• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.487-490
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• 1995

This paper discisses the effects geometric errors on the measurement of error motions of rotor with the cylindrical capacitive displacement sensor. Analytic model of the measuring process with this sensor is derived and this model shows that the effect of geometric errors of sensor is larger than that of rator on the measurement of error motions of rotor. The computer simulation shows effect of periodic errors in this sensor on the measuring orbit.

• Journal of Sensor Science and Technology
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• v.14 no.4
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• pp.219-224
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• 2005

In this paper, a contact-type linear encoder-like capacitive displacement sensor (CLECDS) is proposed. It is based on the linear encoder capacitive displacement sensor that consists of two substrates with a series of conducting grating in identical size and it is used as a contact sensor of which the two substrates assembled faced to each other after coated with thin dielectric film. It was confirmed that the prototype of this sensor has resolution of about 126nm and measuring range of 20 mm in the test.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.841-842
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• 2011

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.1103-1104
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• 2011

• Journal of the Semiconductor & Display Technology
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• v.14 no.2
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• pp.1-7
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• 2015

In this paper, a new capacitive pressure sensor has been proposed for a displacement measurement. The new sensor is mainly composed of a gap of $5{\mu}m$ and a notch of $1{\mu}m$. And the sensor has the performance as the high sensitivity and capacitance compared with a commercial capacitive sensor. Therefore, the advantages of the new capacitive pressure sensor are good sensitivity in normal range, mechanically robust and large overload protection. The analytical model is induced for confirming the performance of the proposed sensor. In addition, FEM (finite elements method) simulation has been performed to verify the analytical model. Firstly, the displacement characteristics of diaphragm membrane were simulated by the analytical model and FEM in the case of different structure and materials. At last, through this analysis, these simulation results can be predicted the change of the performance when the device parameters are varied. And it is used as a design tool to achieve at a set of performance we desired.

• Journal of Sensor Science and Technology
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• v.21 no.6
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• pp.440-445
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• 2012

Contact-type Linear Encoder-like Capacitive Displacement Sensor (CLECDiS) is a novel displacement sensor which has wide measurable range with high resolution. The sensor, however, is very sensitive to relative rotational alignment between stator and mover of the sensor as well as its displacement. In addition to, there can be some disturbances in the relative rotational alignment, so some noises occur in the sensor's output signal by the disturbances. This negative effect of the high sensitivity may become larger as increasing sensitivity. Therefore, this negative effect of the high sensitivity has to be compensated and reduced to achieve nanometer resolution of the sensor. In this study, a new type capacitive linear encoder with a mechanical guide is presented to reduce the relative rotational alignment problem. The presented method is not only to reduce the alignment problem, but also to assemble the sensor to the stage conveniently. The method is based on a new type CLECDiS that has mechanical guide autonomously. In the presented sensor, when the device is fabricated by micro-machining, the guide-rail is also fabricated on the surface of the sensor. By the direct fabrication of the guide-rail with high precision micro-machining, errors of the guide-rail can be reduced significantly. In addition, a manual yaw alignment is not required to obtain large magnitude of the output signal after the assembly of the sensor and the stage. The sensor movement is going to follow the guide-rail automatically. The prototype sensor was fabricated using the presented method, and we verify the feasibility experimentally.

• Transactions of the Korean Society of Mechanical Engineers
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• v.19 no.9
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• pp.2082-2088
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• 1995

In this paper, we designed and fabricated the magnetic bearings and built-in type cylindrical capacitive transducers for improving the vibration characteristics of rotating shaft. The eddy current and magnetic field from the electromagnet of the bearing don't affect the measuring signal of the capacitive type transducers so that it is possible to locate the capacitive sensor plates around the magnetic bearing poles and can improve the spillover problem which is induced by the noncollocation of the sensors and actuators. According to the sensitivity calibration schemes using a X-Y table, the cylindrical capacitive transducers have a good linearities in the .+-.70.mu.m range from the geometric center of the sensor plates. The measured results also show high displacement sensitivities of the sensors. According to the performance test of the magnetic bearing which is controlled by the analog PD controllers, we found that the built-in capacitive transducer system successfully measures the journal displacement in the magnetic field and therefore the magnetic bearing system supports the rotating shaft up to 12,000 rpm.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.8
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• pp.886-893
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• 2011

To increase the reliability and positional accuracy of a machine tool, a novel capacitive displacement sensor having a cylindrical shape is presented to measure the axial displacement of a machine tool spindle. Characteristics of the sensor were analyzed by numerical simulation. The sensor was built into a specific machine tool spindle and its performance was experimentally investigated. The accuracy of a thermal error compensation system of a machine tool can be enhanced greatly using proposed sensor.

• Journal of the Korean Society for Precision Engineering
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• v.12 no.3
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• pp.23-31
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• 1995

The sending characteristics of the non-contact type displacement transducers can affect the performances of the magnetic bearing systems when they support the rotating shaft. The probe type displacement sensor detects not only the displacement of the rotor at the sensing position but also the surface irregularitis of the rotor such as surface roughnessand roundness errors. If there exist such measuring errors, the magnetic bearing can not apply proper force against the rotor displacements for the detected signal is the input to the magnetic bearing controllers. The cylindrical shape capacitive transducer can detect the rotor displacement by the integral sum of the charges which are formed between the sensor plates and rotor so that it can reduce the detecting errors induced by the surface irregularities of the rotor. By theore- tical analysis, we compared the sensing characteristics of the cylindrical shape capacitive transducers for the rotors that have some sinusoidal irregularities with that of the ideal probe type displacement transducers.

• ETRI Journal
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• v.36 no.3
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• pp.361-366
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• 2014

In this paper, a new, simple capacitive tilt sensor with a metallic ball is proposed. The proposed tilt sensor has only two electrodes and a metallic ball, and this design assists in managing the inherent contact problem in measuring tilt angles. Capacitive sensing, compared with other types of tilt sensor, has many advantages such as simplicity, noncontact measurement, long-throw linear displacement, and sub-micron plate spacing. Its design and fabrication process are significantly simpler than previous types of tilt sensors. The dimensions of the prototype tilt sensor are $20mm{\times}20mm$, and the diameter of the polystyrene tube is 5 mm with a tube thickness of 0.15 mm. An analytical study of the prototype capacitive tilt sensor was undertaken, and the experimental results demonstrate the relationship between the tilt angles and measured capacitances compared with the analytical study.