• Journal of the Institute of Electronics Engineers of Korea SD
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• v.42 no.11
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• pp.1-8
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• 2005

In this paper, we present design and prototyping of a low-cost, integrated multi-functional micro health sensor chip that can be used or embedded in widely consumer devices, such as cell phone and PDA, for monitoring environmental condition including air pressure, temperature and humidity. This research's scope includes basic individual sensor study, architecture for integrating sensors on a chip, fabrication process compatibility and test/evaluation of prototype sensors. The results show that the integrated TPH sensor has good characteristics of ${\pm}\;1\%FS$ of linearity and hysteresis for pressure sensor and temperature sensor and of ${\pm}\;5\%FS$ of linearity and hysteresis But if we use 3rd order approximation for humidity sensor, full scale error becomes much smaller and this will be one of our future study.

• Proceedings of the KIEE Conference
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• 2015.07a
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• pp.1241-1242
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• 2015

이 연구는 정전용량형 압력센서 내의 공기가 센서 성능에 미치는 영향을 줄이고자 이론적 접근과 실험적 확인을 통해 제안된 바 있는 센서 모델을, 유한요소해석 프로그램인 ANSYS로 각각의 조건에 따라 해석하여 기존에 제시 된 결과들과 비교하는 과정을 다루었다. FEA(Finite Element Analysis)결과, air chamber를 추가한 센서는 기존의 센서보다 sensitivity가 향상되었음을 확인할 수 있었다. 또한, FEA로 얻은 sensitivity 값은 이론값과 1.8%~10.1%의 차이를 보였으며, sensitivity ratio는 이론값과 실험값의 중간 정도로 나타났다.

• Journal of Mechanical Science and Technology
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• v.20 no.4
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• pp.554-560
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• 2006

This paper describes the demonstration of successful fabrication and initial characterization of micromachined pressure sensors and micromachined jets (microjets) fabricated for use in macro flow control and other applications. In this work, the microfabrication technology was investigated to create a micromachined fluidic control system with a goal of application in practical fluids problems, such as UAV (Unmanned Aerial Vehicle)-scale aerodynamic control. Approaches of this work include: (1) the development of suitable micromachined synthetic jets (microjets) as actuators, which obviate the need to physically extend micromachined structures into an external flow; and (2) a non-silicon alternative micromachining fabrication technology based on metallic substrates and lamination (in addition to traditional MEMS technologies) which will allow the realization of larger scale, more robust structures and larger array active areas for fluidic systems. As an initial study, an array of MEMS pressure sensors and an array of MEMS modulators for orifice-based control of microjets have been fabricated, and characterized. Both pressure sensors and modulators have been built using stainless steel as a substrate and a combination of lamination and traditional micromachining processes as fabrication technologies.

• Journal of Sensor Science and Technology
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• v.10 no.3
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• pp.173-179
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• 2001

The currently used semiconductor pressure sensors are piezoresistive and capacitive type. Especially, semiconductor micro pressure sensors have a great deal of attention because of their small size. However, its fabrication processes are difficult, so that its yield is poor. For the purpose of resolving the drawbacks of the existing silicon pressure sensors, we demonstrate a new type of pressure sensor using PSFET(pressure sensitive field effect transistor) and investigate its operational characteristics. We used PZT(Pb(Zr,Ti)$O_3$) as a pressure sensing material. PZT thin films were deposited on a gate oxide of MOSFET by an rf-magnetron sputtering method. To abtain the stable phase, perovskite structure, furnace annealing technique have been employed in PbO ambient. The sensitivity of the PSFET was 0.38 mV/mmHg.

• Journal of Practical Engineering Education
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• v.6 no.2
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• pp.105-110
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• 2014

In this work, mechanical characteristics of titanium diaphragm have been studied as a potential robust substrate and a diaphragm material for automotive tire pressure sensor. Lamination process techniques combined with traditional micromachining processes have been adopted as suitable fabrication technologies. To illustrate these principles, capacitive pressure sensors based on titanium diaphragm have been designed, fabricated and characterized. The fabrication process for micromachined titanium devices keeps the membrane and substrate being at the environment of 20 MPa pressure and $200^{\circ}C$ for a half hour and then subsequently cooled to $24^{\circ}C$. Each sensor uses a stainless steel substrate, a laminated titanium film as a suspended movable plate and a fixed, surface micromachined back electrode of electroplated nickel. The finite element method is adopted to investigate residual stresses formed in the process. Besides, out-of-plane deflections are calculated under pressures on the diaphragm. The sensitivity of the fabricated device is $9.45ppm\;kPa^{-1}$ with a net capacitance change of 0.18 pF over a range 0-210 kPa.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.245-246
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• 2009

정전용량형 후막 스트레인 게이지(piezocapacitive thick film strain gage)는 세라믹 ($Al_2O_3$)을 주 원료로 하는 지지대(약 5mm)와 다이어프램(약 $300{\mu}m$) 그리고 가드 링으로 구성된다. 전극 판은 도전성 페이스트를 이용하여 지지대와 다이어프램에 형성되었으며 극판 사이에는 유전체 메이스트를 사용하여 스크린 인쇄로 후막을 형성하였다. 극판 사이의 가드 링 두께는 약 $30{\mu}m$정도로 다이어프램의 변위 최대값을 유지시키는 데 필요한 간격이다. 따라서 정전용랑형 후막 스트레인 게이지는 지지대를 중심으로 다이어프램에 압력 (0.5~1.0bar)이 인가될 때 변위를 발생시키면서 커패시터 값이 압력의 크기에 따라 비례 특성을 가지고 변화하는 것을 이용한 것이다. 압력이 없을때 초기값은 35pF~40pF 정도이고 정격압력의 최대치를 인가시켰을 때 약 55pF~55p를 나타내었다.

• Journal of the Korean Institute of Telematics and Electronics T
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• v.35T no.1
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• pp.48-58
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• 1998

For the purpose of designing novel capacitance pressure sensor, several effects on sensitivity such as parasitic capacitance effects, temperature/thermal drift and leakage current have to be eleiminated. This paper proposed the experimental studies on frequency compensation method by electronic circuit technique, C-V converting method with switched capacitor and C-F converting method with schmitt trigger circuit. The third interface circuit by frequency compensation method is composed to eliminate the drift and leakage component by comparision sensing frequency with reference frequency. The signal transmission is realized by digital signal to minimize the influence of noise and high resolution is obtained by means of increasing the number of digital bits. In the fabricated high performance C-V interface, the offset voltage was not appeared, and in case of voltage source, 4.0V, feed back capacitance, 10㎊, the pressure, 0~10 ㎪, the sensitivity of C-V converter is 28 ㎷/㎪.V, the temperature drift characteristic, 0.051 %F.S./$^{\circ}C$ and C-F converter shows -6.6 Hz/pa, 0.078 %F.S./$^{\circ}C$ respectively, relatively good ones.

• Transactions of the Korean Society of Automotive Engineers
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• v.13 no.3
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• pp.87-95
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• 2005

Most of the motorcycle engines have used carburetors in the fuel system, because of its simple structure and reliability but the fuel economy and the emissions of those engines are bad when we compared with automobile engines .To meet with the tighten emission regulations and the higher requirements for fuel economy, the application of the carburetor on the motorcycle engines would be limited. Therefore, it is important to develope a ECU control system for motorcycle engines. Since the fuel injection system is expensive, it is necessary to decrease the cost of ECU system for motorcycle engines, but the accuracy of the ECU control system should be increased as high as possible. In this paper, we studied about the AFS characteristics of motorcycle engine controled by indirect method.

• International Journal of Automotive Technology
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• v.3 no.2
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• pp.53-56
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• 2002

A new generation of the BMW child seat and occupant detection system SBE2 far a smart airbag system is described. The SBE2 system consists of two subsystems: OC (Occupant Classification) and FDS (Field Detection System). The OC system is a force sensitive sensor array that measures a pressure profile. The FDS system detects child seat and occupant according to the change of electrical field generated by four capacitive plates. Combining the signals from both subsystems, the BMW SBE2 system can distinguish fully automatically between a child seat and a person.

• Proceedings of the KIEE Conference
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• 2011.07a
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• pp.1796-1797
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• 2011

본 연구에서는 기존 오실로메트리(oscillomatry) 혈압측정에서 가압 커프의 영향을 최소화 하기위하여, 캐패시턴스 센서를 추가하여 혈압측정 동안의 혈압 및 혈류의 변화량을 측정하여 얻은 신호로 수축기 혈압 및 이완기 혈압을 추정하였다. 필터를 적용한 캐패시턴스 센서의 값을 피크의 크기에 따른 알고리즘을 적용하였으며 얻어진 혈압값과 기존의 혈압계의 값을 비교분석 하였다. 피험자의 연령은 $25{\pm}4$세의 15명을 기준으로 실험하였으며 알콜 및 운동 등 혈압에 영향을 미치는 요소들에 대해 제한 시켰으며 측정 전 15분의 안정을 취했다. 결과적으로 피험자 15명에 대해 수축기 혈압에서의 오차범위는 ${\pm}4$ mmHg이하로 나타났으며 평균 및 표준편차는 각각 2.13 mmHg 과 1.36 mmHg이었다. 이완기 혈압에서는 오차범위가 11명에 대해 수축기혈압과 같았으며 4명은 ${\pm}7mmHg$이상 이였고 평균과 표준편차는 4.20 mmHg와 2.24 mmHg 로 수축기 혈압에서 오차 및 분산 모두 이완기혈압 추정보다 비교적 정확한 값을 검출했다.