DOI QR코드

DOI QR Code

Low-Noise MEMS Microphone Readout Integrated Circuit Using Positive Feedback Signal Amplification

  • Kim, Yi-Gyeong (ICT Materials & Components Research Laboratory, ETRI) ;
  • Cho, Min-Hyung (ICT Materials & Components Research Laboratory, ETRI) ;
  • Lee, Jaewoo (ICT Materials & Components Research Laboratory, ETRI) ;
  • Jeon, Young-Deuk (ICT Materials & Components Research Laboratory, ETRI) ;
  • Roh, Tae Moon (ICT Materials & Components Research Laboratory, ETRI) ;
  • Lyuh, Chun-Gi (ICT Materials & Components Research Laboratory, ETRI) ;
  • Yang, Woo Seok (ICT Materials & Components Research Laboratory, ETRI) ;
  • Kwon, Jong-Kee (ICT Materials & Components Research Laboratory, ETRI)
  • Received : 2015.07.25
  • Accepted : 2015.09.30
  • Published : 2016.04.01

Abstract

A low-noise readout integrated circuit (ROIC) for a microelectromechanical systems (MEMS) microphone is presented in this paper. A positive feedback signal amplification technique is applied at the front-end of the ROIC to minimize the effect of the output buffer noise. A feedback scheme in the source follower prevents degradation of the noise performance caused by both the noise of the input reference current and the noise of the power supply. A voltage booster adopts noise filters to cut out the noise of the sensor bias voltage. The prototype ROIC achieves an input referred noise (A-weighted) of -114.2 dBV over an audio bandwidth of 20 Hz to 20 kHz with a $136{\mu}A$ current consumption. The chip is occupied with an active area of $0.35mm^2$ and a chip area of $0.54mm^2$.

Keywords

References

  1. J. Citakovic et al., "A Compact CMOS MEMS Microphone with 66 dB SNR," Int. Solid-State Circuits Conf., San Francisco, CA, USA, Feb. 8-12, 2009, pp. 350-351.
  2. S.A. Jawed, "CMOS Readout Interfaces for MEMS Capacitive Microphones," Ph.D. thesis, School in Information and Communication Technologies, Univ. of Trento, Italy, 2009.
  3. A. Khenkin, MEMS Microphone Technol.: From Theory to Appl., Analog Device, 2013. Accessed Mar. 3, 2013. http://www.analog.com
  4. A. Dehe et al., "The Infineon Silicon MEMS Microphone," presented at the Int. Conf. Sensors Meas. Technol., Nuremberg, Germany, 2013.
  5. A. Uranga et al., "Electrically Enhanced Readout System for a High-Frequency CMOS-MEMS Resonator," ETRI J., vol. 31, no. 4, Aug. 2009, pp. 478-480. https://doi.org/10.4218/etrij.09.0208.0380
  6. J.H. Nielsen and C. Furst, Toward More-Compact Digital Microphones, Analog Dialogue, Analog Device, 2014. Accessed Mar. 3, 2014. http://www.analog.com/library/analogdialogue/cd/vol41n3.pdf
  7. InvenSense, MICROPHONE SPECIFICATIONS EXPLAINED, InvenSense, 2015. Accessed Mar. 3, 2015. http://www.invensense.com/wp-content/uploads/2015/02/MICROPHONE-SPECIFICATIONS-EXPLAINED2.pdf
  8. STMicroelectronics, Tutorial for MEMS microphones, STMicroelectronics, STMicroelectronics, 2015. Accessed Mar. 3, 2015. http://www.st.com/st-web-ui/static/active/cn/resource/ technical/document/application_note/DM00103199.pdf
  9. InvenSense, RF-Hardened, Ultra-low Noise Microphone with Bottom Port and Analog Output, InvenSense, 2014. Accessed July 2, 2014. http://www.invensense.com/wp-content/uploads/2015/02/INMP510.pdf
  10. S. Ersoy et al., "A $0.25 mm^2$ AC-Biased MEMS Microphone Interface with 58 dBA," Int. Solid-State Circuits Conf., San Francisco, CA, USA, Feb. 17-21, 2013, pp. 382-383.

Cited by

  1. Implementation and evaluation of a front-end ASIC for noise dosimeter applications vol.107, pp.2, 2016, https://doi.org/10.1080/00207217.2019.1661020