• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.553-554
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• 2010

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.177-178
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• 2011

• 센서학회지
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• 제23권5호
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• pp.326-331
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• 2014

In this study, a MEMS microphone that uses $Si_3N_4$ as the vibration membrane was produced for application as an auditory device using a sound visualization technique (sound visualization) for the hearing impaired. Two sheets of 6-inch silicon wafer were each fabricated into a vibration membrane and back plate, after which, wafer bonding was performed. A certain amount of charge was created between the bonded vibration membrane and the back plate electrodes, and a MEMS microphone that functioned through the capacitive method that uses change in such charge was fabricated. In order to evaluate the characteristics of the prepared MEMS microphone, the frequency flatness, frequency response, properties of phase between samples, and directivity according to the direction of sound source were analyzed. The MEMS microphone showed excellent flatness per frequency in the audio frequency (100 Hz-10 kHz) and a high response of at least -42 dB (sound pressure level). Further, a stable differential phase between the samples of within -3 dB was observed between 100 Hz-6 kHz. In particular, excellent omnidirectional properties were demonstrated in the frequency range of 125 Hz-4 kHz.

• ETRI Journal
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• 제38권2호
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• pp.235-243
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• 2016

A low-noise readout integrated circuit (ROIC) for a microelectromechanical systems (MEMS) microphone is presented in this paper. A positive feedback signal amplification technique is applied at the front-end of the ROIC to minimize the effect of the output buffer noise. A feedback scheme in the source follower prevents degradation of the noise performance caused by both the noise of the input reference current and the noise of the power supply. A voltage booster adopts noise filters to cut out the noise of the sensor bias voltage. The prototype ROIC achieves an input referred noise (A-weighted) of -114.2 dBV over an audio bandwidth of 20 Hz to 20 kHz with a $136{\mu}A$ current consumption. The chip is occupied with an active area of $0.35mm^2$ and a chip area of $0.54mm^2$.

• KEPCO Journal on Electric Power and Energy
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• 제6권4호
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• pp.405-411
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• 2020

In this paper, we designed the COS MEMS system for sensing the falling detection and explosive noise of fuse link in COS (Cut Out Switch) installing on the power distribution. This system analyzed the failure characteristics and an instantaneous breakdown of power distribution. Therefore, our system strengths the industrial competence and guaranties the stable power supply. In this paper, we applied BLE (Bluetooth Low Energy) technology which is suitable protocol for low data rate, low power consumption and low-cost sensor applications. We experimented with LSM6DSOX which is system-in-module featuring 3 axis digital accelerometer and gyroscope boosting in high-performance mode and enabling always-on low-power features for an optimal motion for the COS fuse holder. Also, we used the MP34DT05-A for gathering an ultra-compact, low power, omnidirectional, digital MEMS microphone built with a capacitive sensing element and an IC interface. The proposed COS MEMS system is developed based on nRF52 SoC (System on Chip), and contained a 3-axis digital accelerometer, a digital microphone, and a SD card. In this paper of experiment steps, we analyzed the performance of COS MEMS system with gathering the accelerometer raw data and the PDM (Pulse Data Modulation) data of MEMS microphone for broadcasting the failure of COS status.

• 대한의용생체공학회:의공학회지
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• 제43권2호
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• pp.124-130
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• 2022

In this paper, we proposed a portable electronic cardiogram and stethoscope (ECGS) that can simultaneously perform the electrocardiogram (ECG) and auscultation tests to increase the reliability of diagnosis of heart disease. To measure the ECG and heart sound (HS) at the same time, three ECG electrodes and a microphone sensor were combined into a triangular shape with a width of 90 mm and a height of 97 mm that can be held in one hand. In order to prevent skin problems when they contact the patient's skin, a capacitive coupled electrode was selected as the ECG electrode and a silicone material was used in a chest piece with the microphone sensor. For the signals measured from the electrodes and the chest piece, filters were respectively configured to pass only the signals of 0.01-100 Hz and 20-250 Hz, which are frequency bands for ECG and HS. The filtered ECG and HS analog signals were converted into digital signals and transmitted to a PC using wireless communication for monitoring them. The HS could be auscultated simultaneously using an earphone. The monitored ECG had an SNR of about 34 dB and a P-QRS-T waveform is clearly visible. In addition, the HS had an SNR of about 28 dB and both S₁ and S₂ are clearly visible. It is expected that it can aid doctors' inexperience in analyzing the ECG and HS.