Browse > Article
http://dx.doi.org/10.5369/JSST.2015.24.3.208

A Study on Electrical Characteristics of a Capacitive Pressure Sensor Element to Measure the Pressure of Refrigerant of Air-Conditioner  

Choi, Ga-Hyun (Green Materials R&D Center, Korea Automotive Technology Institute)
Chung, Woo-Young (Green Materials R&D Center, Korea Automotive Technology Institute)
Choi, Jung-Woon (Auto Industrial Co., LTD.)
Kim, Si-Dong (Auto Industrial Co., LTD.)
Min, Joon-Won (Green Materials R&D Center, Korea Automotive Technology Institute)
Publication Information
Journal of Sensor Science and Technology / v.24, no.3, 2015 , pp. 208-213 More about this Journal
Abstract
The purpose of this study is to optimize the design of a capacitive pressure sensor element using the simulation of electrical characteristics. The simulation of the ceramic sensor diaphragm ($Al_2O_3$) was performed by permitting pressure to change the curvature of the diaphragm. The pressure capacitance ($C_P$) was increased from 19.63 pF to 15.26 pF by applying pressure because the distance between the electrodes has been changed from $30{\mu}m$ to $15{\mu}m$. When the thickness of the diaphragm was changed to 0.46~0.52 mm, a larger capacitance change showed in accordance with the reduced thickness, which means an increase of sensitivity. However, considering the viewpoint of the signal linearity, it was selected for the optimum thickness of the diaphragm to 0.50 mm. The designed sensor element based on simulated results was tested to measure the output characteristics. Comparing of simulated and measured results, there was a margin of error of approximately 2%.
Keywords
Pressure sensor; Capacitive type; Air-conditioner for automobile; Pressure of refrigerant;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 S. H. Cho, D. S. Lee, J. W. Choi, S.W. Choi, S. H. Park, J. R. Lee, and K. Y. Lee, "A design of signal processing analog front-end IC for automotive piezo-resistive type pressure sensor", J. of The Institute of Electronics and Information Engineers, Vol. 51, No. 8, pp.1722-1732, 2014
2 K. K. Baik, "Microsensor", Proc. of Society of Air-conditioning and refrigerating engineers of Korea, pp. 107-114, 2003
3 W. H. Ko, and Q. Wang, "Touch mode capacitive pressure sensor for industrial applications", Proc. Of IEEE on Micro Electro Mechanical Systems, pp. 284-289, 1997
4 W. H. Ko, and Q. Wang., "Modeling of touch mode capacitive sensor and diaphragms", Proc. Of Solid-State Sensor and Actuators, pp. 230-241, 1999
5 M. Z. Shaikh, Dr. S. F. Kodad, and Dr. B. C. Jinaga., "Modeling and simulation of MEMS characteristics: A numerical integration approach", J. of Theoretical an Applied Information Technology, pp. 415-418, 2008
6 W. S. Choi, "Automotive pressure sensor technology applying the ceramic materials", Intensify Report of Ceramics Bank, pp. 1-16, 2013
7 W. J. Fleming, "New automotive sensors-A review", J. of IEEE Sensors, Vol. 8, No. 11, 2008
8 S. I. Pak, and T. H. Oh, "Correlation and simple linear regression", J. Vet. Clin., Vol. 27, No. 4, pp. 427-434, 2010
9 Y. S. Bae, J. H. Seo, E. S. Jung, and M. Y. Sung, "Design of the readout IC for IR image sensor with a novel input stage to improve linearity", Proc. Of the KIEEME Annual Summer Conf., pp. 1912-1913, 2010
10 J. T. Kim, and H. M. Choi, "Estimation of the number of change-points with local linear fit", J. of Data & Information Science Society, Vol. 13, No. 2, pp. 251-260, 2002