014.
12 A. Folch, B.H. Jo, O. Hurtado, D.J. Beebe, and M. Toner, "Microfabricated elastomeric stencils for micropatterning cell cultures," J. Biomed. Mater. Res., vol. 52, pp. 346-353, March, 2000.   DOI
13 I.J. Baek, J.H. Yoo, H.S. Lim, H.J. Chang, H.H. Park, "Preparation and properties of PVP (poly-4-vinylphenol) gate insulation film for organic thin film transistor," Journal of the microelectronics and packaging society, vol. 12, no. 4, pp. 359-363, 2005.
14 Y. Sun, J. Rogers, "Structural forms of single crystal semiconductor nanoribbons for high performance stretchable electronics," J. Mater. Chem., vol. 17, pp. 832-840, January, 2007.   DOI