Performance Test and Evaluations of a MEMS Microphone for the Hearing Impaired |
Kwak, Jun-Hyuk
(Korea Institute of Machinery & Materials)
Kang, Hanmi (School of Electronics Engineering, Kyungpook National University) Lee, YoungHwa (Korea Institute of Machinery & Materials) Jung, Youngdo (Korea Institute of Machinery & Materials) Kim, Jin-Hwan (Korea Institute of Machinery & Materials) Hur, Shin (Korea Institute of Machinery & Materials) |
1 | E. M. McMillan, "Violation of the reciprocity theorem in linear passive electromechanical systems", J. Acoust. Soc. Am., Vol. 18, pp. 344, 1946. DOI |
2 | S. Chowdhury, M. Ahmadi, and W. C. Miller, "Design of a MEMS acoustical beamforming sensor microarray", IEEE Sens. J., Vol. 2, Issue 6, pp. 617-627, 2002. DOI ScienceOn |
3 | N. Mohamad, P. Iovenitti, and T. Vinay, "High sensitivity capacitive MEMS microphone with spring supported diaphragm", Proc. Of Device and Process Technologies for Microelectronics, p. 68001, Canberra, ACT, Australia,2008. |
4 | B. Jacob, C. Jingdong, and H. Yiteng, Microphone Array Signal Processing, Springer, pp.185-189, 2008. |
5 | L. H. Xiang, L. M. Wang, and A. N. Yu, "Modeling microphone in PSpice based on neural network", International Conference on Computer Application and System Modeling, pp. 13-28, Shanxi. Taiyuan, 2010. |
6 | J. J. Neumann, Jr. and K. J. Gabriel, "A fully-integrated CMOS-MEMS audio microphone", TRANSDUCERS 2003, The 12th International Conference on Solid-State Sensors, Actuators and Microsystems, pp. 230-233, Boston, USA, 2003. |
7 | C. Leinenbach, L. van Teeffelen, F. Laermer, and H. Seidel, "A new capacitive type MEMS microphone", 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems, pp. 659-662, Hong-Kong, 2010. |
8 | J. Citakovic, P. F. Hovesten, G. Rocca, A. van Halteren, P. Rombach, L. J. Stenberg, P. Andreani, and B. Erik, "A compact CMOS MEMS microphone with 66dB SNR", IEEE International on Solid-State Circuits Conference, pp. 350-351a, USA, 2009. |
9 | J. Liu, T. M. David, K. Kadirvel, T. Nishida, L. Cattafesta, M. Sheplak, and B. P. Mann, "Nonlinear model and system identification of a capacitive dual-backplate MEMS microphone", J. Sound Vibr., Vol. 309, Issue 1-2, pp. 276-292, 2008. DOI ScienceOn |
10 |
S. A. Jawed, D. Cattin, M. Gottardi, N. Massari, A. Baschirotto, and A. Simoni, "A 828 |
11 | S. Chowdhury, M. Ahmadi, and W. C. Miller, "Nonlinear effects in MEMS capacitive microphone design", International Conference on Micro Electro Mechanical Systems, pp. 297-302, Banff, Alta., Canada, 2003. |
12 | M. Haris and H. Qu, "Fully differential CMOS-MEMS z-axis accelerometer with torsional structures and planar comb fingers", J. Micro-Nanolithogr. MEMS MOEMS, Vol. 9, Issue 1, p. 013031, 2009. |
13 | H. A. C. Tilmans, "Equivalent circuit representation of electromechanical transducers: I. Lumped-parameter systems", J. Micromech. Microeng., Vol. 6, Issue 1, pp. 157, 1996. DOI ScienceOn |
14 | P. R. Scheeper, B. Nordstrand, J. O. Gullv, B. Liu, C. Thomas, L. Midjord, and T. Storgaard-Larsen, "A new measurement microphone based on MEMS technology", J. Microelectromech. Syst., Vol. 12, Issue. 6, pp. 880-891, 2003. DOI ScienceOn |
15 | E. H. Yang and D. V. Wiberg, "A new wafer-level membrane transfer technique for MEMS deformable mirrors", IEEE Conf. on Micro Electro Mechanical Systems, pp. 80-83, Interlaken, Switzerland, 2001. |
16 | O. Auciello, J. Birrell, J. A. Carlisle, J. E. Gerbi, X. Xiao, B. Peng, and H. D. Espinosa, "Materials science and fabrication processes for a new MEMS technology based on ultra nano crystalline diamond thin films", J. Phys.-Condens. Matter, Vol. 16, No. 16, pp. 532-559, 2004. |
17 | F. Jiang, Y. C. Tai, K. Walsh, T. Tsao, G. B. Lee, and C. M. Ho, "A flexible MEMS technology and its first application to shear stress sensor skin", Proc. of IEEE workshop. on Micro Electro Mechanical Systems, pp. 465-470, Nagoya, Japan, 1997. |
18 | V. R. Arie, "Integrated circuits for high performance electret microphones", Audio Engineering Society, pp. 5719-5725, Amsterdam, The Netherlands, 2003. |
![]() |